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2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)最新文献

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Selective assembly of DNA nanostructure bridging onto a trenched silicon substrate DNA纳米结构桥接在沟槽硅衬底上的选择性组装
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7181192
Y. Mori, Z. Ma, S. Park, Y. Hirai, T. Tsuchiya, O. Tabata
{"title":"Selective assembly of DNA nanostructure bridging onto a trenched silicon substrate","authors":"Y. Mori, Z. Ma, S. Park, Y. Hirai, T. Tsuchiya, O. Tabata","doi":"10.1109/TRANSDUCERS.2015.7181192","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181192","url":null,"abstract":"We demonstrated for the first time the versatility of the previously proposed concept of DNA nanostructure integration on MEMS [1] by selectively assembling DNA nanostructures to form a bridge over a trenched silicon. A DNA origami (30 × 150 nm) was fixed to bridge a trenches (100 nm width, 200 nm depth) utilizing the hybridization between ssDNA on the DNA origami and selectively immobilized complementary ssDNA-pattern at the edges of the etched trench. An octadecylsilane self-assembled monolayer (ODS SAM) was utilized as a masking layer for a scanning probe lithography (SPL) with better process stability than a trimethylsilyl (TMS) SAM. This result opens a way to integrate the nanomaterial components on a structured device such as MEMS by using DNA origami.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90374598","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Ring-shape SMA micro actuator with parylene retention spring for low power consumption, large displacement linear actuation 环形SMA微动器，采用聚对二甲苯保持弹簧，低功耗，大位移线性驱动
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7181384
T. D. O. Moura, T. Tsukamoto, D. W. de Lima Monteiro, S. Tanaka
{"title":"Ring-shape SMA micro actuator with parylene retention spring for low power consumption, large displacement linear actuation","authors":"T. D. O. Moura, T. Tsukamoto, D. W. de Lima Monteiro, S. Tanaka","doi":"10.1109/TRANSDUCERS.2015.7181384","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181384","url":null,"abstract":"This paper reports a novel ring-shape micro actuator for a latching mechanism used in a low power consumption and large displacement micro linear actuation. The proposed actuator consists of a shape memory alloy (SMA) ring, parylene spring and shoes. The parylene spring was carefully designed for independent control of radial and axial stiffness, which can be realized by a high aspect ratio cross section and a meander structure. The maximum force generated by the parylene spring was about 40 mN. Two types of SMA actuator was examined for the actuation: simple wire and micro spring types. The maximum displacement as high as 300 μm was obtained by using the SMA micro spring.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91419865","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
A new three axis low power MEMS gyroscope for consumer and industrial applications 用于消费和工业应用的新型三轴低功耗MEMS陀螺仪
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7180853
A. Oliver, Y. L. Teo, A. Geisberger, R. Steimle, T. Cassagnes, K. Adhikari, D. Sadler, A. McNeil
{"title":"A new three axis low power MEMS gyroscope for consumer and industrial applications","authors":"A. Oliver, Y. L. Teo, A. Geisberger, R. Steimle, T. Cassagnes, K. Adhikari, D. Sadler, A. McNeil","doi":"10.1109/TRANSDUCERS.2015.7180853","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7180853","url":null,"abstract":"The manuscript reports a new commercially available three axis gyroscope, the Freescale® FXAS21002C. The 6.8 mW power consumption is 20% less than the nearest competitor's three axis device while meeting standard consumer device parameters. The three axis gyroscope has two proof masses and an open loop control scheme. The open loop architecture and the discontinuous control scheme contribute to this differentiated power consumption.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83686150","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Highly reconfigurable Aluminum Nitride MEMS resonator using 12 monolithically integrated phase change material switches 采用12个单片集成相变材料开关的高度可重构的氮化铝MEMS谐振器
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7180926
G. Hummel, Y. Hui, M. Rinaldi
