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Surface potential distribution of resist exposed by electron beam and the non-charging exposure conditions. 电子束和非充电曝光条件下光刻胶的表面电位分布。
Microscopy (Oxford, England) Pub Date : 2025-01-30 DOI: 10.1093/jmicro/dfae044
Masatoshi Kotera, Yoshinobu Kono
{"title":"Surface potential distribution of resist exposed by electron beam and the non-charging exposure conditions.","authors":"Masatoshi Kotera, Yoshinobu Kono","doi":"10.1093/jmicro/dfae044","DOIUrl":"10.1093/jmicro/dfae044","url":null,"abstract":"<p><p>In this study, we experimentally analyzed the charging phenomenon when an insulating resist film on a conductive layer formed on bulk glass is irradiated by electron beams (EBs). To quantify the charging potential induced, an electrostatic force microscope device was installed in the scanning electron microscope sample chamber, and potential distributions formed under various exposure conditions were obtained. Based on the results obtained, a model for charge accumulation within the sample, explaining positive and negative charging and their transitions, was developed. At an EB acceleration voltage of 30 kV, the following observations were made: 'global charging' could be avoided by applying -5 V to the sample. Regarding 'local charging' near the exposure area of the EB, at low exposure doses, emission of secondary electrons from the sample surface induced positive charging, while the accumulation of incident electrons within the sample induced negative charging. At exposure doses where the effects of both are balanced, the sample exhibited zero potential, revealing the appearance of the 'first zero-cross exposure dose'. At higher exposure doses, the sample transitions from negative to positive as the exposure dose increases due to the electron-beam-induced conduction, resulting in the so-called second zero-cross exposure dose. The exposure dose dependence of the charging potential distribution at various acceleration voltages was obtained. In particular, we found that at an acceleration voltage of 0.6 kV, the sample surface is not charged even when exposed to small to very large doses of EBs.</p>","PeriodicalId":74193,"journal":{"name":"Microscopy (Oxford, England)","volume":" ","pages":"35-47"},"PeriodicalIF":0.0,"publicationDate":"2025-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142302783","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Precise positional alignment of atom-resolved HAADF images of heteroepitaxial interface with low signal-to-noise ratio. 低信噪比异质外延界面原子分辨 HAADF 图像的精确定位。
Microscopy (Oxford, England) Pub Date : 2025-01-30 DOI: 10.1093/jmicro/dfae038
Kohei Aso, Yoshifumi Oshima
{"title":"Precise positional alignment of atom-resolved HAADF images of heteroepitaxial interface with low signal-to-noise ratio.","authors":"Kohei Aso, Yoshifumi Oshima","doi":"10.1093/jmicro/dfae038","DOIUrl":"10.1093/jmicro/dfae038","url":null,"abstract":"<p><p>Heteroepitaxial interfaces are important because they determine the performance of devices such that career mobility is sensitive to the distribution of roughness, strain and composition at the interface. High-angle annular dark field imaging in scanning transmission electron microscopy has been utilized to capture them at an atomic scale. For precise identification of atomic column positions, a technique has been proposed to average multiple image frames taken at a high scanning rate by their positional alignment for increasing signal-to-noise ratio. However, the positional alignment between frames is sometimes incorrectly estimated because of the almost perfect periodic structure at the interfaces. Here, we developed an approach for precise positional alignment, where the images are first aligned by two consecutive images and then are aligned more precisely against the integrated image of the first alignment. We demonstrated our method by applying it to the heterointerface of Si0.8Ge0.2 (Si: silicon, Ge: germanium) epitaxial thin films on a Si substrate.</p>","PeriodicalId":74193,"journal":{"name":"Microscopy (Oxford, England)","volume":" ","pages":"57-62"},"PeriodicalIF":0.0,"publicationDate":"2025-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142134663","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Development of a localized surface plasmon-enhanced electron beam-pumped nanoscale light source for electron beam excitation-assisted optical microscopy. 开发用于电子束激发辅助光学显微镜的局部表面等离子体增强电子束泵浦纳米级光源。
Microscopy (Oxford, England) Pub Date : 2025-01-30 DOI: 10.1093/jmicro/dfae043
