Advanced Sensor Research最新文献

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Issue Information (Adv. Sensor Res. 10/2026) 发布信息(ad . Sensor Res. 10/2026)
IF 5
Advanced Sensor Research Pub Date : 2026-10-02 DOI: 10.1002/adsr.70216
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引用次数: 0
Three-Dimensional Water Flow Vector Sensor using an Absolute Pressure Sensor Array on a Dodecahedral Origami Substrate 基于绝对压力传感器阵列的十二面体折纸基板三维水流矢量传感器
IF 5
Advanced Sensor Research Pub Date : 2026-09-27 DOI: 10.1002/adsr.70211
Ryusei Ando, Takuto Kishimoto, Kyota Shimada, Hidetoshi Takahashi
{"title":"Three-Dimensional Water Flow Vector Sensor using an Absolute Pressure Sensor Array on a Dodecahedral Origami Substrate","authors":"Ryusei Ando,&nbsp;Takuto Kishimoto,&nbsp;Kyota Shimada,&nbsp;Hidetoshi Takahashi","doi":"10.1002/adsr.70211","DOIUrl":"https://doi.org/10.1002/adsr.70211","url":null,"abstract":"<p>Recent marine applications, including aquaculture monitoring and underwater drones, demand compact, energy-efficient sensors for three-dimensional (3D) water flow measurement. However, conventional 3D water flow sensors are typically bulky and energy-intensive, limiting their use in such systems. This study proposes a lightweight, low-power 3D water flow vector sensor that integrates multiple absolute pressure elements on a spherical housing. The surface pressure pattern, which varies with flow speed and angle, is analyzed using a neural network regression model to estimate 3D flow vectors. The use of absolute pressure sensors simplifies fabrication, while a dodecahedral Kiri-origami substrate enables a compact and symmetric arrangement of the sensor elements. This simple sensor design, combining the Kiri-origami substrate and low-power pressure sensors, results in a total weight of approximately 0.1 kg and a power consumption of approximately 55 mW. Simulation-based evaluation confirms high estimation accuracy with low angular dependence, and water-tunnel experiments demonstrate the sensor's sensitivity to flow variations. The trained model achieves a speed error of 0.03 m/s and an angular error of 5° for flow speeds of 0.4 m/s or above. These results demonstrate the proposed sensor's potential as a compact and energy-efficient solution for 3D marine flow measurements.</p>","PeriodicalId":100037,"journal":{"name":"Advanced Sensor Research","volume":"5 9","pages":""},"PeriodicalIF":5.0,"publicationDate":"2026-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://onlinelibrary.wiley.com/doi/epdf/10.1002/adsr.70211","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149146532","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Neurofluid Biomarker Sensors: Integrated Design Strategies From Molecular Recognition to Precision Neurological Diagnosis 神经流体生物标记传感器:从分子识别到精确神经诊断的集成设计策略
IF 5
Advanced Sensor Research Pub Date : 2026-09-25 DOI: 10.1002/adsr.70209
Ting Li, Guoying Pan, Yuheng Wang, Xin Zou, Hui Yang
{"title":"Neurofluid Biomarker Sensors: Integrated Design Strategies From Molecular Recognition to Precision Neurological Diagnosis","authors":"Ting Li,&nbsp;Guoying Pan,&nbsp;Yuheng Wang,&nbsp;Xin Zou,&nbsp;Hui Yang","doi":"10.1002/adsr.70209","DOIUrl":"https://doi.org/10.1002/adsr.70209","url":null,"abstract":"<p>The occurrence, progression, and treatment of neurological diseases are accompanied by complex humoral chemical changes, including ion imbalances, neurotransmitter disturbances, metabolic abnormalities, and abnormally elevated levels of inflammatory factors and pathological proteins. These molecular dynamics often precede the onset of clinical symptoms. Therefore, real-time and accurate monitoring of these neurofluid biomarkers is crucial for early disease diagnosis, efficacy evaluation, and mechanistic research. However, the cerebrospinal fluid, interstitial fluid, and brain tissue microenvironment are complex, including factors such as low target molecule content, rapid changes in the microenvironment, strong background interference, and the risk of tissue damage, making neurofluid monitoring extremely challenging and thus driving the development of various advanced sensing technologies. Unlike previous reviews that primarily focused on single sensor modalities or specific biomarker classes, this review uniquely integrates the transducer-based classifications (electrochemical, optical, mechanical, and multimodal platforms) in neurofluid sensing technologies and design strategies driven by different classes of neurofluid biomarkers (ions, neurotransmitters, metabolites, and inflammatory proteins). Furthermore, this review summarizes the challenges and future development directions of neurofluid sensors, providing a comprehensive and interdisciplinary framework aimed at offering a systematic reference and future development guidance for promoting the development of intelligent, highly sensitive, and clinically translatable neurofluid sensing technologies.