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2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)最新文献

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Immobilized electrolyte biodegradable batteries for implantable MEMS 可植入MEMS的固定化电解质可生物降解电池
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7180968
D. She, M. Tsang, J. K. Kim, M. Allen
{"title":"Immobilized electrolyte biodegradable batteries for implantable MEMS","authors":"D. She, M. Tsang, J. K. Kim, M. Allen","doi":"10.1109/TRANSDUCERS.2015.7180968","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7180968","url":null,"abstract":"Liquid electrolyte volume is a key driver in the lifetime and overall size of microfabricated biodegradable batteries. Harnessing liquid from the body to serve as the battery electrolyte may, therefore, be desirable; however, for stable operation, maintaining a constant environment inside the electrochemical cell is required even in the presence of changing body conditions. We report a biodegradable battery featuring a solid electrolyte of sodium chloride (NaCl) and polycaprolactone (PCL). This approach harnesses the body fluid that diffuses into the cell as an element of the electrolyte; however, the large excess of ionic material suspended in the PCL holds intracellular conditions constant. A constant discharge profile can then be achieved even in the presence of varying external aqueous conditions, enabling compact, stably-performing cells.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88141688","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Low velocity digital air flow sensor from 3D printed PEDOT:PSS micro-hair structures 低速数字气流传感器从3D打印PEDOT:PSS微头发结构
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7181118
H. Devaraj, K. Aw, J. Travas-sejdic, R. N. Sharma
{"title":"Low velocity digital air flow sensor from 3D printed PEDOT:PSS micro-hair structures","authors":"H. Devaraj, K. Aw, J. Travas-sejdic, R. N. Sharma","doi":"10.1109/TRANSDUCERS.2015.7181118","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181118","url":null,"abstract":"This paper reports a novel method for digital sensing of low-velocity air flow using high aspect-ratio 3D printed conducting polymer (PEDOT:PSS) micro-hair structures (1000 μm long, 5.5±0.5 μm diameter). By implementing multiple micro-hair structures as micro-switches that respond to air flows of particular velocities, a low-velocity digital flow sensor capable of detecting air flow in the range of 61 mm/s to 99 mm/s is demonstrated.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86796027","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
Low stress flip-chip package for pressure sensors operating at 500 °C 低应力倒装芯片封装的压力传感器工作在500°C
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7181162
R. Zeiser, S. Ayub, P. Wagner, J. Muller, S. Henneck, J. Wilde
{"title":"Low stress flip-chip package for pressure sensors operating at 500 °C","authors":"R. Zeiser, S. Ayub, P. Wagner, J. Muller, S. Henneck, J. Wilde","doi":"10.1109/TRANSDUCERS.2015.7181162","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181162","url":null,"abstract":"This work presents a method for a reliable assembly and interconnection of MEMS for very high temperatures. A flip-chip concept for resistive micromechanical pressure sensors with a platinum thin film was developed and sensor-assemblies were fabricated. The investigated metallized ceramic substrates were AlN, Si3N4, a Low-Temperature-Cofired-Ceramic (LTCC) and a zirconia-silicate (ZrSiO4). A borosilicate glass-solder was the die-attachment material and gold stud-bumps were the interconnection. The thermal-mechanical stresses in the sensors, induced by the packaging process due to material-dependent mismatches were analyzed with FEM and optical deformation measurements from 20 to 500 °C. The comparison of the obtained experimental and FE-results revealed a strong influence of the applied substrate on the thermal-mechanical stresses in the chip-membrane which is affecting the output-signal and reliability. Both methods were in good accordance. The two specific silicon-matched ceramic substrates LTCC and ZrSiO4 reduced the stresses in the sensor-element significantly. Furthermore, the electrical characterization of assembled test-sensors revealed a correlation between the package-induced stresses in the chip-membrane and the shift of the sensor-signal after the assembly-process.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86986861","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Shape Anisotropic Magnetic Particles for high throughput and high efficiecy intracelluar delivery of functional macromolecules 形状各向异性磁性颗粒，用于高通量和高效率的功能大分子细胞内递送
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7181064
M. Lin, Y. C. Wu, J. Lee, J. Zhou, M. Teitell, P. Chiou
{"title":"Shape Anisotropic Magnetic Particles for high throughput and high efficiecy intracelluar delivery of functional macromolecules","authors":"M. Lin, Y. C. Wu, J. Lee, J. Zhou, M. Teitell, P. Chiou","doi":"10.1109/TRANSDUCERS.2015.7181064","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181064","url":null,"abstract":"We report a novel intracellular delivery system based on aligning Shape-Anisotropic Magnetic Particles (SAMP) to deliver functional molecules into mammalian cells with high efficiency and high viability. A broad range of molecules (calcein, dextran 3K, dextran 40K, GFP plasmid, SiRNA, and β-lactamase) have been successfully delivered into primary cells with preserved functions. We have achieved high efficiency delivery of enzyme into primary human dermal fibroblast (NHDF), and other large macromolecules (dextran 40K) into mouse cortical neurons.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86589231","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Optically-induced cell fusion on microfluidic chip utilizing locally enhanced electric field 利用局部增强电场的微流控芯片光诱导细胞融合
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7180913
P. Yang, C. Wang, G. Lee
{"title":"Optically-induced cell fusion on microfluidic chip utilizing locally enhanced electric field","authors":"P. Yang, C. Wang, G. Lee","doi":"10.1109/TRANSDUCERS.2015.7180913","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7180913","url":null,"abstract":"This work reports a new approach called optically-induced cell fusion (OICF) which integrates cell-pairing microstructures and an optically-induced system to achieve cell fusion with high yields and efficiency. It is the first time in literature that cell-pairing SU8 microstructures were combined with optically-induced “virtual” electrodes to form the OICF system such that precise cell-pairing and high-yield cell fusion could be achieved. Experimental results showed that HeLa cells and MCF-7 cells could be successfully fused using this new approach. Furthermore, the new method allows one to selectively fuse cells by using addressable light patterns. It is therefore promising for further biomedical applications.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91009682","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
