{"title":"Study on Micro-machining by Micro-WEDM","authors":"S. Di, Ruining Huang, G. Chi","doi":"10.1109/NEMS.2006.334857","DOIUrl":null,"url":null,"abstract":"Micro wire electrical discharge machining (Micro-WEDM) has proved to be a versatile micro-machining technology to produce complex part. Therefore, a Micro-WEDM setup is developed to fabricate micro parts. Experiments were done on the micro-WEDM. Experiment analyzing results show that the white layer is no more than 2mum, the surface roughness (Ra) is smaller than 0.1mum, and the surface recast layer's hardness is three or four times higher than the base material. Moreover, micro slot, micro shaped holes, micro bearing bracket, micro gears and micro gear die are machined to check its machining capabilities. Finally, with micro plastic forming method, a high quality micro gear has been fabricated by the micro gear dies machined by micro-WEDM, which indicates that micro parts machined by Micro-WEDM meet the requirements of micro instrument and device","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"19 1","pages":"615-619"},"PeriodicalIF":0.0000,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"24","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NEMS.2006.334857","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 24
Abstract
Micro wire electrical discharge machining (Micro-WEDM) has proved to be a versatile micro-machining technology to produce complex part. Therefore, a Micro-WEDM setup is developed to fabricate micro parts. Experiments were done on the micro-WEDM. Experiment analyzing results show that the white layer is no more than 2mum, the surface roughness (Ra) is smaller than 0.1mum, and the surface recast layer's hardness is three or four times higher than the base material. Moreover, micro slot, micro shaped holes, micro bearing bracket, micro gears and micro gear die are machined to check its machining capabilities. Finally, with micro plastic forming method, a high quality micro gear has been fabricated by the micro gear dies machined by micro-WEDM, which indicates that micro parts machined by Micro-WEDM meet the requirements of micro instrument and device