采用12个单片集成相变材料开关的高度可重构的氮化铝MEMS谐振器

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI:10.1109/TRANSDUCERS.2015.7180926

G. Hummel, Y. Hui, M. Rinaldi

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引用次数: 4

摘要

本文首次展示了一种频率可重构和可编程的氮化铝(AlN)压电MEMS谐振器，该谐振器采用基于相变材料(PCM)的可切换电极。首次将12个小型化(2 μm×2 μm) PCM开关与AlN MEMS谐振器单片集成，并用于重新配置组成器件间数字转换器(IDT)的单个金属手指的终端连接。这种创新的设计方案提供了声学共振的高开/关比切换(共振时阻抗变化~28X)，以及器件机电耦合(kt2: 0-1.32%)，电容(C: 125-1,134 fF)和工作频率(f1~181.3 MHz, f2~385.4 MHz)的重新配置。

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Highly reconfigurable Aluminum Nitride MEMS resonator using 12 monolithically integrated phase change material switches

This paper presents the first demonstration of a frequency reconfigurable and programmable Aluminum Nitride (AlN) piezoelectric MEMS resonator using phase change material (PCM) based switchable electrodes. For the first time, 12 miniaturized (2 μm×2 μm) PCM switches are monolithically integrated with an AlN MEMS resonator and used to reconfigure the terminal connections of the individual metal fingers composing the device interdigital transducer (IDT). This innovative design solution provides high ON/OFF ratio switching of the acoustic resonance (~28X impedance variation at resonance), and reconfiguration of the device electromechanical coupling (kt2: 0-1.32%), capacitance (C: 125-1,134 fF), and operating frequency (f1~181.3 MHz, f2~385.4 MHz).

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2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

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