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2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)最新文献

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Self-excited relaxation oscillation in optomechanical ring resonator for sensing applications 用于传感的光机械环形谐振器的自激松弛振荡
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7181343
J. G. Huang, B. Dong, M. Tang, Y. D. Gu, J. H. Wu, T. N. Chen, Z. Yang, Y. Jin, Y. Hao, D. Kwong, A. Liu
{"title":"Self-excited relaxation oscillation in optomechanical ring resonator for sensing applications","authors":"J. G. Huang, B. Dong, M. Tang, Y. D. Gu, J. H. Wu, T. N. Chen, Z. Yang, Y. Jin, Y. Hao, D. Kwong, A. Liu","doi":"10.1109/TRANSDUCERS.2015.7181343","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181343","url":null,"abstract":"This paper demonstrates the optically induced self-excited relaxation oscillation in a silicon ring resonator for the first time. The observed thermo-optomechanical oscillation has a unique waveform with fast oscillation period close to 16 ns and slow oscillation period approximately 167 ns. The ultra-fast oscillation period can be well used in optical switch and optical memory elements. Particularly, the oscillation frequency is very sensitive to the wavelength detuning, making it quite suitable for the sensing applications.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87585166","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Hierarchical platinum nanostructure for the non-enzymatic detection of glucose by amperometry and impedance analysis 层次铂纳米结构用于无酶检测葡萄糖的安培法和阻抗分析
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7181242
T. Unmussig, P. Daubinger, J. Kieninger, G. Urban
{"title":"Hierarchical platinum nanostructure for the non-enzymatic detection of glucose by amperometry and impedance analysis","authors":"T. Unmussig, P. Daubinger, J. Kieninger, G. Urban","doi":"10.1109/TRANSDUCERS.2015.7181242","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181242","url":null,"abstract":"High sensitivity, selectivity and stability of a nonenzymatic glucose sensor were achieved by the combination of hierarchical platinum nanostructures with a sophisticated measurement scheme. The amperometric sensitivity of up to 1 mA·cm-2·mM-1 is the highest reported sensitivity for a non-enzymatic glucose sensor in neutral pH media. The selectivity towards glucose can be enhanced beyond the contribution of the nanostructure itself by the unique combination of the hierarchical nanostructure and low frequency impedance analysis. Additionally the long-time stability of the sensor was improved by using a chronoamperometric protocol to reactivate the electrode surface continuously.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86157484","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Biomimetic locomotion for a robotic stingray using MEMS sensors 基于MEMS传感器的黄貂鱼机器人仿生运动
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7181052
M. Asadnia, A. Kottapalli, A. Cloitre, R. Haghighi, M. Triantafyllou, J. Miao
{"title":"Biomimetic locomotion for a robotic stingray using MEMS sensors","authors":"M. Asadnia, A. Kottapalli, A. Cloitre, R. Haghighi, M. Triantafyllou, J. Miao","doi":"10.1109/TRANSDUCERS.2015.7181052","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181052","url":null,"abstract":"In this paper, we present the design, fabrication and experimental results of two types of MEMS sensors for manoeuvring and control of a robotic stingray. The first sensor is a piezoresistive liquid crystal polymer haircell flow sensor which is employed to determine the velocity of propagation of the stingray. The second sensor is a Pb(Zr0.52Ti0.48)O3 piezoelectric micro-diaphragm pressure sensor which measures various flapping profiles of the stingray's fins which are keys parameters to control the robot locomotion. The piezoelectric sensors show an excellent performance in tracking the trajectory of the fins of the stingray. Although a robotic stingray is used as a platform to emphasize the role of the MEMS sensors, the applications can be extended to most underwater robotic vehicles (URVs).","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86256893","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A single-chip oscillator based on a deep-submicron gap CMOS-MEMS resonator array with a high-stiffness driving scheme 基于深亚微米间隙CMOS-MEMS谐振器阵列的高刚度驱动单片振荡器
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7180879
Huan-Chun Su, Ming-Huang Li, Chao-Yu Chen, Sheng-Shian Li
