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2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)最新文献

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Enhancement of mechanical Q for low phase noise optomechanical oscillators 低相位噪声光机械振荡器机械Q的增强
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474191
T. Rocheleau, A. Grine, K. Grutter, R. Schneider, N. Quack, M. Wu, C. Nguyen
{"title":"Enhancement of mechanical Q for low phase noise optomechanical oscillators","authors":"T. Rocheleau, A. Grine, K. Grutter, R. Schneider, N. Quack, M. Wu, C. Nguyen","doi":"10.1109/MEMSYS.2013.6474191","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474191","url":null,"abstract":"A self-sustained Radiation-Pressure driven MEMS ring OptoMechanical Oscillator (RP-OMO) attaining an anchor-loss-limited mechanical Q-factor of 10,400 in vacuum has posted a best-to-date phase noise of -102 dBc/Hz at a 1 kHz offset from a 74 MHz carrier, more than 15 dB better than the best previously published mark [1]. While enhanced optical and mechanical Q both serve to lower the optical threshold power required to obtain oscillation, it is the mechanical Q that ends up having the strongest impact on phase noise [2], much as in a traditional MEMS-based oscillator [3]. This motivates a focus on increased mechanical Q-a challenge in previous such devices measured in air-and requires measurement in the absence of gas-damping using a custom optical vacuum measurement system. The improved phase noise performance of these RP-OMOs is now on par with many conventional MEMS-based oscillators and is sufficient for the targeted chip-scale atomic clock application.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78868977","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 19
RF switches using phase change materials 采用相变材料的射频开关
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474221
Yonghyun Shim, G. Hummel, M. Rais-Zadeh
{"title":"RF switches using phase change materials","authors":"Yonghyun Shim, G. Hummel, M. Rais-Zadeh","doi":"10.1109/MEMSYS.2013.6474221","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474221","url":null,"abstract":"Phase change materials are attractive candidates for use in ohmic switches as they can be thermally transitioned between amorphous and crystalline states, showing several orders of magnitude change in resistivity. Phase change switches are fast, small form factor, and can be readily integrated with MEMS and CMOS electronics. As such, they have a great potential for implementing next-generation high-speed reconfigurable RF modules. In this paper, we report on the RF properties of germanium tellurium, a PC material, and its use in RF switching applications. Intrinsic resistance and capacitance at the ON (crystalline) and OFF (amorphous) states of a directly heated switch are compared and characterized. Other properties such as phase transition conditions, insertion loss, return loss, and power handling capability of the switch are also measured and analyzed.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90351803","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 48
Parametrically driven resonant micro-mirror scanner with tunable springs 带可调弹簧的参数驱动谐振微镜扫描仪
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474308
Jinhyeok Kim, Y. Kawai, N. Inomata, T. Ono
{"title":"Parametrically driven resonant micro-mirror scanner with tunable springs","authors":"Jinhyeok Kim, Y. Kawai, N. Inomata, T. Ono","doi":"10.1109/MEMSYS.2013.6474308","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474308","url":null,"abstract":"In this paper, we design, fabricate and evaluate a resonant micro-mirror able to amplify the vibration amplitude using parametric amplification. In addition, the spring constant of torsion bars supporting the micro-mirror can be varied by stress generated using an electrothermal actuator, which can tune the resonant frequency of the torsional modes. The parametric amplification of the vibration of the torsional mode is demonstrated by applying a pumping signal using the electrothermal actuator.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89976595","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
High-sensitivity erectrochemical sensor using pyrolyzed polymer-gold 3D probe arrays for spatial chemical sensing 高灵敏度电化学传感器，采用热解聚合物-金三维探针阵列进行空间化学传感
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474419
W. Tonomura, Y. Mori, S. Konishi
