2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems最新文献_第8页

Improved Dual-Axis Micro Gyroscope Using a Commercially Available Fabrication Processes 改进的双轴微陀螺仪使用商业上可用的制造工艺

2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2006-01-01 DOI: 10.1109/NEMS.2006.334623

Kaicheng Chang, Wen Yuan Liu

引用次数: 0

The Influence of Sputtering Power of Aluminum Film in Aluminum Induced Crystallization of Low Temperature Poly-Silicon Film 铝膜溅射功率对铝诱导低温多晶硅膜结晶的影响

2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2006-01-01 DOI: 10.1109/NEMS.2006.334677

H. Chu, M. Weng, Chih-Cheng Nien, Cheng Lin, Kuan-I Hu

{"title":"The Influence of Sputtering Power of Aluminum Film in Aluminum Induced Crystallization of Low Temperature Poly-Silicon Film","authors":"H. Chu, M. Weng, Chih-Cheng Nien, Cheng Lin, Kuan-I Hu","doi":"10.1109/NEMS.2006.334677","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334677","url":null,"abstract":"This study produces low-temperature poly-silicon (LTPS) film by aluminum induced crystallization (AIC) method on Corning Eagle2000 glass substrate. Through the control of different sputtering power in depositing aluminum film, five kinds of specimens with sputtering power of 100, 200, 400, 800 and 1600 Watts, respectively, are made. Crystal quality, surface morphology, roughness and film residual stress varying with aluminum film sputtering power are analyzed with XRD, Raman spectra, SEM, AFM and alpha-stepper. Results show that surface roughness increases proportional to sputtering power. More and more bulges and cracks are observed on the poly-Si thin film in SEM micrographs as the sputtering power increases. A broken poly-Si film is observed in SEM micrograph when Al sputtering power is 1600 Watts. The film stresses calculated are tensile when sputtering power are 100 and 200 W from the measurement results of alpha-stepper both before and after annealing process. However, if the sputtering power is further increased to 400 and 800 Watts, the film stresses will become compressive. This explained the reason why bulges and cracks increase with the sputtering power. The film stress cannot be calculated correctly because the film has already broken and the equation for calculating stress is no more applicable. Therefore, from the viewpoint of minimal film stress, a sputtering power of aluminum film of 200 to 400 Watts will be the optimal range in our study","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"10 1","pages":"1190-1193"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86001352","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 3

Design Conceits and Testing of a Prototype Micro Thermophotovoltaic System 微型热光伏系统原型的设计构想与测试

2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2006-01-01 DOI: 10.1109/NEMS.2006.334657

J. Pan, Jianning Ding, Wenming Yang, Detao Li, H. Xue

引用次数: 0

Study on the Novel Nanometer Additive for Secondary Batteries 新型二次电池纳米添加剂的研究

2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2006-01-01 DOI: 10.1109/NEMS.2006.334624

Sen Zhang, C. Deng

引用次数: 0

Subatomic Imaging of Si (001) Surface by Molecular Dynamic Simulation 分子动力学模拟Si(001)表面的亚原子成像

2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2006-01-01 DOI: 10.1109/NEMS.2006.334670

Yingchun Liang, J. Dou, Q. Bai, Shumei Wang, Mingjun Chen, Yan Zhao, S. Dong

引用次数: 0

An Improved AFM Head for Biological Specimen 一种用于生物标本的改进AFM头

2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2006-01-01 DOI: 10.1109/NEMS.2006.334599

Jian Yuan, Li Han, Yansheng Zuo, Lin-Sheng Yun

引用次数: 0

Optimized Surface Acoustic Wave-based Pressure Sensor Using Equivalent Circuit Model 基于等效电路模型的表面声波压力传感器优化

2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2006-01-01 DOI: 10.1109/NEMS.2006.334638

Wen Wang, Keekeun Lee, Sangsik Yang, Jungsoo Hwang, Geunyoung Kim

{"title":"Optimized Surface Acoustic Wave-based Pressure Sensor Using Equivalent Circuit Model","authors":"Wen Wang, Keekeun Lee, Sangsik Yang, Jungsoo Hwang, Geunyoung Kim","doi":"10.1109/NEMS.2006.334638","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334638","url":null,"abstract":"This paper presents an optimized design on surface acoustic wave (SAW)-based pressure sensor, which is composed of a broadband reflective delay line and a bond substrate underneath the diaphragm. Using the equivalent circuit model (ECM), the SAW device was simulated, and the effect of inter-digital transducer structure, acoustic aperture and number of finger pairs on the performance of the system was studied. To determine the geometry and configuration of the sensor, Finite Element Method (FEM) was used to calculate the diaphragm bending and stress/strain distribution. From the ECM simulation and FEM analysis, the optimal design parameters were determined, and a new 440 MHz reflective delay line on 41deg YX LiNbO3 was developed, the measured reflection coefficient S11 results in time domain shows a good agreement with simulated one, low loss, sharp reflected peaks and high dynamic separation between the peaks were observed. The SAW device was successfully applied to pressure measurement, and the experiment results approve it is working satisfactorily","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"52 1","pages":"1092-1096"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87199128","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 2

Controllable Synthesis of CNTs Using Pd Catalyst 钯催化剂下碳纳米管的可控合成

2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2006-01-01 DOI: 10.1109/NEMS.2006.334840

X. Tao, Xiaobin Zhang, Junlian Wang, Jipeng Cheng, Fu Liu, Junhang Luo, Zhiqiang Luo

引用次数: 1

Advanced Fabrication of Single Wall Carbon Nanotubes by Laser Ablation with Reduced Number of Parameters 激光烧蚀法制备单壁碳纳米管的研究

2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2006-01-01 DOI: 10.1109/NEMS.2006.334797

Xianfang Zhu, M.G. Gupta, G. Lu

引用次数: 2

Enhancement of Light Extraction Efficiency in OLED with Periodic Nano-Structure 周期纳米结构增强OLED光提取效率的研究

2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2006-01-01 DOI: 10.1109/NEMS.2006.334879

Rong-jin Yan, Qing-kang Wang

引用次数: 6