{"title":"Micro Valve and Chaotic Mixer Driven by Electrorheological Fluid","authors":"X. Niu, Yi-Kuen Lee, Liyu Liu, W. Wen","doi":"10.1109/NEMS.2006.334710","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334710","url":null,"abstract":"We present the successful design and fabrication of push-and-pull micro-valve and micro mixer chips that driven by a kind of nanoparticle based giant electrorheological fluid (GER fluid). Our multilayer chips are fabricated by polydimethylsiloxane (PDMS)-based soft lithography techniques. Fast response time of the GER fluid and the push-and-pull valve design adopted assure fast switching time of the valve less than 10 ms and sound reliability. The giant electrorheological effect of ER fluid used is able to provide high pressure changes in GER control channels, so as to supply perturbations with amplitude big enough to achieve fully chaotic mixing of micro flows in a short channel length","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"21 1","pages":"1254-1257"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86297831","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Application of MEMS Technology to Micro Direct Methanol Fuel Cell","authors":"Xiaowei Liu, Chunguang Suo, Yufeng Zhang, Wangshui Wei, Xuebin Lu, Tang Ding","doi":"10.1109/NEMS.2006.334876","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334876","url":null,"abstract":"In view of micro fuel cells, the silicon processes are employed for microfabrication of the micro direct methanol fuel cell (muDMFC). Using the MEMS technology we have successfully made single muDMFC as small as 8mmtimes8mmtimes3mm. The main reason for the use of MEMS processes is the prospective potential for miniaturization and economical mass production of small fuel cells. The double side deep wet etching for the gas channel and fuel chamber preparation and the formation of porous silicon (PS) layers for electrode supports by electrochemical process are the key technologies to improve the MEMS-based muDMFC. Moreover, for the first time, the fabrication of electro-catalytic electrodes using electroless plating platinum and ruthenium (Pt-Ru) co-deposition method over porous silicon (PS) substrates is introduced. Then the electro-catalytic electrode was characterized using scanning electron microscope (SEM) and energy dispersive X-ray spectrometer (EDX). Using the MEMS technology makes the batch fabrication of muDMFCs much easier and reduces the usage of rare metals","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"16 1","pages":"699-702"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85702945","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Two-Phase Flow in Microchannel Heat Sink with Nearly Uniform Heat Flux Boundary Condition","authors":"Man Lee, L. Cheung, Yi-Kuen Lee, Y. Zohar","doi":"10.1109/NEMS.2006.334888","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334888","url":null,"abstract":"A thermal microsystem, integrated with pressure and temperature microsensors, is fabricated to study convective boiling under nearly uniform heat flux boundary condition. The temperature and pressure distribution along the microchannel is measured correspondingly. The pressure increases with input power when two phase flow develops. A pressure peak appears at the location of liquid-vapor interface region. The transient temperature and pressure fluctuation is also measured. The dominant frequencies of the temperature and pressure fluctuation are the same values at the liquid-vapor interface region and this dominant frequencies increase with input power. Simultaneously, the qualitative visualizations of the evolving flow patterns have been correlated with the quantitative temperature and pressure measurements.","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"81 1","pages":"752-756"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82475198","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"A Study of the Functionalization on Multi-walled Carbon nanotubes","authors":"Chunwei Yang, Xin-guo Hu, Yong Zhang","doi":"10.1109/NEMS.2006.334627","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334627","url":null,"abstract":"A facile approach to the surface oxidation of multi-walled carbon nanotubes (MWCNTs) is presented using oxidation solution to decorating MWCNTs, sonication to promote this effect and increase the population density of surface oxide groups. The sonication short time for MWCNTs oxidation /functionalization is desirable for minimizing structural damage to the MWCNTs that could lead to changes in their properties. The measurement results of XPS, IR and Raman spectrum have verified that a great lot of functional groups had been decorated on MWCNTs. During the MWCNTs oxidation, the hydroxy, carbonyl and carboxy formed on the surface of MWCNTs. MWCNTs treated in the nitric and sulfuric acids had more functional groups than MWCNTs treated in hydrogen peroxide and sulfuric acids","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"37 1","pages":"83-86"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82510728","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
I. Yi, Ju-Ho Kim, Y.J. Choi, C. Kang, Yong-Sang Kim
{"title":"Performances of an Electrochemical Detector using Prussian blue modified Indium Tin Oxide Electrode","authors":"I. Yi, Ju-Ho Kim, Y.J. Choi, C. Kang, Yong-Sang Kim","doi":"10.1109/NEMS.2006.334771","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334771","url":null,"abstract":"An amperometric biosensor based on Prussian blue (PB) modified indium tin oxide (ITO) electrode was developed. The roughness of PB film which affects the electrocatalytic properties of PB film was controlled by varying deposition voltage and time. Atomic force microscopy (AFM) was used to measure the roughness of PB films deposited under various conditions. We used capillary electrophoresis (CE) method to make the analytes flow through the micro channel made of polydimethylsilolxane (PDMS). Compared with sensor using bare ITO electrode, the sensor using PB modified electrode has shown better sensitivity. In addition, we could improve the detection limit of the sensor by depositing smoother PB film","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"81 1","pages":"1384-1387"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83885164","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Mechanical Design of Compliant Parallel Micromanipulators for Nano Scale Manipulation","authors":"Qingsong Xu, Yangmin Li","doi":"10.1109/NEMS.2006.334866","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334866","url":null,"abstract":"As the rapid growing of a wide variety of research and development activities on nanotechnology, ultra-high precision nanopositioners are greatly required for nano scale manipulation. In this paper, the design issues of a compliant parallel micromanipulator (CPM) for nanomanipulation is presented from the mechanical design point of view. A CPM is an integration of parallel and compliant mechanisms, the design considerations of which in terms of flexure joints, actuators, materials and fabrications, even modeling methods are proposed, and as an example, a new type of CPM is designed and its applications are presented for nano scale manipulation. The design guidelines outlined in this paper will be valuable for the development of CPMs applicable to nanomanipulation","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"1 1","pages":"653-657"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81049586","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Chia-Yuan Chen, W. Fang, Chiko Chen, Jing-Tang Yang, P. Lyu