III–V nitride microcantilever as a displacement sensor III-V型氮化物微悬臂位移传感器
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7180891
A. Talukdar, G. Koley
{"title":"III–V nitride microcantilever as a displacement sensor","authors":"A. Talukdar, G. Koley","doi":"10.1109/TRANSDUCERS.2015.7180891","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7180891","url":null,"abstract":"The application of gated piezoresitor (or `piezotransistor') embedded GaN microcantilever utilizing unique properties of AlGaN/GaN Heterojunction Field Effect Transistor (HFET) to very significantly enhance the device performance in order to transduce femtoscale displacement have been demonstrated. This novel technology offers several orders higher sensitivity than state-of-the-art and enabled detection of minute explosive in open ambient by photoacoustic spectroscopy.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90815992","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
High-resolution neural depth probe with integrated 460 NM light emitting diode for optogenetic applications 集成460纳米发光二极管的高分辨率神经深度探针，用于光遗传学应用
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7181290
M. Schwaerzle, F. Pothof, Oliver Paul, P. Ruther
{"title":"High-resolution neural depth probe with integrated 460 NM light emitting diode for optogenetic applications","authors":"M. Schwaerzle, F. Pothof, Oliver Paul, P. Ruther","doi":"10.1109/TRANSDUCERS.2015.7181290","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181290","url":null,"abstract":"We report on the design, assembly, and optical as well as thermal characterization of a polymer-based optrode with an integrated light source for applications in optogenetics. The novel probe allows to optically stimulate neural brain tissue in deeper brain regions and to simultaneously record brain activity using integrated macroelectrodes and microelectrodes. The optrode is based on a cylindrical polyimide (PI) probe carrying the electrodes and their respective wiring. A bare light emitting diode (LED) chip is integrated within this cylinder and electrically interconnected through a separate PI-based ribbon cable.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89545136","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 16
Ultra-thin, evaporation-resistent PDMS devices for absolute quantification of DNA using digital PCR 超薄，抗蒸发PDMS设备的绝对定量DNA使用数字PCR
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7180979
H. Zec, C. O’Keefe, Polly C. Ma, Tza-Huei Wang
{"title":"Ultra-thin, evaporation-resistent PDMS devices for absolute quantification of DNA using digital PCR","authors":"H. Zec, C. O’Keefe, Polly C. Ma, Tza-Huei Wang","doi":"10.1109/TRANSDUCERS.2015.7180979","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7180979","url":null,"abstract":"We present an array-based nanoliter digital PCR (dPCR) platform. The ultra-thin microfluidic device can accommodate high temperatures for extended periods, while minimizing evaporation. The device utilizes a very simple fabrication scheme, and can achieve a limit of detection of 100 attomolar of synthetic target. dPCR presents a feasible way to quantify rare targets, especially in high background. We demonstrate proof-of-concept use of this device to identify methylation of synthetic DNA in high background, a potential biomarker for many diseases. We believe that this simple and cost-effective device will encourage wider adoption of dPCR.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76608516","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Characteristic parameter estimation for single-particle based on dielectrophoretic and hydrodynamic effects 基于介电泳和流体动力学效应的单粒子特征参数估计
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7181314
J. Xu, R. Zhu, X. Guo
{"title":"Characteristic parameter estimation for single-particle based on dielectrophoretic and hydrodynamic effects","authors":"J. Xu, R. Zhu, X. Guo","doi":"10.1109/TRANSDUCERS.2015.7181314","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181314","url":null,"abstract":"Dielectrophoresis (DEP) as a well-known approach to manipulate particles can be utilized in combination with fluidics to implement a measurement on characteristic parameters of particles. Numerical simulation of DEP factors was executed together with simulation of electric field distribution by means of Comsol Multiphysics. The simulation results facilitate the establishment of dynamic equilibrium model between a DEP force and a fluid drag force. According to critical release flow-rate and signal frequency of DEP, those parameters of a particle, such as permittivity, conductivity and radius, were estimated via Levenberg Maquardt iteration algorithm. The experiments validated the method and demonstrated a sensitive and consistent measure for single-particle assay.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75034254","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Fiber-Optic Localized Surface Plasmon Resonance sensor combined with micro fluidic channel 结合微流体通道的光纤局部表面等离子体共振传感器
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7180912
Joong-Hyun Kim, Sung-Taeg Kang, Seung-Gon Lee, Hakmin Lee, D. Jeong, Jaehyoung Park, Seung-Ki Lee
{"title":"Fiber-Optic Localized Surface Plasmon Resonance sensor combined with micro fluidic channel","authors":"Joong-Hyun Kim, Sung-Taeg Kang, Seung-Gon Lee, Hakmin Lee, D. Jeong, Jaehyoung Park, Seung-Ki Lee","doi":"10.1109/TRANSDUCERS.2015.7180912","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7180912","url":null,"abstract":"This paper proposes Fiber-Optic Localized Surface Plasmon Resonance (FO LSPR) sensor combined with micro fluidic channel, which enables the continuous supply of fluid for bio-reaction. The proposed method can prevent the degradation of the sensing characteristics due to the change of measurement condition. The feasibility of the FO LSPR sensor with micro fluidic channel is proved by Computational Fluid Dynamics simulation (CFD). Also, the proposed method has been evidenced by measuring the output intensity of the FO LSPR sensor at various refractive index solutions. Finally, Prostate Specific Antigen (PSA) immunoassay was measured to verify the possibility of the fabricated sensor system as a biosensor.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75080917","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 49
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