Design and Fabrication of a Micro Electromagnetic Actuator

Bendong Liu, Desheng Li, Xiaobo Yang, Xiang Li
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引用次数: 5

Abstract

A new optimized structure for micro electromagnetic actuator is introduced based on the research done before. Three-dimensional structure and new fabricate process is adopted accordingly in this improved design. The new structure can diminish the leak of magnetic circuit and increase the magnetic force. An electromagnetic micro actuator is fabricated based on the MEMS technology. The size of the micro electromagnetic actuator is about 5mm times 5mm times 0.4mm. The micro actuator consist a lower magnetic circuit, a planar exciting coil and a permalloy cantilever. Anisotropic etching, electroplating, polyimide film patterning is adopted in the fabricated process. The exciting coil has 20 turns and the resistance of the coil is about 20Omega. The initial experiments show that the permalloy cantilever displacement can reach 2mum at a current and voltage of 250mA and 5V. This electromagnetic actuator is expected to be useful in making a micro relay
微型电磁驱动器的设计与制造
在前人研究的基础上,介绍了一种新型的微电磁执行器优化结构。在改进设计中,采用了三维结构和新的制造工艺。这种新结构可以减少磁路泄漏,提高磁力。基于MEMS技术,制作了一种电磁微致动器。微型电磁执行器的尺寸约为5mm × 5mm × 0.4mm。微致动器由下磁路、平面激励线圈和坡莫合金悬臂组成。制作工艺采用各向异性刻蚀、电镀、聚酰亚胺薄膜图像化等工艺。励磁线圈有20圈,线圈的电阻约为20Omega。初步实验表明,在电流为250mA、电压为5V时,坡莫合金悬臂位移可达2mum。这种电磁致动器有望用于制造微型继电器
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