{"title":"Highly reconfigurable Aluminum Nitride MEMS resonator using 12 monolithically integrated phase change material switches","authors":"G. Hummel, Y. Hui, M. Rinaldi","doi":"10.1109/TRANSDUCERS.2015.7180926","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7180926","url":null,"abstract":"This paper presents the first demonstration of a frequency reconfigurable and programmable Aluminum Nitride (AlN) piezoelectric MEMS resonator using phase change material (PCM) based switchable electrodes. For the first time, 12 miniaturized (2 μm×2 μm) PCM switches are monolithically integrated with an AlN MEMS resonator and used to reconfigure the terminal connections of the individual metal fingers composing the device interdigital transducer (IDT). This innovative design solution provides high ON/OFF ratio switching of the acoustic resonance (~28X impedance variation at resonance), and reconfiguration of the device electromechanical coupling (kt2: 0-1.32%), capacitance (C: 125-1,134 fF), and operating frequency (f1~181.3 MHz, f2~385.4 MHz).","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79079328","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
A stainless-steel-based capacitive pressure sensor chip and its microwelding integration 一种不锈钢电容式压力传感器芯片及其微焊接集成技术
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7181114
Xing Chen, Daniel S. Brox, B. Assadsangabi, M. S. Mohamed Ali, K. Takahata
{"title":"A stainless-steel-based capacitive pressure sensor chip and its microwelding integration","authors":"Xing Chen, Daniel S. Brox, B. Assadsangabi, M. S. Mohamed Ali, K. Takahata","doi":"10.1109/TRANSDUCERS.2015.7181114","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181114","url":null,"abstract":"A stainless-steel (SS) chip of capacitive pressure sensor and its new integration method are developed. The sensors are microfabricated through thermal bonding of the chip dies made of medical-grade SS to the Au-polyimide diaphragm film. The capacitive cavity design with dead-end holes is verified to increase the pressure sensitivity. Laser microwelding is applied to permanently bond the sensor chips onto SS substrates. The microwelding is revealed to provide twice the mechanical strength and ~6× electrical conductance in its bond compared with a conductive epoxy case. The microwelded sensor exhibits an average sensitivity of 120 ppm/mmHg close to its pre-welding level. The welding integration with a SS antenna stent is demonstrated. The results suggest that laser microwelding is a promising packaging technique for SS-based biomedical and implant microdevices that require long-term bond reliability.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83422470","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Non-enzymatic specific detection of carbamate pesticides based on monodisperse gold-rhodium alloy nanocrystals 基于单分散金铑合金纳米晶的氨基甲酸酯类农药非酶特异性检测
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7181221
Z. Chen, Y. Zhang, J. Q. Xu, P. Xu, X. Li
{"title":"Non-enzymatic specific detection of carbamate pesticides based on monodisperse gold-rhodium alloy nanocrystals","authors":"Z. Chen, Y. Zhang, J. Q. Xu, P. Xu, X. Li","doi":"10.1109/TRANSDUCERS.2015.7181221","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181221","url":null,"abstract":"For the first time, monodisperse AuRh bimetallic nanocrystals are employed for the non-enzymatic specific detection of carbamate pesticides. Compared with other Au based bimetallic nanocrystals and monometallic analogues, AuRh nanocrystals show their advances in specific electrocatalytic reaction toward carbamate pesticides at nano-molar (nM) level without the assistance of acetylcholinesterase (AchE) or other biochemical recognition elements. According to the electrochemical assessments, we discover that AuRh nanocrystals have considerable response toward 1 nM carbaryl, while there is no response to organophosphorus pesticides over AuRh nanocrystals. The ultra-sensitive and highly selective detection of carbamate pesticides could be attributed to the great catalytic activity of AuRh nanocrystals toward -NH2 group in carbamate pesticides.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88792895","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Characterization of electrothermal actuation with nanometer and microradian precision 纳米和微弧度精度电热致动的表征
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7181042
Craig R. Copeland, C. McGray, J. Geist, V. Aksyuk, S. M. Stavis