</p>","PeriodicalId":100037,"journal":{"name":"Advanced Sensor Research","volume":"5 9","pages":""},"PeriodicalIF":5.0,"publicationDate":"2026-09-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://onlinelibrary.wiley.com/doi/epdf/10.1002/adsr.70209","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149048575","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Proton-Radiation-Tolerant Silicon Photonic Charge Sensor for Spacecraft Applications 用于航天器的耐质子辐射硅光子电荷传感器
IF 5
Advanced Sensor Research Pub Date : 2026-09-22 DOI: 10.1002/adsr.70208
Wataru Takahama, Kosei Otsuka, Ayumi Ishihara, Rikuto Hojo, Tomofumi Mogami, Kazuhiro Toyoda, Kohtaku Suzuki, Yasushi Takahashi
{"title":"Proton-Radiation-Tolerant Silicon Photonic Charge Sensor for Spacecraft Applications","authors":"Wataru Takahama,&nbsp;Kosei Otsuka,&nbsp;Ayumi Ishihara,&nbsp;Rikuto Hojo,&nbsp;Tomofumi Mogami,&nbsp;Kazuhiro Toyoda,&nbsp;Kohtaku Suzuki,&nbsp;Yasushi Takahashi","doi":"10.1002/adsr.70208","DOIUrl":"https://doi.org/10.1002/adsr.70208","url":null,"abstract":"<p>Silicon waveguides are promising platforms for spacecraft potential sensing owing to their compactness and immunity to electromagnetic interference. However, proton-induced optical absorption in operating silicon waveguides has not been quantitatively clarified, despite their direct exposure to the space radiation environment during spacecraft operation. Here, we present a systematic elucidation of proton-radiation effects on a photonic charge sensor based on silicon photonic crystal waveguides. During proton irradiation at 20 keV, we quantitatively evaluate the increase in optical absorption under device operation and find that a fluence of 1.0 × 10<sup>14</sup> cm<sup>−2</sup> induces an additional absorption coefficient of approximately 0.41 cm<sup>−1</sup>. We further demonstrate that the sensor retains its ability to measure spacecraft potential even after exposure to a high proton fluence of 1.0 × 10<sup>15</sup> cm<sup>−2</sup>, confirming its intrinsic radiation tolerance. These results establish the radiation robustness of silicon-waveguide-based sensing mechanisms and provide the first quantitative basis for implementing photonic charge sensors in radiation-rich spacecraft environments.</p>","PeriodicalId":100037,"journal":{"name":"Advanced Sensor Research","volume":"5 9","pages":""},"PeriodicalIF":5.0,"publicationDate":"2026-09-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://onlinelibrary.wiley.com/doi/epdf/10.1002/adsr.70208","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149048352","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Chemically Welded, Capillary-Printed Ion-Selective Membranes for Durable Solid-State Chloride Sensors in Dynamic Marine Environments 化学焊接,毛细管印刷离子选择膜耐用固态氯化物传感器在动态海洋环境
IF 5
Advanced Sensor Research Pub Date : 2026-09-22 DOI: 10.1002/adsr.70210
Zachary Taylor, Scott Soelberg, Changwoo Lee, Erin Firth, John Kucewicz, Michael Steele, Anuscheh Nawaz, Jae-Hyun Chung
{"title":"Chemically Welded, Capillary-Printed Ion-Selective Membranes for Durable Solid-State Chloride Sensors in Dynamic Marine Environments","authors":"Zachary Taylor,&nbsp;Scott Soelberg,&nbsp;Changwoo Lee,&nbsp;Erin Firth,&nbsp;John Kucewicz,&nbsp;Michael Steele,&nbsp;Anuscheh Nawaz,&nbsp;Jae-Hyun Chung","doi":"10.1002/adsr.70210","DOIUrl":"https://doi.org/10.1002/adsr.70210","url":null,"abstract":"<p>Salinity is a critical environmental parameter governing ocean circulation, biogeochemical processes, and ecosystem health, yet existing conductivity-based sensors remain costly and sensitive to variations in ionic composition. Here, we present a low-cost, scalable potentiometric chloride (Cl<sup>−</sup>)-sensing platform