2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)最新文献_第5页

A 10 μm thick poly-SiGe gyroscope processed above 0.35 μm CMOS 采用0.35 μm以上CMOS工艺的10 μm厚poly-SiGe陀螺仪

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433007

A. Scheurle, T. Fuchs, K. Kehr, C. Leinenbach, S. Kronmuller, A. Arias, J. Ceballos, M. A. Lagos, J. M. Mora, J. M. Muñoz, A. Ragel, J. Ramos, S. Van Aerde, J. Spengler, A. Mehta, A. Verbist, B. du Bois, A. Witvrouw

引用次数: 13

A dynamic ferrofluid platform for micromanipulation 微操作的动态铁磁流体平台

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433115

W. Song, Z. Ding, C. Son, B. Ziaie

引用次数: 2

Variable pivot seesaw actuated RF MEMS switch for reconfigurable system application 可变枢轴跷跷板驱动的射频MEMS开关用于可重构系统的应用

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433000

Jongseok Kim, Sangwook Kwon, Hong Youngtack, Hee-Moon Jeong, Sanghoon Lee

引用次数: 6

Composite flexural-mode resonator with controllable turnover temperature 具有可控翻转温度的复合弯曲模谐振器

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433054

R. Melamud, Bongsang Kim, M. Hopcroft, S. Chandorkar, M. Agarwal, C. Jha, T. Kenny

引用次数: 41

A controllable micro-lens structure for bio-analytical applications 一种生物分析用可控微透镜结构

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433174

S. Hsiung, Gwo-Bin Lee

{"title":"A controllable micro-lens structure for bio-analytical applications","authors":"S. Hsiung, Gwo-Bin Lee","doi":"10.1109/MEMSYS.2007.4433174","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433174","url":null,"abstract":"In this study, a new and simple design of a controllable micro-lens structures capable of the enhancement of laser induced fluorescence (LIF) system has been demonstrated. Two pneumatic side-chambers were placed between a micro sample flow channel and an optic fiber channel. The interval between the side-chamber and the micro sample channel was used to form a controllable micro-lens structure. A deformation of the micro-lens structure can be generated after a pressurized index-matching fluid was injected into the pneumatic side-chambers. The side-chambers can be deflected as a convex lens to focus both the laser light source and the fluorescence emission. The profile and the focal length of the micro-lens structure can be adjusted by using different applied pressures accordingly so that bio-samples with a low concentration can be detected. Using low-cost polymeric materials such as polydimethylsiloxane (PDMS), rapid and reliable fabrication techniques involving standard lithography and replication process was employed for the formation of the proposed chip device. Finally, experimental results clearly revealed the micro-lens structure can be deformed as a convex lens to focus the laser light source and the fluorescence signal can be enhanced successfully. The developed device has a great potential to be integrated with other microfluidic devices for further biomedical applications.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"763-766"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83617696","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 6

Micro-tensile tests to characterize MEMS 微拉伸测试表征MEMS

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433103

R. Modlinski, R. Puers, I. De Wolf

引用次数: 3

Nanocrystalline porous silicon ultrasonic transmitter with patterned emission area 具有图案发射区的纳米晶多孔硅超声发射机

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433011

A. Isozaki, A. Nakai, K. Matsumoto, I. Shimoyama

{"title":"Nanocrystalline porous silicon ultrasonic transmitter with patterned emission area","authors":"A. Isozaki, A. Nakai, K. Matsumoto, I. Shimoyama","doi":"10.1109/MEMSYS.2007.4433011","DOIUrl":"https://doi.org/10.1109/MEMSYS.2007.4433011","url":null,"abstract":"We propose a nanocrystalline porous silicon (nc-PS) ultrasonic transmitter with a variable directional pattern. The directional pattern is realized by using an interference effect. An ultrasonic wave is emitted from electrodes on the nc-PS layer according to the applied electrical current. The emission areas of the transmitter were patterned in order to use the interference between the emitted ultrasonic waves. To observe the interference effect, our device was designed to have two emission areas. The directional pattern induced by the interference effect depends on the distance between the emission areas, and the frequency and the phase difference of the currents applied to the emission areas. We confirmed that the sharpness and the lobe number of the directional pattern can be changed by the phase difference between two emission areas. We also confirmed that the direction of the main lobe can be changed by the phase difference. With the characteristics of the designable and controllable directional pattern, the proposed device is suitable for distance sensors, especially for proximity sensors.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"72 1","pages":"55-58"},"PeriodicalIF":0.0,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86255777","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 5

Flexible transducer arrays with through-wafer electrical interconnects based on trench refilling with PDMS 基于PDMS沟槽填充的跨晶圆电气互连柔性换能器阵列

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433016

X. Zhuang, Der-song Lin, O. Oralkan, B. Khuri-Yakub

引用次数: 11

Versatile method of sub-micro particle pattern formation using self-assembly and two-step transfer 利用自组装和两步转移形成亚微粒图案的通用方法

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433108

T. Ozaki, K. Sugano, T. Tsuchiya, O. Tabata

引用次数: 1

Novel shear strength evaluation of MEMS materials using asymmetrical four-point bending technique 基于非对称四点弯曲技术的新型MEMS材料抗剪强度评估

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI: 10.1109/MEMSYS.2007.4433140

M. Ogawa, Y. Isono

引用次数: 4