Atsushi Nakamura, Shunpei Shiba, Kei Hosomi, Atsushi Ono, Yoshimasa Kawata, Wataru Inami
{"title":"Development of a localized surface plasmon-enhanced electron beam-pumped nanoscale light source for electron beam excitation-assisted optical microscopy.","authors":"Atsushi Nakamura, Shunpei Shiba, Kei Hosomi, Atsushi Ono, Yoshimasa Kawata, Wataru Inami","doi":"10.1093/jmicro/dfae043","DOIUrl":"10.1093/jmicro/dfae043","url":null,"abstract":"<p><p>We have demonstrated localized surface plasmon (LSP)-enhanced cathodoluminescence (CL) from an atomic layer deposition-grown Al2O3/ZnO/Al2O3 heterostructure to develop a bright nanometer-scale light source for an electron beam excitation-assisted optical microscope. Three types of metals, Ag, Al and Au, were compared, and an 181-fold enhancement of CL emission was achieved with Ag nanoparticles, with the plasmon resonance wavelength close to the emission wavelength energy of ZnO. The enhanced emission is plausibly attributed to LSP/exciton coupling. However, it is also attributed to an increase in coupling efficiency with penetration depth and also to an increase in light extraction efficiency by grading the refractive indices at the heterostructure.</p>","PeriodicalId":74193,"journal":{"name":"Microscopy (Oxford, England)","volume":" ","pages":"71-77"},"PeriodicalIF":0.0,"publicationDate":"2025-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142302782","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Noise reduction of low-dose electron holograms using the wavelet hidden Markov model. 小波隐马尔可夫模型在低剂量电子全息图降噪中的应用。
Microscopy (Oxford, England) Pub Date : 2025-01-22 DOI: 10.1093/jmicro/dfaf007
Yuto Tomita, Yoshihiro Midoh, Takehiro Tamaoka, Yasukazu Murakami
{"title":"Noise reduction of low-dose electron holograms using the wavelet hidden Markov model.","authors":"Yuto Tomita, Yoshihiro Midoh, Takehiro Tamaoka, Yasukazu Murakami","doi":"10.1093/jmicro/dfaf007","DOIUrl":"https://doi.org/10.1093/jmicro/dfaf007","url":null,"abstract":"<p><p>The precision in electron holography studies on electrostatic and magnetic fields depends on the image quality of an electron hologram. Enhancing the image quality of electron holograms is essential for the comprehensive analysis of weak electromagnetic fields; however, extended electron beam irradiation can lead to undesirable radiation damage and contamination. Recent studies have demonstrated that noise reduction using the wavelet hidden Markov model (WHMM) can improve the precision of phase analysis for limited thin-foiled crystals. In this study, we examine the effects of WHMM-based denoising on the electron holography data of weakly charged nanoparticles collected under low-electron-dose conditions. The results indicate that effective noise reduction with the WHMM allows for a reduction in the magnitude of the electron dose by approximately half relative to data collection without WHMM denoising, while maintaining the same level of the charge determination precision: less than one elementary charge. Notably, at a low electron dose of 0.40 e-/pixel, WHMM denoising enables the clear visualization of a weak stray electric field outside a charged latex sphere. This method offers significant advantages for electron holography studies of electron-beam-sensitive materials requiring minimal time for electron exposure.</p>","PeriodicalId":74193,"journal":{"name":"Microscopy (Oxford, England)","volume":" ","pages":""},"PeriodicalIF":0.0,"publicationDate":"2025-01-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143026142","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Momentum-resolved EELS and CL study on 1D-plasmonic crystal prepared by FIB method. 用 FIB 方法制备的一维等离子晶体的动量分辨 EELS 和 CL 研究。
Microscopy (Oxford, England) Pub Date : 2024-12-05 DOI: 10.1093/jmicro/dfae022
Akira Yasuhara, Masateru Shibata, Wakaba Yamamoto, Izzah Machfuudzoh, Sotatsu Yanagimoto, Takumi Sannomiya
