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2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems最新文献

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Study on Micro-machining by Micro-WEDM 微细电火花线切割微细加工研究
2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2006-01-01 DOI: 10.1109/NEMS.2006.334857
S. Di, Ruining Huang, G. Chi
{"title":"Study on Micro-machining by Micro-WEDM","authors":"S. Di, Ruining Huang, G. Chi","doi":"10.1109/NEMS.2006.334857","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334857","url":null,"abstract":"Micro wire electrical discharge machining (Micro-WEDM) has proved to be a versatile micro-machining technology to produce complex part. Therefore, a Micro-WEDM setup is developed to fabricate micro parts. Experiments were done on the micro-WEDM. Experiment analyzing results show that the white layer is no more than 2mum, the surface roughness (Ra) is smaller than 0.1mum, and the surface recast layer's hardness is three or four times higher than the base material. Moreover, micro slot, micro shaped holes, micro bearing bracket, micro gears and micro gear die are machined to check its machining capabilities. Finally, with micro plastic forming method, a high quality micro gear has been fabricated by the micro gear dies machined by micro-WEDM, which indicates that micro parts machined by Micro-WEDM meet the requirements of micro instrument and device","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"19 1","pages":"615-619"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77262409","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 24
Theoretical Analytical Flow Model in Hollow Microneedles for Non-forced Fluid Extraction 空心微针非强制萃取流体的理论解析流动模型
2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2006-01-01 DOI: 10.1109/NEMS.2006.334607
Ran Liu, Xiaohao Wang, Yanying Feng, Guangzhi Wang, Jing Liu, H. Ding
{"title":"Theoretical Analytical Flow Model in Hollow Microneedles for Non-forced Fluid Extraction","authors":"Ran Liu, Xiaohao Wang, Yanying Feng, Guangzhi Wang, Jing Liu, H. Ding","doi":"10.1109/NEMS.2006.334607","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334607","url":null,"abstract":"In a hollow microneedles for non-force fluid extraction and transfer, under the viscosity and capillary force, the fluid flow velocity varied following time. The fluid mechanical analysis couldn't apply the steady pipe flow model. In this paper, based on Newtonian fluid, a transient flow theoretical model was built to interpret microfluidic properties in the microneedle with the rectangular cross section for non-force fluid extraction and transfer, and the analytical solution for the marching position of fluid flow was obtained in order to study the relation between the flow variables and physical properties in pipe flow of a Newtonian fluid in the microneedle. The contact angles between the open surface of the microneedle and the different fluids, which were water, plasma, serum and whole blood, were measured using the CCD to approximate as the contact angles of the internal surface. For faster fluid filling into the microneedles, the length width ratio of the section of microchannel was optimized to radic 2 +1","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"28 1","pages":"1039-1042"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77458815","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Design and Fabrication of a Micro Electromagnetic Actuator 微型电磁驱动器的设计与制造
2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2006-01-01 DOI: 10.1109/NEMS.2006.334757
Bendong Liu, Desheng Li, Xiaobo Yang, Xiang Li
{"title":"Design and Fabrication of a Micro Electromagnetic Actuator","authors":"Bendong Liu, Desheng Li, Xiaobo Yang, Xiang Li","doi":"10.1109/NEMS.2006.334757","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334757","url":null,"abstract":"A new optimized structure for micro electromagnetic actuator is introduced based on the research done before. Three-dimensional structure and new fabricate process is adopted accordingly in this improved design. The new structure can diminish the leak of magnetic circuit and increase the magnetic force. An electromagnetic micro actuator is fabricated based on the MEMS technology. The size of the micro electromagnetic actuator is about 5mm times 5mm times 0.4mm. The micro actuator consist a lower magnetic circuit, a planar exciting coil and a permalloy cantilever. Anisotropic etching, electroplating, polyimide film patterning is adopted in the fabricated process. The exciting coil has 20 turns and the resistance of the coil is about 20Omega. The initial experiments show that the permalloy cantilever displacement can reach 2mum at a current and voltage of 250mA and 5V. This electromagnetic actuator is expected to be useful in making a micro relay","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"30 1","pages":"353-356"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87065775","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Electrochemical Performance of a Pyrolytic Carbon Film with the Anisotropic Microstructure 各向异性结构热解碳膜的电化学性能
2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2006-01-01 DOI: 10.1109/NEMS.2006.334860
M. Yousefi, A. Rouhollahi, M. Hadi, F. Mohammadi
