一种具有对称解耦结构的低噪声体微机械陀螺仪

2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2006-01-01 DOI:10.1109/NEMS.2006.334729

Hong Chen, Xiaowei Liu, Mingxue Huo, Weiping Chen

{"title":"一种具有对称解耦结构的低噪声体微机械陀螺仪","authors":"Hong Chen, Xiaowei Liu, Mingxue Huo, Weiping Chen","doi":"10.1109/NEMS.2006.334729","DOIUrl":null,"url":null,"abstract":"This paper presents a low noise bulk micromachined gyroscope. The design of frame and independent beams reduces the mechanical coupling between the drive mode and sense mode, and facilitate the frequency match of two modes. The gyroscope with a 100-120-mum-structure thickness and an aspect ratio about 12 is fabricated by DRIE technology and silicon-glass anodic bonding, which provides a high sense capacitance about 2.1 pF and a weighty proof mass about 1.27 mg. Resonant frequencies of the drive and sense mode are measured to be 1610 and 1676 Hz, respectively. The gyroscope can achieve a 2.97 muN electrostatic driving force by applying of a 6V AC and 15V DC bias voltage on the driving electrodes. The thermal-mechanical noise floor is estimated to be about 0.12deg/h/Hzfrac12 at atmospheric pressure","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"72 1","pages":"306-309"},"PeriodicalIF":0.0000,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A Low Noise Bulk Micromachined Gyroscope with Symmetrical and Decoupled Structure\",\"authors\":\"Hong Chen, Xiaowei Liu, Mingxue Huo, Weiping Chen\",\"doi\":\"10.1109/NEMS.2006.334729\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents a low noise bulk micromachined gyroscope. The design of frame and independent beams reduces the mechanical coupling between the drive mode and sense mode, and facilitate the frequency match of two modes. The gyroscope with a 100-120-mum-structure thickness and an aspect ratio about 12 is fabricated by DRIE technology and silicon-glass anodic bonding, which provides a high sense capacitance about 2.1 pF and a weighty proof mass about 1.27 mg. Resonant frequencies of the drive and sense mode are measured to be 1610 and 1676 Hz, respectively. The gyroscope can achieve a 2.97 muN electrostatic driving force by applying of a 6V AC and 15V DC bias voltage on the driving electrodes. The thermal-mechanical noise floor is estimated to be about 0.12deg/h/Hzfrac12 at atmospheric pressure\",\"PeriodicalId\":6362,\"journal\":{\"name\":\"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems\",\"volume\":\"72 1\",\"pages\":\"306-309\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/NEMS.2006.334729\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NEMS.2006.334729","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

提出了一种低噪声体积微机械陀螺仪。框架和独立梁的设计减少了驱动模式和感知模式之间的力学耦合，方便了两种模式的频率匹配。该陀螺仪的结构厚度为100-120 μ m，宽高比约为12，采用DRIE技术和硅-玻璃阳极键合制成，具有约2.1 pF的高检测电容和约1.27 mg的防重质量。驱动模式和感测模式的谐振频率分别为1610 Hz和1676 Hz。通过在驱动电极上施加6V交流和15V直流偏置电压，陀螺仪可以实现2.97 muN的静电驱动力。据估计，在大气压下，热力-机械噪声底限约为0.12°/h/Hzfrac12

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

A Low Noise Bulk Micromachined Gyroscope with Symmetrical and Decoupled Structure

This paper presents a low noise bulk micromachined gyroscope. The design of frame and independent beams reduces the mechanical coupling between the drive mode and sense mode, and facilitate the frequency match of two modes. The gyroscope with a 100-120-mum-structure thickness and an aspect ratio about 12 is fabricated by DRIE technology and silicon-glass anodic bonding, which provides a high sense capacitance about 2.1 pF and a weighty proof mass about 1.27 mg. Resonant frequencies of the drive and sense mode are measured to be 1610 and 1676 Hz, respectively. The gyroscope can achieve a 2.97 muN electrostatic driving force by applying of a 6V AC and 15V DC bias voltage on the driving electrodes. The thermal-mechanical noise floor is estimated to be about 0.12deg/h/Hzfrac12 at atmospheric pressure

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems

自引率

0.00%

发文量