{"title":"Momentum-resolved EELS and CL study on 1D-plasmonic crystal prepared by FIB method.","authors":"Akira Yasuhara, Masateru Shibata, Wakaba Yamamoto, Izzah Machfuudzoh, Sotatsu Yanagimoto, Takumi Sannomiya","doi":"10.1093/jmicro/dfae022","DOIUrl":"10.1093/jmicro/dfae022","url":null,"abstract":"<p><p>We investigate a one-dimensional plasmonic crystal using momentum-resolved electron energy-loss spectroscopy (EELS) and cathodoluminescence (CL) techniques, which are complementary in terms of available optical information. The plasmonic crystal sample is fabricated from large aluminum grains through the focused ion beam method. This approach allows curving nanostructures with high crystallinity, providing platforms for detailed analysis of plasmonic nanostructures using both EELS and CL. The momentum-resolved EELS visualizes dispersion curves outside the light cone, confirming the existence of the surface plasmon polaritons and local modes, while the momentum-resolved CL mapping analysis identified these surface plasmon polaritons and local modes. Such synergetic approach of two electron-beam techniques offers full insights into both radiative and non-radiative optical properties in plasmonic or photonic structures.</p>","PeriodicalId":74193,"journal":{"name":"Microscopy (Oxford, England)","volume":" ","pages":"473-480"},"PeriodicalIF":0.0,"publicationDate":"2024-12-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11630248/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140869168","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Role of lipids in the organization of tight junction. 脂质在紧密连接组织中的作用。
Microscopy (Oxford, England) Pub Date : 2024-12-05 DOI: 10.1093/jmicro/dfae039
Junichi Ikenouchi, Kenta Shigetomi
{"title":"Role of lipids in the organization of tight junction.","authors":"Junichi Ikenouchi, Kenta Shigetomi","doi":"10.1093/jmicro/dfae039","DOIUrl":"10.1093/jmicro/dfae039","url":null,"abstract":"<p><p>Cell membrane structures are supramolecular complexes that require the ordered assembly of membrane proteins and lipids. The morphology of various cell adhesion structures in multicellular organisms, such as those between epithelial cells, neural synapses and immune synapses, was initially described through electron microscopic analyses. Subsequent studies aimed to catalog their constituent proteins, which encompass transmembrane cell adhesion molecules, cytoskeletal proteins and scaffolding proteins that bind the two components. However, the diversity of plasma membrane lipids and their significance in the organization of cell adhesion structures were underappreciated until recently. It is now understood that phase separation of lipids and liquid-liquid phase separation of proteins are important driving forces for such self-assembly. In this review, we summarized recent findings on the role of lipids as scaffolds for supramolecular complexes using tight junctions in epithelial cells as an example.</p>","PeriodicalId":74193,"journal":{"name":"Microscopy (Oxford, England)","volume":" ","pages":"457-462"},"PeriodicalIF":0.0,"publicationDate":"2024-12-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142057513","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Visualization of Bacillus subtilis spore structure and germination using quick-freeze deep-etch electron microscopy. 利用速冻深描电子显微镜观察枯草芽孢杆菌孢子的结构和萌发。
Microscopy (Oxford, England) Pub Date : 2024-12-05 DOI: 10.1093/jmicro/dfae023
Kiran Jalil, Yuhei O Tahara, Makoto Miyata
{"title":"Visualization of Bacillus subtilis spore structure and germination using quick-freeze deep-etch electron microscopy.","authors":"Kiran Jalil, Yuhei O Tahara, Makoto Miyata","doi":"10.1093/jmicro/dfae023","DOIUrl":"10.1093/jmicro/dfae023","url":null,"abstract":"<p><p>Bacterial spores, known for their complex and resilient structures, have been the focus of visualization using various methodologies. In this study, we applied quick-freeze and replica electron microscopy techniques, allowing observation of Bacillus subtilis spores in high-contrast and three-dimensional detail. This method facilitated visualization of the spore structure with enhanced resolution and provided new insights into the spores and their germination processes. We identified and described five distinct structures: (i) hair-like structures on the spore surface, (ii) spike formation on the surface of lysozyme-treated spores, (iii) the fractured appearance of the spore cortex during germination, (iv) potential connections between small vesicles and the core membrane and (v) the evolving surface structure of nascent vegetative cells during germination.</p>","PeriodicalId":74193,"journal":{"name":"Microscopy (Oxford, England)","volume":" ","pages":"463-472"},"PeriodicalIF":0.0,"publicationDate":"2024-12-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11630275/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141180766","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Correction to: Observation and quantitative analysis of dislocations in steel using electron channeling contrast imaging method with precise control of electron beam incident direction. 更正为利用精确控制电子束入射方向的电子通道对比成像方法观测和定量分析钢中的位错。
