Adaptable test-bed for characterization of micro-wineglass resonators

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI:10.1109/MEMSYS.2013.6474280

D. Senkal, M. Ahamed, A. Trusov, A. Shkel

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引用次数: 15

Abstract

We present an adaptable test-bed for characterization of 3-D micro-wineglass resonators. The test-bed provides two interchangeable modes of excitation: (1) Mechanical pinging using a piezo actuated probe assembly, (2) electrostatic excitation using assembled electrode structures with <; 20 μm capacitive gaps. Two modes of detection is also available: Optical pick-up using laser Doppler vibrometry and capacitive detection. 3-D micro-glassblown wineglass resonators were used to demonstrate the capabilities of the test-bed. Electrostatic excitation and capacitive detection was used to obtain the frequency response of a glass resonator showing a Q-factor of 40,000 at 14.8 kHz. Piezo-pinging was used to obtain the time domain response of a resonator, showing a 28 Hz frequency split (0.1% relative split) between the two degenerate wineglass modes (f1 = 22036 Hz, f2 = 22064 Hz).

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微型葡萄酒杯谐振器特性的适应性试验台

我们提出了一种用于表征三维微酒杯谐振器的适应性试验台。该试验台提供两种可互换的激励模式:(1)使用压电驱动探头组件的机械ping，(2)使用<;20 μm电容隙。两种检测模式也可用:使用激光多普勒振动仪的光学拾取和电容检测。利用三维微玻璃吹制葡萄酒杯谐振器验证了该试验台的性能。采用静电激励和电容检测得到了14.8 kHz时q因子为40000的玻璃谐振器的频率响应。利用压电ping得到谐振器的时域响应，在两个简并酒杯模式(f1 = 22036 Hz, f2 = 22064 Hz)之间出现了28hz的频率分裂(0.1%的相对分裂)。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)

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