Application of MEMS Technology to Micro Direct Methanol Fuel Cell

Abstract

In view of micro fuel cells, the silicon processes are employed for microfabrication of the micro direct methanol fuel cell (muDMFC). Using the MEMS technology we have successfully made single muDMFC as small as 8mmtimes8mmtimes3mm. The main reason for the use of MEMS processes is the prospective potential for miniaturization and economical mass production of small fuel cells. The double side deep wet etching for the gas channel and fuel chamber preparation and the formation of porous silicon (PS) layers for electrode supports by electrochemical process are the key technologies to improve the MEMS-based muDMFC. Moreover, for the first time, the fabrication of electro-catalytic electrodes using electroless plating platinum and ruthenium (Pt-Ru) co-deposition method over porous silicon (PS) substrates is introduced. Then the electro-catalytic electrode was characterized using scanning electron microscope (SEM) and energy dispersive X-ray spectrometer (EDX). Using the MEMS technology makes the batch fabrication of muDMFCs much easier and reduces the usage of rare metals