for salinity monitoring in dynamic marine environments. The system integrates a chemically welded ion-selective membrane (ISM) fabricated via capillary-bridge printing using controlled meniscus deposition and a miniaturized Ag/AgCl reference electrode. This printing process is modeled as a function of contact angle, tip speed, and viscosity, enabling precise control of membrane thickness and interfacial bonding. The meniscus-driven deposition is coupled with polymer–substrate interpenetration, ensuring strong adhesion and structural uniformity. The resulting ISM suppresses the formation of an interfacial water layer and exhibits enhanced resistance to delamination under prolonged aqueous exposure. The Cl<sup>−</sup>-selective electrodes exhibit a stable response at environmentally relevant concentrations, with low variability and reduced drift, while the custom reference electrode achieves stable performance with minimal concentration dependence. Ocean deployment demonstrates robust performance under strong salinity gradients and tidal dynamics. Differences between Cl<sup>−</sup>-derived and conductivity-derived salinity measurements are analyzed in relation to ionic composition, demonstrating the complementary roles of selective and non-selective sensing.</p>","PeriodicalId":100037,"journal":{"name":"Advanced Sensor Research","volume":"5 9","pages":""},"PeriodicalIF":5.0,"publicationDate":"2026-09-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://onlinelibrary.wiley.com/doi/epdf/10.1002/adsr.70210","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149048351","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Selective Detection of Methamphetamine Hydrochloride Using Fluorescent Benzo[ghi]perylenetriimide Thin Films in a Single-Channel Detector· 单通道荧光苯并[ghi]苝酰亚胺薄膜选择性检测盐酸甲基苯丙胺
IF 5
Advanced Sensor Research Pub Date : 2026-09-17 DOI: 10.1002/adsr.70205
Shengqiang Fan, Guanran Zhang, Oliver Lindsay, Paul L. Burn, Ian R. Gentle, Paul E. Shaw
{"title":"Selective Detection of Methamphetamine Hydrochloride Using Fluorescent Benzo[ghi]perylenetriimide Thin Films in a Single-Channel Detector·","authors":"Shengqiang Fan,&nbsp;Guanran Zhang,&nbsp;Oliver Lindsay,&nbsp;Paul L. Burn,&nbsp;Ian R. Gentle,&nbsp;Paul E. Shaw","doi":"10.1002/adsr.70205","DOIUrl":"https://doi.org/10.1002/adsr.70205","url":null,"abstract":"<p>Rapid detection of trace-level quantities of illicit drugs is essential for those in law enforcement, customs, and border security. We report fluorescent benzo[ghi]perylenetriimide (BPTI) films incorporated into a simple device architecture that can selectively detect methamphetamine hydrochloride (MA•HCl) over 3,4-methylenedioxyamphetamine hydrochloride (MDA•HC), cocaine hydrochloride (cocaine•HCl), and fentanyl hydrochloride (fentanyl•HCl) with a limit of detection of 10 ng. We show that heating the drug salts generates a vapour in which the free-base drug and hydrogen chloride are in equilibrium with the salt. The free-base form is responsible for reversible quenching of the fluorescence via photoinduced hole transfer (PHT). The magnitude and shape of the response are dependent on the salt:free-base equilibrium and free-base volatility, which are to the left and highest, respectively, for MA•HCl. Finally, we show that a potassium carbonate filter can be used to preferentially enhance the magnitude of the fluorescence response for MA•HCl, improving its selective detection.</p>","PeriodicalId":100037,"journal":{"name":"Advanced Sensor Research","volume":"5 9","pages":""},"PeriodicalIF":5.0,"publicationDate":"2026-09-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://onlinelibrary.wiley.com/doi/epdf/10.1002/adsr.70205","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148994548","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Technique for Generating Realistic Synthetic Photoluminescence Time-Series Data with Quenching Events 一种具有猝灭事件的合成光致发光时间序列真实数据生成技术
IF 5
Advanced Sensor Research Pub Date : 2026-09-17 DOI: 10.1002/adsr.70203
Harrison Stitt, Guanran Zhang, Paul E. Shaw, Ian A. Wood