{"title":"High-sensitivity erectrochemical sensor using pyrolyzed polymer-gold 3D probe arrays for spatial chemical sensing","authors":"W. Tonomura, Y. Mori, S. Konishi","doi":"10.1109/MEMSYS.2013.6474419","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474419","url":null,"abstract":"This paper reports spatially arranged pyrolyzed polymer-gold probes to allow high-sensitivity monitoring of spatially distributed chemicals. Pyrolyzed polymer is a promising carbon material for applications of electrochemical sensors. Out-of-plane gold microelectrodes coated by polymer film (parylene-C) are transformed to conductive carbon-gold materials by annealing at 1000°C for 2h in a vacuum chamber. 3D probe technology using wire bonding makes it possible to provide the spatially arranged microelectrodes. This paper demonstrates pyrolyzed polymer-gold 3D probes have high sensitivity and wider electrochemical potential window than typical electrochemical electrode materials such as gold to realize spatial chemical sensing.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83692065","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
A three-dimensional deformable liquid lens array for directional and wide angle laparoscopic imaging 一种用于定向广角腹腔镜成像的三维可变形液体透镜阵列
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474195
K. Wei, Yi Zhao
{"title":"A three-dimensional deformable liquid lens array for directional and wide angle laparoscopic imaging","authors":"K. Wei, Yi Zhao","doi":"10.1109/MEMSYS.2013.6474195","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474195","url":null,"abstract":"Most of currently employed laparoscopes use a single and non-tunable solid lens to visualize the surgical environment during minimal invasive interventions. These devices are limited due to the loss of depth perception, fixed view direction and narrow field-of-view (FOV). In this study, a three-dimensional deformable liquid lens array with adaptive focusing and directional view capability is developed. Miniature liquid lenses sealed by deformable membranes are arranged on a flexible substrate. During the operation, the flexible substrate where the liquid lenses reside is driven by hydraulic pressure and bulges into different curvatures, which results in the maximal angular difference of the optical axes of individual lenses in the array from 0° to 45°. The focal length of each lens can be simultaneously tuned from 64.3mm to 2.1mm. At the directional view of 45° and focal length of 2.1mm, the overall FOV exceeds 150°. This work promises the potential of directional and wide angle laparoscopic imaging where space constraint is a concern.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86655804","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 14
Centrifuge-based dynamic microarray system toward an array of a few amount of sample 以离心机为基础的动态微阵列系统，朝向阵列少量的样品
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474467
H. Hasegawa, T. Teshima, H. Onoe, S. Takeuchi
{"title":"Centrifuge-based dynamic microarray system toward an array of a few amount of sample","authors":"H. Hasegawa, T. Teshima, H. Onoe, S. Takeuchi","doi":"10.1109/MEMSYS.2013.6474467","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474467","url":null,"abstract":"In this study, we purpose a centrifuge-based dynamic microarray system (CDM) for trapping micro-sized samples sequentially from only 10 μl of the samples. Our system enables us to make an array of microbeads only with a spin-coater. The air can be introduced to the microchannel to isolate and encapsulate the trapped beads by the specific speed rotation because the microbeads were fixed at the outlet of the trapping spots by the centrifugal force. We optimized rotation speed for trapping with the high trapping yield and successfully controlled sample/solution/air introduction. This device can also release the trapped beads by flowing liquid backward, which allows us to retrieve the microbeads and reuse the device. The presented technology marks an essential step towards a high efficient portable CDM for point-of-care use.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88430965","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A highly-compliant asymmetric 2D guided-mode resonance sensor for simultaneous measurement of dual-axis strain 用于同时测量双轴应变的高柔性非对称二维导模谐振传感器
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474329
S. Foland, Jeong-Bong Lee