{"title":"Separation of Amino Acids by Aqueous Two-Phase Electrophoresis on the Micro-Pillar Chips","authors":"Chia-Yuan Chen, W. Fang, Chiko Chen, Jing-Tang Yang, P. Lyu","doi":"10.1109/NEMS.2006.334830","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334830","url":null,"abstract":"A micro-pillar chip is proposed and developed to separate the amino acids, phenylalanine and tryptophan, through the aqueous two-phase system (ATPS). The surface properties of micro-pillars, specifically hydrophobicity and hydrophilicity for separation are also investigated. Because their isoelectric points (pI values) are similar, these amino acids are difficult to separate by general extraction techniques; the ATPS is thus adopted in a micro-system to separate these amino acids and only a few micro liters of sample are required. The results reveal that the various surface properties of micro-pillars distinguish the separation mechanisms and efficiency. When the micro-pillar array is constructed in the ATPS, the separation efficiency is improved. Furthermore, the surface of micro-pillars becomes activated from hydrophobic to hydrophilic, and micro-pillars with a hydrophilic surface increase the separation ability without sample residues. Hence separation is improved on incorporating hydrophilic micro-pillars in the ATPS","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"27 1","pages":"513-518"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83580020","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"System-Level Modeling and Design of Microfluidic Concentration Gradient Generators","authors":"Yi Wang, T. Mukherjee, Q. Lin","doi":"10.1109/NEMS.2006.334750","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334750","url":null,"abstract":"This paper presents a systematic modeling and design methodology for microfluidic concentration gradient generators. The generator is decomposed into a system of microfluidic elements with relatively simple geometries. Parameterized models for such elements are analytically developed and hold for general sample concentration profiles and arbitrary flow ratios at the element inlet, hence they are valid for concentration gradient generators that rely on both complete and partial mixing. The element models are then linked through an appropriate set of parameters embedded at the element interfaces to construct a lumped-parameter and systematic representation of the entire generator network. The system model is verified by numerical analysis and experimental data and accurately captures the overall effects of network topologies, element sizes, flow rates and reservoir sample concentrations on the generation of sample concentration gradient. Finally, this modeling methodology is applied to propose a novel and compact microfluidic device that is able to create concentration gradients of complex shapes by juxtaposing simple constituent profiles along the channel width","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"33 1","pages":"1368-1373"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89617576","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Optical Tracking of Multi-walled Carbon Nanotubes by Attaching Functionalized Quantum Dots","authors":"D. Frutiger, Lixin Dong, B. Nelson","doi":"10.1109/NEMS.2006.334675","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334675","url":null,"abstract":"Functionalized quantum dots have been successfully attached to multi-walled carbon nanotubes over carbodiimide-assisted coupling. Characterization in a transmission electron microscope shows the quantum dots are attached mainly at the opened tips and defect sites on the side-walls of nanotubes, suggesting the covalent nature of the bonding and high selectivity to chemically reactive sites. Due to their unique fluorescent properties, the visibility of the nanometer-sized quantum dots under an optical microscope creates the possibility of tracking the motion or morphology change of individual decorated nanotubes in a liquid environment and identifying possible sites for covalent attachment. This enables the handling, tracking, and integration of carbon nanotubes with other nanoparticles for building nano/micro engineered and molecular systems","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"74 1","pages":"1179-1184"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91093397","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
C. Pang, J. Cham, S. Musallam, Y. Tai, J. Burdick, R. Andersen
{"title":"Monolithic Silicon Probes with Flexible Parylene Cables for Neural Prostheses","authors":"C. Pang, J. Cham, S. Musallam, Y. Tai, J. Burdick, R. Andersen","doi":"10.1109/NEMS.2006.334646","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334646","url":null,"abstract":"This work presents the first parylene-insulated silicon probes, which are used for neural prostheses to record high-level cognitive neural signals. With parylene technology, our probes have several advantages compared with the current devices. First, instead of inorganic materials (e.g. silicon dioxide, silicon nitride), the electrodes and conduction traces on the probes are insulated by parylene, an easily-deposited polymer with mechanical flexibility and biocompatibility. As a result, the probes exhibit better electrical and mechanical properties. Second, flexible parylene cables are monolithically integrated with the probes, which arm the probes with very high flexibility to be easily assembled to a high density 3-D array and at the same time provide an ideal method to transmit neural signals through skull during chronic recording. The all dry fabrication process and a 4times4 probe array (64 electrodes) were demonstrated. The probes were successfully tested electrically and mechanically in rat cortex. Neural signals were properly recorded","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"173 1","pages":"1125-1128"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79559558","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}