Nanocrystalline porous silicon ultrasonic transmitter with patterned emission area

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI:10.1109/MEMSYS.2007.4433011

A. Isozaki, A. Nakai, K. Matsumoto, I. Shimoyama

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引用次数: 5

Abstract

We propose a nanocrystalline porous silicon (nc-PS) ultrasonic transmitter with a variable directional pattern. The directional pattern is realized by using an interference effect. An ultrasonic wave is emitted from electrodes on the nc-PS layer according to the applied electrical current. The emission areas of the transmitter were patterned in order to use the interference between the emitted ultrasonic waves. To observe the interference effect, our device was designed to have two emission areas. The directional pattern induced by the interference effect depends on the distance between the emission areas, and the frequency and the phase difference of the currents applied to the emission areas. We confirmed that the sharpness and the lobe number of the directional pattern can be changed by the phase difference between two emission areas. We also confirmed that the direction of the main lobe can be changed by the phase difference. With the characteristics of the designable and controllable directional pattern, the proposed device is suitable for distance sensors, especially for proximity sensors.

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具有图案发射区的纳米晶多孔硅超声发射机

我们提出了一种具有可变方向图案的纳米晶多孔硅(nc-PS)超声波发射器。方向图是利用干涉效应实现的。根据施加的电流，从nc-PS层上的电极发射超声波。为了利用发射的超声波之间的干扰，发射机的发射区域被图案化。为了观察干扰效应，我们设计了两个发射区。干扰效应诱导的方向图取决于发射区之间的距离以及施加在发射区的电流的频率和相位差。我们证实了定向图的清晰度和瓣数可以通过两个发射区的相位差来改变。我们还证实了相位差可以改变主瓣的方向。该器件具有方向方向可设计、可控的特点，适用于距离传感器，特别是接近传感器。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)

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