{"title":"A Technique for Generating Realistic Synthetic Photoluminescence Time-Series Data with Quenching Events","authors":"Harrison Stitt,&nbsp;Guanran Zhang,&nbsp;Paul E. Shaw,&nbsp;Ian A. Wood","doi":"10.1002/adsr.70203","DOIUrl":"https://doi.org/10.1002/adsr.70203","url":null,"abstract":"<p>A novel technique is presented for generating realistic synthetic photoluminescence (PL) datasets to support the development of fluorescence-based sensor algorithms for chemical threat detection. Collecting large, well-annotated experimental datasets is costly and slow, often taking months due to complex sample preparation and the handling of toxic analytes. In contrast, the proposed simulation approach requires only 60 to 110 experimental samples to capture system dynamics and generate virtually unlimited synthetic traces. This method replicates the statistical and physical properties of sensor–analyte pairs, allowing customization of analyte concentration, exposure time, and event prevalence. PL traces are modeled in two parts: baseline drift and analyte-induced response. Baseline drift is captured using principal component analysis (PCA), while kernel density estimation (KDE) models the continuous distribution of the PCA scores to enable the stochastic generation of new, realistic baselines. Component trajectories are fitted to constrained exponential functions for temporal extrapolation, and intensity-dependent noise is incorporated based on modelling after wavelet decomposition. Detection events are simulated using a thin-film diffusion model coupled with a Stern-Volmer relation. Validated against experimental data, this scalable pipeline mimics natural variability and significantly reduces reliance on costly experimental data acquisition.</p>","PeriodicalId":100037,"journal":{"name":"Advanced Sensor Research","volume":"5 9","pages":""},"PeriodicalIF":5.0,"publicationDate":"2026-09-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://onlinelibrary.wiley.com/doi/epdf/10.1002/adsr.70203","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148994547","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Bioinspired Sinusoidal Corrugation for High-Performance Motion Sensing in Wearable Human-Machine Interfaces 仿生正弦波纹在可穿戴人机界面中的高性能运动传感
IF 5
Advanced Sensor Research Pub Date : 2026-09-16 DOI: 10.1002/adsr.70167
Yu Feng, Hui Sun, Yehui Liu, Cong Wu, Jiankun Li, Senlin Hou, Meng Chen, Qiaojiao Wang, Guanglie Zhang, Arul Lenus Roy Vellaisamy, Walid A. Daoud, Wen Jung Li
{"title":"Bioinspired Sinusoidal Corrugation for High-Performance Motion Sensing in Wearable Human-Machine Interfaces","authors":"Yu Feng,&nbsp;Hui Sun,&nbsp;Yehui Liu,&nbsp;Cong Wu,&nbsp;Jiankun Li,&nbsp;Senlin Hou,&nbsp;Meng Chen,&nbsp;Qiaojiao Wang,&nbsp;Guanglie Zhang,&nbsp;Arul Lenus Roy Vellaisamy,&nbsp;Walid A. Daoud,&nbsp;Wen Jung Li","doi":"10.1002/adsr.70167","DOIUrl":"https://doi.org/10.1002/adsr.70167","url":null,"abstract":"<p>Nature employs corrugated architectures to redistribute strain and maintain mechanical compliance during large deformations, an attractive approach for robust sensing in wearable and human-robot interactive systems. Here, we report a bioinspired sinewave-corrugated-structure (SCS) flexible sensor that uses a sinusoidal geometry to homogenize strain along the active layer, thereby improving elasticity and mitigating localized stress concentration. Benefiting from this structural design, the SCS sensor achieves a balanced sensing profile, combining high strain sensitivity (a maximum gauge factor of 3.41, 40%–60% strain range), rapid response (0.475 s), low hysteresis (0.05), and long-term cycling stability (over 12 000 cycles). We further demonstrate its utility for intelligent-interface scenarios, including continuous body-motion monitoring, real-time Morse-code input, and human-robot interaction, illustrating reliable signal acquisition across diverse deformation modes. These results underscore how bioinspired corrugation geometries can serve as an effective structural route toward durable, high-performance motion sensors for next-generation intelligent wearable and robotic systems.</p>","PeriodicalId":100037,"journal":{"name":"Advanced Sensor Research","volume":"5 9","pages":""},"PeriodicalIF":5.0,"publicationDate":"2026-09-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://onlinelibrary.wiley.com/doi/epdf/10.1002/adsr.70167","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148994084","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