{"title":"Electrochemical Performance of a Pyrolytic Carbon Film with the Anisotropic Microstructure","authors":"M. Yousefi, A. Rouhollahi, M. Hadi, F. Mohammadi","doi":"10.1109/NEMS.2006.334860","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334860","url":null,"abstract":"A pyrolytic carbon film electrode was fabricated by the low temperature chemical vapor deposition (CVD) method. This report deals with the preparation and electrochemical behavior of this carbon film. To characterize the surface structure, scanning electron microscopy was applied. Also, cyclic voltammetry and chronocoulometery were applied to evaluate the electrochemical properties","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"52 2 1","pages":"627-630"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87699809","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
A Low Noise Bulk Micromachined Gyroscope with Symmetrical and Decoupled Structure 一种具有对称解耦结构的低噪声体微机械陀螺仪
2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2006-01-01 DOI: 10.1109/NEMS.2006.334729
Hong Chen, Xiaowei Liu, Mingxue Huo, Weiping Chen
{"title":"A Low Noise Bulk Micromachined Gyroscope with Symmetrical and Decoupled Structure","authors":"Hong Chen, Xiaowei Liu, Mingxue Huo, Weiping Chen","doi":"10.1109/NEMS.2006.334729","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334729","url":null,"abstract":"This paper presents a low noise bulk micromachined gyroscope. The design of frame and independent beams reduces the mechanical coupling between the drive mode and sense mode, and facilitate the frequency match of two modes. The gyroscope with a 100-120-mum-structure thickness and an aspect ratio about 12 is fabricated by DRIE technology and silicon-glass anodic bonding, which provides a high sense capacitance about 2.1 pF and a weighty proof mass about 1.27 mg. Resonant frequencies of the drive and sense mode are measured to be 1610 and 1676 Hz, respectively. The gyroscope can achieve a 2.97 muN electrostatic driving force by applying of a 6V AC and 15V DC bias voltage on the driving electrodes. The thermal-mechanical noise floor is estimated to be about 0.12deg/h/Hzfrac12 at atmospheric pressure","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"72 1","pages":"306-309"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90592754","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Polymer-based Capacitive Micromachined Ultrasonic Transducers (CMUT) for Micro Surgical Imaging Applications 基于聚合物的电容式微机械超声换能器(CMUT)用于显微外科成像
2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2006-01-01 DOI: 10.1109/NEMS.2006.334622
M. Ming-Wei Chang, M.T.-M. Deng, J.T.-J. Gwo, J. Mai, E. Hsu
{"title":"Polymer-based Capacitive Micromachined Ultrasonic Transducers (CMUT) for Micro Surgical Imaging Applications","authors":"M. Ming-Wei Chang, M.T.-M. Deng, J.T.-J. Gwo, J. Mai, E. Hsu","doi":"10.1109/NEMS.2006.334622","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334622","url":null,"abstract":"The design, simulation, and fabrication results for a first generation polymer CMUT are presented. Baseline ANSYS and MATLAB simulations show that the use of a silicon nitride membrane should increase the transmission signal by 28% and the receiver sensitivity by 33%, when compared to a conventional poly silicon membrane. Simulations with a polymer membrane showed a maximum membrane deflection increase up to 67%, at approximately 6.5 MHz, when compared to nitride. Furthermore, the optimal mechanical impendence coupling frequency was lowered to 3.7 MHz for the polymer. These simulations give design guidelines for a CMUT based on geometric parameters such as membrane length and thickness. A CMUT array was then designed and fabricated with a target DC actuation voltage of less than 50V. Also, results showed potential operation of the CMUT up to 10 MHz using a low temperature fabrication process that still results in durable operation","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"124 1","pages":"61-65"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85979103","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 16
A Flip-chip Assembled Microplatform for Hybrid MEMS 用于混合MEMS的倒装芯片组装微平台
2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2006-01-01 DOI: 10.1109/NEMS.2006.334845
Mei-fang Yang, J. Chen, Y. Hao
{"title":"A Flip-chip Assembled Microplatform for Hybrid MEMS","authors":"Mei-fang Yang, J. Chen, Y. Hao","doi":"10.1109/NEMS.2006.334845","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334845","url":null,"abstract":"As MicroElectroMechanical Systems become more complicated, building them as integrated systems may not be possible and exploring new microassembly technologies becomes necessary. A novel flip-chip assembled microplatform combined with a microjig and alignment pairs is presented, both of which are fabricated with room-temperature, non-aggressive processes that can accommodate a board range of devices. With an optimized assembly sequence, 3 mum in plane position accuracy has been achieved by flip-chip positioning, coarse alignment and fine alignment enabled by various mechanisms. Moreover, the distance in z axis can also be pinpointed. Sufficient mechanical and electrical connections have been formed at bonds. It can be applied to various microcomponent and substrate material combinations, enabling hybrid MEMS efficiently and economically","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"60 1","pages":"563-566"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91035368","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Design of a Resonant Miniature Electrostatic Field Sensor with Feedback Driving and Detection 基于反馈驱动与检测的谐振式微型静电场传感器的设计