{"title":"A highly-compliant asymmetric 2D guided-mode resonance sensor for simultaneous measurement of dual-axis strain","authors":"S. Foland, Jeong-Bong Lee","doi":"10.1109/MEMSYS.2013.6474329","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474329","url":null,"abstract":"We report the design, fabrication, and characterization of a high-resolution biaxial strain sensor based on guided-mode resonance (GMR) in a two-dimensional, asymmetric titanium dioxide nanograting embedded at the surface of a polydimethylsiloxane slab. The highly-compliant strain sensing technique used in this 2D GMR sensor relies on the shifting of the reflected resonant wavelengths, demonstrating a sensitivity of 4.8 nm/percent strain (%ε), which can be detected accurately by a high resolution spectrometer, thus providing exceptionally accurate strain measurements. To the best of our knowledge, this is the first demonstration of a 2D deformable GMR device, and the first demonstration of a 2D photonic strain sensor of this kind.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77135567","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Electrostatic bottom-driven rotary stage on multiple conductive liquid-ring bearings 静电底部驱动的多级导电液环轴承旋转台
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474183
T. Liu, Guangyi Sun, Jong Jin Kim, C. Yang, C. Kim
{"title":"Electrostatic bottom-driven rotary stage on multiple conductive liquid-ring bearings","authors":"T. Liu, Guangyi Sun, Jong Jin Kim, C. Yang, C. Kim","doi":"10.1109/MEMSYS.2013.6474183","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474183","url":null,"abstract":"We present a 2 cm-diameter rotary stage electrostatically actuated by ~15 VDC. Multiple rings of an ionic liquid are used as both low-friction mechanical bearings and electric connections between the rotor and the substrate. The ring-bearing device is the first that was successfully rotated by electrostatic forces among the recent rotary devices involving a liquid bearing. Compared with the recent side-driven counterpart, the bottom-driven device of this report not only reduces the actuation voltage but also enables a reliable capacitive position sensing.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77535635","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
A combined comb / bulk mode gyroscope structure for enhanced sensitivity 一种提高灵敏度的梳状/块状组合陀螺仪结构
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474325
M. Elsayed, F. Nabki, M. El-Gamal
{"title":"A combined comb / bulk mode gyroscope structure for enhanced sensitivity","authors":"M. Elsayed, F. Nabki, M. El-Gamal","doi":"10.1109/MEMSYS.2013.6474325","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474325","url":null,"abstract":"This work introduces a novel dodecagon bulk mode gyroscope structure with parallel plate comb drives. A major contribution, compared to prior art, is that adding combs connected to the central disk structure, at the points of maximum vibration amplitudes, increases the drive strength and results in significant improvement in sensitivity. This can enable the fabrication of high performance bulk-mode gyroscopes in standard commercial MEMS technologies. Prototypes were measured to operate at frequencies of ~1.5 MHz, with quality factors of ~33,000, at a 10 mTorr vacuum level. Preliminary measurements using discrete electronics show a rate sensitivity of 0.31 μV/°/sec, corresponding to a capacitance sensitivity of 0.43 aF/°/sec/electrode.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86925333","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
Suspended CNT-FET piezoresistive strain gauges: Chirality assignment and quantitative analysis 悬挂式碳纳米管-场效应管压阻应变片:手性分配和定量分析
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI: 10.1109/MEMSYS.2013.6474287
M. Muoth, K. Chikkadi, Yu Liu, C. Hierold
{"title":"Suspended CNT-FET piezoresistive strain gauges: Chirality assignment and quantitative analysis","authors":"M. Muoth, K. Chikkadi, Yu Liu, C. Hierold","doi":"10.1109/MEMSYS.2013.6474287","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474287","url":null,"abstract":"Carbon nanotubes can withstand large elastic deformation and show pronounced piezoresistive effects which make them promising candidates for low-power strain sensors in the large strain regime. Integration of individual suspended nanotubes into complex microelectromechanical devices, including gate structures, is still a challenge. Here, ultraclean carbon nanotubes spanning across actuated MEMS electrodes are operated as suspended Carbon Nanotube Field-Effect Transistors (CNT-FETs) under repeated variable strain up to 4.5%, thus acting as small-sized piezoresistive strain gauges whose gauge factor is electrostatically tuned by the gate. We present the first quantified electromechanical analysis of suspended CNT-FETs to uniaxial strain applied by on-chip micro actuators.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90156041","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 25
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