2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)最新文献

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Electrical conductivity and Seebeck coefficient measurements of single nanowires by utilizing a microfabricated thermoelectric nanowire characterization platform 利用微加工热电纳米线表征平台测量单纳米线的电导率和塞贝克系数
Z. Wang, S. Adhikari, M. Kroener, D. Kojda, R. Mitdank, S. F. Fischer, W. Toellner, K. Nielsch, P. Woias
{"title":"Electrical conductivity and Seebeck coefficient measurements of single nanowires by utilizing a microfabricated thermoelectric nanowire characterization platform","authors":"Z. Wang, S. Adhikari, M. Kroener, D. Kojda, R. Mitdank, S. F. Fischer, W. Toellner, K. Nielsch, P. Woias","doi":"10.1109/MEMSYS.2013.6474290","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474290","url":null,"abstract":"We demonstrate the fabrication and improvements of our next generation Thermoelectric Nanowire Characterization Platform (TNCP) that is utilized to investigate the thermoelectric properties of individual nanowires to obtain the Seebeck coefficient S, electrical conductivity σ and thermal conductivity κ from the same test specimen. Only from these data, the so-called figure of merit ZT can be obtained for a single nanowire. In order to analyze the structural composition of single nanowires the TNCP has also to fulfill the purpose of a sample holder used in Transmission Electron Microscopy. Our second generation of TNCPs has been designed for these purposes. As before, individual nanowires are assembled on the TNCP by means of dielectrophoresis. After this assembly the nanowire is merely physically contacted to the electrodes on the TNCP. Contact generation is in first place done by an electron beam-induced deposition (EBID) process of Pt and measurements of S and σ are carried out on individual nanowires and presented here. As the EBID process is very complex and difficult to handle we have developed a novel method using a shadow mask process for the local evaporation of platinum to generate ohmic contact between the nanowire and the surrounding electrodes.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75663145","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 12
Combinatorial differentiation induction of embrionic bodies in "PASCL (Pneumatically Actuated Spheroids Culture Lab-on-chip)" “气动驱动球体培养芯片实验室”中胚胎体的组合分化诱导
A. Yasukawa, M. Ikeuchi, K. Ikuta
{"title":"Combinatorial differentiation induction of embrionic bodies in \"PASCL (Pneumatically Actuated Spheroids Culture Lab-on-chip)\"","authors":"A. Yasukawa, M. Ikeuchi, K. Ikuta","doi":"10.1109/MEMSYS.2013.6474397","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474397","url":null,"abstract":"This paper reports the fabrication, combinatorial differentiation and analysis of embryonic bodies (EBs) in one device called “PASCL (Pneumatically Actuated Spheroids Culture Lab-on-chip)”. We demonstrated EBs formation from human adipose derived stem cells (ADSC), differentiation into adipocytes and osteoblasts and staining for differentiation monitoring all in one PASCL.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74706775","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Spira Mirabilis enhanced density gradient centrifguation 螺旋藻增强密度梯度离心
S. Kearney, D. Kinahan, J. Ducrée
{"title":"Spira Mirabilis enhanced density gradient centrifguation","authors":"S. Kearney, D. Kinahan, J. Ducrée","doi":"10.1109/MEMSYS.2013.6474427","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474427","url":null,"abstract":"The centrifugal microfluidic “lab-on-a-disc” paradigm is particularly suited to the pre-conditioning of whole blood. In this work we define the geometry of sedimentation chambers using the Spira Mirabilis (equiangular spiral) and so enhance the Boycott Effect and increase the speed at which blood may be stratified using a density gradient media. We find that using the Spira Mirabilis defined chambers can increase the speed of stratification by up to 25% compared with equivalent linear chambers.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73229956","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Bistable multiple-mass elecrostatic generator for low-frequency vibration energy harvesting 用于低频振动能量收集的双稳态多质量静电发电机
F. Cottone, P. Basset, R. Guillemet, D. Galayko, F. Marty, T. Bourouina