2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2006-01-01 DOI: 10.1109/NEMS.2006.334605
C. Peng, X.X. Chen, C. Ye, Q. Bai, S. Xia
{"title":"Design of a Resonant Miniature Electrostatic Field Sensor with Feedback Driving and Detection","authors":"C. Peng, X.X. Chen, C. Ye, Q. Bai, S. Xia","doi":"10.1109/NEMS.2006.334605","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334605","url":null,"abstract":"The paper presents a new design of resonant miniature electrostatic field sensors (EFS) based on surface micromachining process. With a phase and an amplitude closed loop feedback control, the sensor can be adjusted automatically to operate at its resonant frequency in despite of the temperature influence. For minimizing the capacitive feedthrough, a feedback detecting loop is utilized in the design. The digital concept of the new electronics for EFS aims to eliminate the additional noise and especially temperature drift yielded by analog components. Based on a digital lock-in amplifier, the main function of the designed electronics has been realized. We achieve a lower nonlinearity of 1.8% (end-point-straight-line) at resonant frequency (4.13 kHz) in measurement the range of (0~10kV/m for our primary EFS","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"51 1","pages":"1029-1032"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91142172","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Uncertainties in the Micro/nano-Particles Induced Hyperthermia Treatment on Tumor Subject to External EM Field 微纳米粒子诱导热疗治疗外源电磁场下肿瘤的不确定性
2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2006-01-01 DOI: 10.1109/NEMS.2006.334910
Z. Deng, Jing Liu
{"title":"Uncertainties in the Micro/nano-Particles Induced Hyperthermia Treatment on Tumor Subject to External EM Field","authors":"Z. Deng, Jing Liu","doi":"10.1109/NEMS.2006.334910","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334910","url":null,"abstract":"Advancement of the recent micro/nano technology has stimulated the renaissance of using magnetic micro/nano particles embedded in biological tissues for the target tumor hyperthermia. As is well known, mathematical solutions of bioheat transfer involved in hyperthermia treatment are indispensable for computerized optimization of hyperthermia parameters. However, estimating the level of uncertainties associated with tissue temperature and thermal ablation area remains a major challenge. In this article, the uncertainties for the predicted temperatures of tissues due to approximate parameters were studied, based on numerical simulation of three-dimensional (3-D) quasi-steady state electromagnetic (EM) field and transient temperature response in biological tissues induced by the external EM field. Contributions of uncertainty from the tissue area permeated with micro/nano particles, the concentration and size of micro/nano particles, and the frequency and strength of the external alternating EM field were analyzed, and the uncertainty limits for temperature distributions in these cases were also estimated. The uncertainty analysis presented in this article is expected to serve as a significant guide for performing a highly efficient and also completely safe tumor hyperthermia using magnetic micro/nano particles.","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"29 1","pages":"851-855"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73522586","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
A Novel Passive Membrane Pumping Nano Fountain-Pen 一种新型被动膜泵纳米钢笔
2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2006-01-01 DOI: 10.1109/NEMS.2006.334601
Youngkwan Lee, Suk-Han Lee, Youn-J. Kim, Hunmo Kim
{"title":"A Novel Passive Membrane Pumping Nano Fountain-Pen","authors":"Youngkwan Lee, Suk-Han Lee, Youn-J. Kim, Hunmo Kim","doi":"10.1109/NEMS.2006.334601","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334601","url":null,"abstract":"In this paper, flow control of nano fountain pen using active membrane pumping is investigated. DPN (Dip Pen Nano- Lithography) has a shortcoming in which is the need of frequent loading and unloading while coating for broadband patterning. This issue is caused by a limit in quantity of ink, which is tied on the tip surface. The control of fluid injection using active membrane pumping in chambers is the answer of the problem. The flow rates in channels with the presence of capillary force are analyzed including the cantilever deflection and the control of mass flow rates by deflection of membrane. Finally, in this paper, the membrane deflection using a nano indentation equipment has been experimentally examined.","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"104 1","pages":"1012-1017"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88964307","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
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