Youngkwan Lee, Suk-Han Lee, Youn-J. Kim, Hunmo Kim
{"title":"A Novel Passive Membrane Pumping Nano Fountain-Pen","authors":"Youngkwan Lee, Suk-Han Lee, Youn-J. Kim, Hunmo Kim","doi":"10.1109/NEMS.2006.334601","DOIUrl":null,"url":null,"abstract":"In this paper, flow control of nano fountain pen using active membrane pumping is investigated. DPN (Dip Pen Nano- Lithography) has a shortcoming in which is the need of frequent loading and unloading while coating for broadband patterning. This issue is caused by a limit in quantity of ink, which is tied on the tip surface. The control of fluid injection using active membrane pumping in chambers is the answer of the problem. The flow rates in channels with the presence of capillary force are analyzed including the cantilever deflection and the control of mass flow rates by deflection of membrane. Finally, in this paper, the membrane deflection using a nano indentation equipment has been experimentally examined.","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"104 1","pages":"1012-1017"},"PeriodicalIF":0.0000,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NEMS.2006.334601","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 6
Abstract
In this paper, flow control of nano fountain pen using active membrane pumping is investigated. DPN (Dip Pen Nano- Lithography) has a shortcoming in which is the need of frequent loading and unloading while coating for broadband patterning. This issue is caused by a limit in quantity of ink, which is tied on the tip surface. The control of fluid injection using active membrane pumping in chambers is the answer of the problem. The flow rates in channels with the presence of capillary force are analyzed including the cantilever deflection and the control of mass flow rates by deflection of membrane. Finally, in this paper, the membrane deflection using a nano indentation equipment has been experimentally examined.