AI-Assisted SERS in Bacterial Diagnosis and Antimicrobial Susceptibility Testing: Advances, Gaps, and Translational Pathways 人工智能辅助SERS在细菌诊断和抗菌药物敏感性测试:进展,差距和转化途径
IF 5
Advanced Sensor Research Pub Date : 2026-09-15 DOI: 10.1002/adsr.70195
Chen Liu, Yu Liu, Junlu Wang, Yujie Liu, Qijia Zhan, Jiangang Liu, Ruoping Chen, Kun Zhang
{"title":"AI-Assisted SERS in Bacterial Diagnosis and Antimicrobial Susceptibility Testing: Advances, Gaps, and Translational Pathways","authors":"Chen Liu,&nbsp;Yu Liu,&nbsp;Junlu Wang,&nbsp;Yujie Liu,&nbsp;Qijia Zhan,&nbsp;Jiangang Liu,&nbsp;Ruoping Chen,&nbsp;Kun Zhang","doi":"10.1002/adsr.70195","DOIUrl":"https://doi.org/10.1002/adsr.70195","url":null,"abstract":"<p>The escalating global crisis of antimicrobial resistance (AMR) demands rapid, accurate, and accessible methods for bacterial identification and antimicrobial susceptibility testing (AST). Surface-enhanced Raman spectroscopy (SERS) offers high sensitivity, molecular fingerprinting capability, and non-destructive detection, positioning it as a promising tool for microbiological diagnostics. The integration of artificial intelligence (AI), particularly machine learning and deep learning, enables automated extraction of latent features from complex SERS spectra, transforming raw data into actionable diagnostic insights. This review surveys recent advances in SERS substrate engineering, AI-driven bacterial identification and metabolite-based AST strategies, and the emergence of interpretable AI frameworks that bridge spectral patterns with biochemical mechanisms. We further examine the challenges impeding clinical translation, including substrate batch variability, cross-device spectral inconsistency, and the lack of orthogonal biochemical validation for model interpretability, and outline a pragmatic roadmap toward standardized, point-of-care deployment of AI-SERS in bacterial diagnostics.</p>","PeriodicalId":100037,"journal":{"name":"Advanced Sensor Research","volume":"5 9","pages":""},"PeriodicalIF":5.0,"publicationDate":"2026-09-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://onlinelibrary.wiley.com/doi/epdf/10.1002/adsr.70195","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148994071","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Front Cover: Quasi-Standard Platform of AlScN Piezoelectric Integrated MEMS Technology (PIMT) For Multi-Project Wafer Fabrication (Adv. Sensor Res. 9/2026) 前盖:用于多项目晶圆制造的AlScN压电集成MEMS技术(PIMT)准标准平台(ad . Sensor Res. 9/2026)
IF 5
Advanced Sensor Research Pub Date : 2026-08-31 DOI: 10.1002/adsr.70200
Yongquan Su, Yuqiang Hu, Xingwang Zhu, Wenli Xue, Hao Huang, Yichen Liu, Jiachen Han, Anna Li, Cheng Zhang, Wanzhu Qiao, Jiaqi Huang, Peng Ding, Qianying Sun, Huan Liu, Tao Wu, Lihao Wang, Yang Wang, Hao Chen, Zhenyu Wu
{"title":"Front Cover: Quasi-Standard Platform of AlScN Piezoelectric Integrated MEMS Technology (PIMT) For Multi-Project Wafer Fabrication (Adv. Sensor Res. 9/2026)","authors":"Yongquan Su,&nbsp;Yuqiang Hu,&nbsp;Xingwang Zhu,&nbsp;Wenli Xue,&nbsp;Hao Huang,&nbsp;Yichen Liu,&nbsp;Jiachen Han,&nbsp;Anna Li,&nbsp;Cheng Zhang,&nbsp;Wanzhu Qiao,&nbsp;Jiaqi Huang,&nbsp;Peng Ding,&nbsp;Qianying Sun,&nbsp;Huan Liu,&nbsp;Tao Wu,&nbsp;Lihao Wang,&nbsp;Yang Wang,&nbsp;Hao Chen,&nbsp;Zhenyu Wu","doi":"10.1002/adsr.70200","DOIUrl":"https://doi.org/10.1002/adsr.70200","url":null,"abstract":"<p><b>Multi-Project Wafer</b></p><p>By integrating core process modules for piezoelectric MEMS and optional additional process modules, the PIMT platform has established a multi-project wafer (MPW) manufacturing platform for piezoelectric MEMS devices, designed for rapid proof-of-concept and R&amp;D, whilst balancing the dual requirements of standardization and design flexibility. More details can be found in the Research Article by Yongquan Su, Zhenyu Wu, and co-workers (DOI: 10.1002/adsr.70191).\u0000\u0000 <figure>\u0000 <div><picture>\u0000 <source></source></picture><p></p>\u0000 </div>\u0000 </figure></p>","PeriodicalId":100037,"journal":{"name":"Advanced Sensor Research","volume":"5 9","pages":""},"PeriodicalIF":5.0,"publicationDate":"2026-08-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://onlinelibrary.wiley.com/doi/epdf/10.1002/adsr.70200","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148860217","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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