Journal of Vacuum Science & Technology A最新文献

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Microstructural and kinetics analysis of FeB–Fe2B layer grown by pulsed-DC powder-pack boriding on AISI 316 L steel 脉冲直流粉末包硼法在 AISI 316 L 钢上生长的 FeB-Fe2B 层的微观结构和动力学分析
Journal of Vacuum Science & Technology A Pub Date : 2024-07-17 DOI: 10.1116/6.0003774
I. Campos-Silva, J. Cedeño-Velázquez, A. D. Contla-Pacheco, I. Arzate-Vázquez, L. E. Castillo-Vela, M. Olivares-Luna, J. L. Rosales-Lopez, F. P. Espino-Cortes
{"title":"Microstructural and kinetics analysis of FeB–Fe2B layer grown by pulsed-DC powder-pack boriding on AISI 316 L steel","authors":"I. Campos-Silva, J. Cedeño-Velázquez, A. D. Contla-Pacheco, I. Arzate-Vázquez, L. E. Castillo-Vela, M. Olivares-Luna, J. L. Rosales-Lopez, F. P. Espino-Cortes","doi":"10.1116/6.0003774","DOIUrl":"https://doi.org/10.1116/6.0003774","url":null,"abstract":"In this study, novel findings were obtained regarding the influence of a 10 A current intensity on the growth of an FeB–Fe2B layer during pulsed-DC powder-pack boriding. Boride layer formation was carried out on AISI 316 L steel at 1123–1223 K for different exposure times at each temperature, considering 10 s polarity inversion cycles. The boride layer was characterized by x-ray diffraction and high-speed Berkovich nanoindentation, the latter being used to determine the hardness and reduced Young’s modulus mappings along the depth of the layer-substrate system. Moreover, the growth kinetics of the FeB–Fe2B layer on the steel’s surface was modeled using the heat balance integral method (HBIM). This involved transforming Fick’s second law into ordinary differential equations over time, assuming a quadratic boron concentration profile in space to determine the B diffusion coefficients in FeB and Fe2B, respectively. From the Arrhenius relationship, the B activation energies in the boride layer were estimated considering the contribution of the electromigration effect; the results showed an approximately 30% reduction compared to the values obtained in the conventional powder-pack boriding for AISI 316 L steel. Finally, the theoretical layer thickness obtained by the HBIM demonstrated an error of no more than 5% against the experimental FeB and FeB + Fe2B layer thickness values.","PeriodicalId":509398,"journal":{"name":"Journal of Vacuum Science & Technology A","volume":" 3","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-07-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141831401","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Studies of electrical resistivity and magnetic properties of CuFe and CuNiFe films prepared by magnetron sputtering 磁控溅射法制备的铜铁和铜镍铁薄膜的电阻率和磁性能研究
Journal of Vacuum Science & Technology A Pub Date : 2024-06-04 DOI: 10.1116/6.0003684
Muhammad Saqib Shahzad, Xiao Wang, Yinglin Hu, Xiaona Li, Qiao Jiang, Min Li, Zhumin Li, Renwei Liu, Rui Zheng, Chuang Dong
{"title":"Studies of electrical resistivity and magnetic properties of CuFe and CuNiFe films prepared by magnetron sputtering","authors":"Muhammad Saqib Shahzad, Xiao Wang, Yinglin Hu, Xiaona Li, Qiao Jiang, Min Li, Zhumin Li, Renwei Liu, Rui Zheng, Chuang Dong","doi":"10.1116/6.0003684","DOIUrl":"https://doi.org/10.1116/6.0003684","url":null,"abstract":"The Cu-Fe binary alloys exhibit severe elemental segregation, resulting in an inhomogeneous microstructure, which leads to differences in microregion magnetic properties, thus affecting their application. Employing magnetron sputtering to produce films is advantageous for achieving a consistent dispersion of Fe within the Cu matrix. Furthermore, the addition of Ni will result in a more uniform distribution of Fe and facilitate the formation of the ferromagnetic Ni3Fe phase. In this study, Cu100−xFex and Cu100−x(Ni3/4Fe1/4)x series films were prepared by magnetron sputtering technique. The magnetic properties of films are closely related to their ferromagnetic element content. An increase in the content of ferromagnetic elements leads to an improvement in the saturation magnetization (MS) strength and a decrease in the coercivity (HC). The formation of Fe-Fe pairs is more favorable for magnetic properties compared to Ni-Fe pairs. Meanwhile, by comparing with bulk alloys, the distribution of the magnetic elements severely affects the magnetic properties. Moreover, the resistivity of