{"title":"改进的双轴微陀螺仪使用商业上可用的制造工艺","authors":"Kaicheng Chang, Wen Yuan Liu","doi":"10.1109/NEMS.2006.334623","DOIUrl":null,"url":null,"abstract":"A second generation ITRI micro gyroscope design is designed, fabricated, and tested. Major improvements over the original design include using thin film metallization techniques to increase the proof mass to 9.32 times 10-7g for the 500 times 500 mum2 gyro structure, and demonstrating an integrated package with a CMOS ASIC die. The custom-built, capacitance-to-voltage converter ASIC has a calculated noise floor of 6.5times10-7 V/Hz-2 at 19 KHz, a full-scale range of 5 fF, and a target resolution of 5 aF. The gyroscope has a fundamental actuation frequency at 4.33 KHz, with a quality factor of 22.5 under atmospheric conditions","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"10 1","pages":"66-69"},"PeriodicalIF":0.0000,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Improved Dual-Axis Micro Gyroscope Using a Commercially Available Fabrication Processes\",\"authors\":\"Kaicheng Chang, Wen Yuan Liu\",\"doi\":\"10.1109/NEMS.2006.334623\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A second generation ITRI micro gyroscope design is designed, fabricated, and tested. Major improvements over the original design include using thin film metallization techniques to increase the proof mass to 9.32 times 10-7g for the 500 times 500 mum2 gyro structure, and demonstrating an integrated package with a CMOS ASIC die. The custom-built, capacitance-to-voltage converter ASIC has a calculated noise floor of 6.5times10-7 V/Hz-2 at 19 KHz, a full-scale range of 5 fF, and a target resolution of 5 aF. The gyroscope has a fundamental actuation frequency at 4.33 KHz, with a quality factor of 22.5 under atmospheric conditions\",\"PeriodicalId\":6362,\"journal\":{\"name\":\"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems\",\"volume\":\"10 1\",\"pages\":\"66-69\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/NEMS.2006.334623\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NEMS.2006.334623","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Improved Dual-Axis Micro Gyroscope Using a Commercially Available Fabrication Processes
A second generation ITRI micro gyroscope design is designed, fabricated, and tested. Major improvements over the original design include using thin film metallization techniques to increase the proof mass to 9.32 times 10-7g for the 500 times 500 mum2 gyro structure, and demonstrating an integrated package with a CMOS ASIC die. The custom-built, capacitance-to-voltage converter ASIC has a calculated noise floor of 6.5times10-7 V/Hz-2 at 19 KHz, a full-scale range of 5 fF, and a target resolution of 5 aF. The gyroscope has a fundamental actuation frequency at 4.33 KHz, with a quality factor of 22.5 under atmospheric conditions
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