{"title":"A single-chip oscillator based on a deep-submicron gap CMOS-MEMS resonator array with a high-stiffness driving scheme","authors":"Huan-Chun Su, Ming-Huang Li, Chao-Yu Chen, Sheng-Shian Li","doi":"10.1109/TRANSDUCERS.2015.7180879","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7180879","url":null,"abstract":"This work reports the design of a monolithic oscillator based on a low motional impedance (Rm) CMOS-MEMS resonator array with a high-stiffness driving scheme in a standard 0.35 μm CMOS. Combined with the previously developed polysilicon release process and the proposed “contact-array-assisted” transducer design, a tiny equivalent transducer's gap (deff) of only 190 nm is successfully attained. Based on this feature, a low Rm of 10 kΩ is achieved under a medium bias voltage (VP) of 36 V for a 4.22-MHz resonator, which demonstrates the lowest Rm among its CMOS-MEMS counterparts to date. The combination of the mechanically coupled array and high-stiffness driving scheme significantly enhances oscillator performance in terms of far-from-carrier phase noise. The 4.22-MHz single-chip CMOS-MEMS oscillator exhibits the phase noise of -90 dBc/Hz at 1-kHz offset and -121 dBc/Hz at 1-MHz offset, respectively.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86235679","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Development of a sapphire optical wall shear stress sensor for high-temperature applications 用于高温应用的蓝宝石光学壁剪应力传感器的研制
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7181168
D. Mills, D. Blood, M. Sheplak
{"title":"Development of a sapphire optical wall shear stress sensor for high-temperature applications","authors":"D. Mills, D. Blood, M. Sheplak","doi":"10.1109/TRANSDUCERS.2015.7181168","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181168","url":null,"abstract":"This paper presents the development of the first sapphire micromachined wall shear stress sensor for high-temperature applications utilizing geometric moiré optical transduction. A folded tether floating element structure is employed to extend the linear operating range of the sensor. Picosecond pulsed laser micro-machining processes are developed for patterning of mechanical structures in sapphire, and a four-channel alumina fiber array with sapphire optical fibers is used to interrogate the moiré fringe. Platinum thin-film gratings and a stainless steel package enable a theoretical maximum operating temperature in excess of 800°C, and initial dynamic calibration in differential mode demonstrates a shear stress sensitivity of 76.8 μV/Pa at 1.128 kHz.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86548434","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Flexible composite thermal energy harvester using piezoelectric PVDF polymer and shape memory alloy 采用压电PVDF聚合物和形状记忆合金的柔性复合热能采集器
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7181025
B. Gusarov, L. Gimeno, E. Gusarova, B. Viala, Sébastien Boisseau, O. Cugat
{"title":"Flexible composite thermal energy harvester using piezoelectric PVDF polymer and shape memory alloy","authors":"B. Gusarov, L. Gimeno, E. Gusarova, B. Viala, Sébastien Boisseau, O. Cugat","doi":"10.1109/TRANSDUCERS.2015.7181025","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181025","url":null,"abstract":"A novel flexible composite thermal energy harvester is presented, which couples pyroelectric and piezoelectric effects of polyvinylidene fluoride (PVDF) with shape memory effect of a TiNiCu alloy. The harvester combines superior flexibility of PVDF with large temperature-induced strain of the shape memory alloy (SMA) to harvest small and quasi-static temperature variations. The composite with a volume of 27.5 mm3 (post-stamp size) can harvest an energy density of 0.41 mJ/cm3 per event, i.e. a temperature variation of 20°C. The harvester can directly power a light-emitting diode (LED) without any storage unit. The use of PVDF quadruples the energy, compared to previously reported harvesters based on PZT-fiber composites.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83856898","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
A parametric array PMUT loudspeaker with high efficiency and wide flat bandwidth 一种高效率、宽平坦带宽的参数化阵列PMUT扬声器
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7181371
K. Been, Y. Je, H. S. Lee, W. Moon
{"title":"A parametric array PMUT loudspeaker with high efficiency and wide flat bandwidth","authors":"K. Been, Y. Je, H. S. Lee, W. Moon","doi":"10.1109/TRANSDUCERS.2015.7181371","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181371","url":null,"abstract":"A previous study demonstrated that a piezoelectric micromachined ultrasonic transducer (PMUT) could be used to construct a PA loudspeaker, and developed a prototype. In this paper, we describe the performance of a PA loudspeaker fabricated using a more developed package. Our PA loudspeaker consists of an array of PMUTs with two resonance frequencies and uses an `out-of-phase' driving technique, resulting in high power efficiency (up to 71%) and a wide flat radiation bandwidth. We also describe the characteristics of the PA sound, which depend on the method used to modulate the audible signal.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84004129","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Recoverable/stretchable polymer spring with embedded CNTs electrical routing for large-area electronic applications 可回收/可拉伸聚合物弹簧，嵌入式碳纳米管电气布线，用于大面积电子应用