{"title":"Bistable multiple-mass elecrostatic generator for low-frequency vibration energy harvesting","authors":"F. Cottone, P. Basset, R. Guillemet, D. Galayko, F. Marty, T. Bourouina","doi":"10.1109/MEMSYS.2013.6474379","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474379","url":null,"abstract":"This paper reports a novel vibration energy harvester (VEH) design consisting of a double-mass contactless frequency-up converter with buckled clamped-clamped beams. The vibration to electricity conversion is performed through a MEMS silicon micro electrostatic vibration energy harvester (e-VEH) based on in-plane gap-closing interdigitated combs. Despite the fact that the converter itself is designed to resonate at 162 Hz, the use of the bistable stage as mechanical exciter allows a gain factor of hundred when converting low-frequency vibrations (20-40 Hz) into electrical energy.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72746096","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Portable continuous glucose monitoring systems with implantable fluorescent hydrogel microfibers 可植入荧光水凝胶微纤维的便携式连续血糖监测系统
M. Takahashi, Y. Heo, T. Kawanishi, T. Okitsu, S. Takeuchi
{"title":"Portable continuous glucose monitoring systems with implantable fluorescent hydrogel microfibers","authors":"M. Takahashi, Y. Heo, T. Kawanishi, T. Okitsu, S. Takeuchi","doi":"10.1109/MEMSYS.2013.6474439","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474439","url":null,"abstract":"We present a portable glucose monitoring system comprised of an implantable fluorescent-hydrogel sensor, wearable photo detector, microcontroller, wireless device and software for transdermal, continuous glucose monitoring. Although we showed the potential of the fluorescent-hydrogel fibers for applying to long-term, implanted glucose monitoring, “true” continuous glucose monitoring with a portable monitoring system has yet to be realized. In the system that we propose here, the calculated glucose values show a good correlation with the actual blood glucose concentrations. The portable device attached to the ear of a rat and measured the fluorescence intensity for three days. Therefore, our system shows the potential for practical, “true,” continuous glucose monitoring.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79076831","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Adaptable test-bed for characterization of micro-wineglass resonators 微型葡萄酒杯谐振器特性的适应性试验台
D. Senkal, M. Ahamed, A. Trusov, A. Shkel
{"title":"Adaptable test-bed for characterization of micro-wineglass resonators","authors":"D. Senkal, M. Ahamed, A. Trusov, A. Shkel","doi":"10.1109/MEMSYS.2013.6474280","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474280","url":null,"abstract":"We present an adaptable test-bed for characterization of 3-D micro-wineglass resonators. The test-bed provides two interchangeable modes of excitation: (1) Mechanical pinging using a piezo actuated probe assembly, (2) electrostatic excitation using assembled electrode structures with <; 20 μm capacitive gaps. Two modes of detection is also available: Optical pick-up using laser Doppler vibrometry and capacitive detection. 3-D micro-glassblown wineglass resonators were used to demonstrate the capabilities of the test-bed. Electrostatic excitation and capacitive detection was used to obtain the frequency response of a glass resonator showing a Q-factor of 40,000 at 14.8 kHz. Piezo-pinging was used to obtain the time domain response of a resonator, showing a 28 Hz frequency split (0.1% relative split) between the two degenerate wineglass modes (f1 = 22036 Hz, f2 = 22064 Hz).","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79234701","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 15
Metamaterial tunable filter with liquid metal 液态金属超材料可调滤波器
W. M. Zhu, W. Zhang, R. F. Huang, S. Ting, G. Lo, D. Kwong, A. Liu
