Development of a sapphire optical wall shear stress sensor for high-temperature applications

D. Mills, D. Blood, M. Sheplak
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引用次数: 4

Abstract

This paper presents the development of the first sapphire micromachined wall shear stress sensor for high-temperature applications utilizing geometric moiré optical transduction. A folded tether floating element structure is employed to extend the linear operating range of the sensor. Picosecond pulsed laser micro-machining processes are developed for patterning of mechanical structures in sapphire, and a four-channel alumina fiber array with sapphire optical fibers is used to interrogate the moiré fringe. Platinum thin-film gratings and a stainless steel package enable a theoretical maximum operating temperature in excess of 800°C, and initial dynamic calibration in differential mode demonstrates a shear stress sensitivity of 76.8 μV/Pa at 1.128 kHz.
用于高温应用的蓝宝石光学壁剪应力传感器的研制
本文介绍了利用几何波纹光学转导技术研制的第一个用于高温应用的蓝宝石微机械壁剪应力传感器。采用折叠系绳浮动元件结构,扩大了传感器的线性工作范围。开发了皮秒脉冲激光微加工工艺用于蓝宝石机械结构的图像化,并采用四通道氧化铝光纤阵列和蓝宝石光纤对波纹条纹进行了研究。铂薄膜光栅和不锈钢封装使理论最大工作温度超过800°C,差分模式下的初始动态校准表明,在1.128 kHz时剪切应力灵敏度为76.8 μV/Pa。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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