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7181181
W. Sung, Chao-Lin Cheng, C. Hong, W. Fang
{"title":"Recoverable/stretchable polymer spring with embedded CNTs electrical routing for large-area electronic applications","authors":"W. Sung, Chao-Lin Cheng, C. Hong, W. Fang","doi":"10.1109/TRANSDUCERS.2015.7181181","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181181","url":null,"abstract":"This study presents a large-area chip-network using polymer stretchable spring with embedded carbon nanotubes (CNTs). The CNTs as piezo-resistive sensing element and metal routing was located on the node and spring to achieve functional device. The mechanical and electrical connections of surrounding devices were linked by CNTs-polymer stretchable spring. The polymer spring stretches and expands the device nodes by several times of magnitude area to establish a 2D chip-network system. Merits of this approach: (1) polymer stretchable spring with large fracture strain acts as mechanical connection; (2) the polymer spring has better recoverability after stretching; (3) vertically-aligned CNTs are exploited as electrical routing and promising sensing material for different stress state; (4) the chip-network with flexibility can apply to curved surfaces.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82898951","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
How microtechnologies enable organs-on-a-chip 微技术如何实现器官芯片
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7180902
E. Verpoorte, P. Oomen, M. Skolimowski, P. Mulder, P. V. van Midwoud, V. Starokozhko, M. Merema, G. Molema, G. Groothuis
{"title":"How microtechnologies enable organs-on-a-chip","authors":"E. Verpoorte, P. Oomen, M. Skolimowski, P. Mulder, P. V. van Midwoud, V. Starokozhko, M. Merema, G. Molema, G. Groothuis","doi":"10.1109/TRANSDUCERS.2015.7180902","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7180902","url":null,"abstract":"Engineering cellular microenvironments that more accurately reflect the in vivo situation is now recognized as being crucial for the improvement of the in vitro viability and in vivo-like function of cells or tissues. Microfluidic technologies have been increasingly applied since the late 1990's for this purpose, with a growing number of examples of perfused cell and tissue cultures in microfluidic chambers and channels. More recently, additional microfabricated features have been implemented in microfluidic structures to achieve 3-D cell culture systems which mimic not only in vivo fluid flows, but also the structure, transport, and mechanical properties of tissue in, for example, the lung or the intestine. The ultimate challenge becomes the combination of different organ functions into single, linked-compartment devices - the body-on-the-chip.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88983571","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Precision protein assays on compartmentalized biosensor arrays 区隔化生物传感器阵列的精确蛋白质测定
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7181255
D. Bechstein, Jr Lee, E. Ng, S. X. Wang
{"title":"Precision protein assays on compartmentalized biosensor arrays","authors":"D. Bechstein, Jr Lee, E. Ng, S. X. Wang","doi":"10.1109/TRANSDUCERS.2015.7181255","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181255","url":null,"abstract":"A biological measurement microsystem enables precision protein assays by compartmentalization of biosensors in a sensor array. Using a PDMS microfluidic interface on an 8 by 8 Giant Magnetoresistive sensor array, this compartmentalization technique performs all required measurements, including biological references, on a single sensor chip alongside the actual sample(s) to be measured. All data is acquired simultaneously on a single chip, circumventing a range of possible errors currently present in sequential biosensor measurement approaches. With our approach, we achieve a low concentration estimation error of 11%. Additionally this compartmentalization technique enables high throughput measurements using multiple samples on a single chip with a large-scale array of solid-state sensors.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90243251","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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