{"title":"Metamaterial tunable filter with liquid metal","authors":"W. M. Zhu, W. Zhang, R. F. Huang, S. Ting, G. Lo, D. Kwong, A. Liu","doi":"10.1109/MEMSYS.2013.6474345","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474345","url":null,"abstract":"In this paper, we demonstrate a metamaterial tunable filter with liquid metal, which can be tuned by adjusting the size and position of the air gap within the liquid metal. In experiment, it measures a 2.3 GHz tuning range for the tunable metmaterial unit with the working wavelength of 8.9 GHz. The tuning of 5 × 5 unit array is also demonstrated. Different from traditional metamaterials [1, 2], the metal patterns of the tunable metamaterial filter are liquid state which can be reshaped once fabricated. The liquid state metal pattern not only advances in flexible tuning method, but also results in large tuning range for vast applications, such as tunable filter, accelerometer and optical switch.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85193224","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
An on-chip opto-mechanical accelerometer 片上光机械加速度计
B. Dong, H. Cai, J. Tsai, D. Kwong, A. Liu
{"title":"An on-chip opto-mechanical accelerometer","authors":"B. Dong, H. Cai, J. Tsai, D. Kwong, A. Liu","doi":"10.1109/MEMSYS.2013.6474323","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474323","url":null,"abstract":"Optically enabled accelerometers offer superior displacement resolution and resilience to electromagnetic interference, which brought benefits to a wide range of applications ranging from inertial navigation to consumer electronics [1, 2]. However, impossible chip scale integration hampered their practical applications [2]. In this paper, a novel in-plane opto-mechanical accelerometer is demonstrated, which employs Whisper Gallery Mode (WGM) ring resonator (RR) as a displacement sensor that monolithically integrated with a nano-tethered proof mass with high mechanical Q-factor. Utilizing design optimized for strong opto-mechanical interactions allows the detection with high sensitivity of 3.279 pm/g at low-power operation.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85148241","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 12
A miniature fiber-optic raster scanner for 2D optocal imaging of biological tissue 用于生物组织二维光学成像的微型光纤光栅扫描仪
H. Mansoor, H. Zeng, I. Tai, J. Zhao, M. Chiao
{"title":"A miniature fiber-optic raster scanner for 2D optocal imaging of biological tissue","authors":"H. Mansoor, H. Zeng, I. Tai, J. Zhao, M. Chiao","doi":"10.1109/MEMSYS.2013.6474196","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474196","url":null,"abstract":"This paper presents a handheld device for reflectance confocal imaging of biological tissue. A two-dimensional fiber optic raster scanner has been designed, manufactured and assembled in standard half-inch lens tubes. The scanner is driven by electromagnetic forces and provides large actuation range of ≥1 mm in both directions with driving current of ≤ 200 mA. Light polarization effects have been employed to improve image quality and contrast. The confocal scanner has lateral resolution of about 1.5 μm with imaging speed of 6 frames per second. Confocal images of a resolution target, fruit fly wing and excised normal human colon tissue were obtained as a preliminary study.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83726094","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Impedance biosensor based on interdigitated electrode arrays for detection of low levels of E.coli O157:H7 基于交叉指状电极阵列的阻抗生物传感器检测低水平大肠杆菌O157:H7
S. G. Dastider, Syed Barizuddin, Yifan Wu, M. Dweik, M. Almasri
{"title":"Impedance biosensor based on interdigitated electrode arrays for detection of low levels of E.coli O157:H7","authors":"S. G. Dastider, Syed Barizuddin, Yifan Wu, M. Dweik, M. Almasri","doi":"10.1109/MEMSYS.2013.6474404","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474404","url":null,"abstract":"We report an interdigitated electrode array (IDEA) impedance biosensor with rapid detection of Escherichia coli O157:H7. This biosensor has significantly better detection capability compared with the conventional microbiological testing method. The total detection time for this biosensor is under 3 hours. Dielectrophoresis (DEP) is used in conjunction with impedance spectroscopy to improve the detection capability of the biosensor. The IDEA surface is functionalized using anti-E.coli antibody for selectivity of the bacteria. The dose response was in-between 3 × 106 CFU/mL and 3 × 102 CFU/mL. This is 10 fold better than the detection limit previously reported using impedance based biosensors.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83357216","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 11
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