{"title":"Characterization of electrothermal actuation with nanometer and microradian precision","authors":"Craig R. Copeland, C. McGray, J. Geist, V. Aksyuk, S. M. Stavis","doi":"10.1109/TRANSDUCERS.2015.7181042","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181042","url":null,"abstract":"The single motion cycles of an electrothermal actuator were measured with nanometer and microradian precision, using a recently introduced particle tracking method. The actuator linked two rigid bodies that translated and rotated. Stochastic input noise decoupled and coupled the two bodies within the play of the linkage, resulting in a nondeterministic output. The linkage was characterized using a simple model of the actuation mechanism, establishing a new approach to characterizing microelectromechanical systems (MEMS).","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89354594","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Artificial compound eye inspired by imaging principle of Xenos peckii 受大腹蛇成像原理启发的人工复眼
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7180946
D. Keum, D. S. Jeon, M. H. Kim, K. Jeong
{"title":"Artificial compound eye inspired by imaging principle of Xenos peckii","authors":"D. Keum, D. S. Jeon, M. H. Kim, K. Jeong","doi":"10.1109/TRANSDUCERS.2015.7180946","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7180946","url":null,"abstract":"This work reports an artificial compound eye inspired by the imaging principle of Xenos peckii, which is an endoparasite of paper wasps. The unique eye design exhibits higher spatial resolution and better sensitivity than conventional compound eyes. The biomimetic compound eye comprises three layers, a microprism arrays, a microlens arrays and an aperture arrays. All of the layers were formed on a planar substrate, the device can be directly integrated with a commercial image sensor. Each channel detects a different part of the whole scene, and the partial images are stitched in the following image processing step. The proposed artificial compound eye can create great opportunities for applications in medical, industrial and military fields.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87255279","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Large-amplitude resonant varifocal mirror with an acoustic cavity 带声腔的大振幅共振变焦镜
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7181364
T. Sasaki, L. Rayas, K. Nakazawa, K. Hane
{"title":"Large-amplitude resonant varifocal mirror with an acoustic cavity","authors":"T. Sasaki, L. Rayas, K. Nakazawa, K. Hane","doi":"10.1109/TRANSDUCERS.2015.7181364","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181364","url":null,"abstract":"We report a large-amplitude resonant varifocal mirror with an acoustic cavity under atmospheric pressure. The amplitude of resonant varifocal mirror with acoustic cavity was measured by changing the cavity length. The amplitude of varifocal mirror was changed periodically depending on the cavity length. The period is in excellent agreement with the half of calculated wavelength of the acoustic wave. The maximum amplitude was about 4 times larger than the minimum amplitude. For designing of the acoustic cavity length, a theoretical approach on the basis of interaction between mechanical vibration and acoustic wave in the cavity is also described and compared to experimental results.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87260328","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
High sensitive detections of Norovirus DNA and IgG by using multi-SiNW-FET biosensors 多sinw - fet生物传感器对诺如病毒DNA和IgG的高灵敏度检测
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7181230
X. Gong, R. Zhao, Xiaomei Yu
{"title":"High sensitive detections of Norovirus DNA and IgG by using multi-SiNW-FET biosensors","authors":"X. Gong, R. Zhao, Xiaomei Yu","doi":"10.1109/TRANSDUCERS.2015.7181230","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181230","url":null,"abstract":"This paper reports ultrasensitive detections of DNA and protein by multi-silicon-nanowire field-effect-transistor (SiNW-FET) biosensors. Single-SiNW-FET, double-SiNW-FET and quad-SiNW-FET have been designed on a single chip and fabricated by a simple top-down fabrication process. Compared with single-SiNW-FET, the multi-SiNW-FET biosensor shows a higher ability of decreasing the noise by averaging the source-drain currents. Both Norovirus DNA and IgG have been detected with the sensors at concentrations as low as 1 fM and 10 fM respectively. The sensor also shown high specificity in 1bp mismatch DNA disturbance.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87241681","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
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