Microscopy (Oxford, England) Pub Date : 2024-12-05 DOI: 10.1093/jmicro/dfae037
{"title":"Correction to: Observation and quantitative analysis of dislocations in steel using electron channeling contrast imaging method with precise control of electron beam incident direction.","authors":"","doi":"10.1093/jmicro/dfae037","DOIUrl":"10.1093/jmicro/dfae037","url":null,"abstract":"","PeriodicalId":74193,"journal":{"name":"Microscopy (Oxford, England)","volume":" ","pages":"523"},"PeriodicalIF":0.0,"publicationDate":"2024-12-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11630296/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142047619","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Bayesian inference of atomic column positions in scanning transmission electron microscopy images. 扫描透射电子显微镜图像中原子柱位置的贝叶斯推断。
Microscopy (Oxford, England) Pub Date : 2024-12-05 DOI: 10.1093/jmicro/dfae025
Yuki Nomura, Satoshi Anada, Shunsuke Kobayashi
{"title":"Bayesian inference of atomic column positions in scanning transmission electron microscopy images.","authors":"Yuki Nomura, Satoshi Anada, Shunsuke Kobayashi","doi":"10.1093/jmicro/dfae025","DOIUrl":"10.1093/jmicro/dfae025","url":null,"abstract":"<p><p>Atomic-resolution scanning transmission electron microscopy combined with two-dimensional Gaussian fitting enables the accurate and precise identification of atomic column positions within a few picometers. The measurement performance significantly depends on the signal-to-noise ratio of the atomic columns. In areas with low signal-to-noise ratios, such as near surfaces, the measurement performance was lower than that of the bulk. However, previous studies evaluated the accuracy and precision only in bulk areas, underscoring the need for a method that quantitatively evaluates the accuracy and precision of each atomic column position with various signal-to-noise ratios. This study introduced Bayesian inference to assess the accuracy and precision of determining individual atomic column positions under various signals. We applied this method to simulated and experimental images and demonstrated its effectiveness in identifying statistically significant displacements, particularly near surfaces with signal degradation. The use of vector maps and kernel density estimate plots obtained from Bayesian inference provided a probabilistic understanding of the atom displacement. Therefore, this study highlighted the potential benefits of Bayesian inference in high-resolution imaging to reveal material properties.</p>","PeriodicalId":74193,"journal":{"name":"Microscopy (Oxford, England)","volume":" ","pages":"481-487"},"PeriodicalIF":0.0,"publicationDate":"2024-12-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140900800","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Development of silicon-on-insulator direct electron detector with analog memories in pixels for sub-microsecond imaging. 开发用于亚微秒成像的带像素模拟存储器的硅绝缘体直接电子探测器。
Microscopy (Oxford, England) Pub Date : 2024-12-05 DOI: 10.1093/jmicro/dfae029
Takafumi Ishida, Kosei Sugie, Toshinobu Miyoshi, Yuichi Ishida, Koh Saitoh, Yasuo Arai, Makoto Kuwahara
{"title":"Development of silicon-on-insulator direct electron detector with analog memories in pixels for sub-microsecond imaging.","authors":"Takafumi Ishida, Kosei Sugie, Toshinobu Miyoshi, Yuichi Ishida, Koh Saitoh, Yasuo Arai, Makoto Kuwahara","doi":"10.1093/jmicro/dfae029","DOIUrl":"10.1093/jmicro/dfae029","url":null,"abstract":"<p><p>We have developed a high-speed recordable direct electron detector based on silicon-on-insulator technology. The detector has 16 analog memories in each pixel to record 16 images with sub-microsecond temporal resolution. A dedicated data acquisition system has also been developed to display and record the results on a personal computer. The performance of the direct electron detector as an image sensor is evaluated under electron irradiation with an energy of 30 keV in a low-voltage transmission electron microscope equipped with a photocathode electron gun. We demonstrate that the detector can record images at an exposure time of 100 ns and an interval of 900 ns.</p>","PeriodicalId":74193,"journal":{"name":"Microscopy (Oxford, England)","volume":" ","pages":"511-516"},"PeriodicalIF":0.0,"publicationDate":"2024-12-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11630314/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141187161","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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