Cu100−xFex films (20.3–96.7 μΩ cm) is much higher than that of Cu100−x(Ni3/4Fe1/4)x films (15.6–60.6 μΩ cm), which depends on the magnetic properties. This study systematically analyzes the effect of the content and distribution of magnetic elements on magnetic and electrical properties.","PeriodicalId":509398,"journal":{"name":"Journal of Vacuum Science & Technology A","volume":"6 4","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-06-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141267048","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Third harmonic generation in monoclinic 2D KNbO3 with high power endurance 具有高功率耐久性的单斜二维 KNbO3 中的三次谐波生成
Journal of Vacuum Science & Technology A Pub Date : 2024-05-23 DOI: 10.1116/5.0205350
Fei Zhou, Yang Li, Haizeng Song, Xianhua Wei, Bo Dai
{"title":"Third harmonic generation in monoclinic 2D KNbO3 with high power endurance","authors":"Fei Zhou, Yang Li, Haizeng Song, Xianhua Wei, Bo Dai","doi":"10.1116/5.0205350","DOIUrl":"https://doi.org/10.1116/5.0205350","url":null,"abstract":"Two-dimensional (2D) KNbO3 is prepared by topotactic transition from 2D KNbO2 at 530 °C in air, which has a single spontaneous polarization (Ps) direction along the [101¯]pc zone axis. The strong Ps anisotropy leads to a negligible second harmonic generation of 2D KNbO3 with laser vertically incident on the sample. However, a strong third harmonic generation is observed. The effective third-order susceptibility of 2D KNbO3 with the order of ∼10−19 m2 V−2 is estimated by comparing it with the χeff(3) of graphene. The robust power tolerance of 2D KNbO3 endows it great potential in the application of high-power third harmonic generation 2D devices.","PeriodicalId":509398,"journal":{"name":"Journal of Vacuum Science & Technology A","volume":"53 5","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-05-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141107442","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Corrosion resistance and conductivity of CrN, CrAlN, and CrTiN coatings applied to bipolar plates for proton exchange membrane fuel cells 应用于质子交换膜燃料电池双极板的 CrN、CrAlN 和 CrTiN 涂层的耐腐蚀性和导电性
Journal of Vacuum Science & Technology A Pub Date : 2024-05-23 DOI: 10.1116/6.0003601
Qiang Chen, Mingxu Su, Dan Liang, Qiong Zhou, Biao Huang, E. Zhang
{"title":"Corrosion resistance and conductivity of CrN, CrAlN, and CrTiN coatings applied to bipolar plates for proton exchange membrane fuel cells","authors":"Qiang Chen, Mingxu Su, Dan Liang, Qiong Zhou, Biao Huang, E. Zhang","doi":"10.1116/6.0003601","DOIUrl":"https://doi.org/10.1116/6.0003601","url":null,"abstract":"In order to improve the corrosion resistance and conductivity of 316L stainless steel bipolar plates used for proton exchange membrane fuel cells, three Cr-containing nitride coatings were deposited on 316L stainless steel by multiarc ion plating. First, the microstructure, composition, and contact angle of the three coatings were systematically investigated. Then, electrochemical impedance spectroscopy, potentiodynamic polarization, potentiostatic polarization (PSP), and interfacial contact resistance (ICR) of the three coatings were also fully examined. The results revealed that CrN coating has the highest contact angle of 98.26°, indicating its superior hydrophobicity. Additionally, CrN coating performed the best corrosion resistance with the highest corrosion potential of 0.31 V, the lowest corrosion current density of 2.28 × 10−7 A cm−2, and the largest resistance. Furthermore, CrN coating showed the lowest current density during PSP tests and the smallest ICR value after corrosion. The superior corrosion resistance of CrN coating is mainly attributed to its decreased pore density caused by vacancylike defects and its uniform structure. This article provided evidence for the potential application of CrN coating to bipolar plates.","PeriodicalId":509398,"journal":{"name":"Journal of Vacuum Science & Technology A","volume":"8 4","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-05-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141105191","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Effect of rare earth element Y content on microstructure, magnetic properties, and electrochemical properties of the as-annealed FeCoNiAl0.2Yx high-entropy alloys 稀土元素 Y 含量对退火铁钴镍铝 0.2Yx 高熵合金微观结构、磁性能和电化学性质的影响
Journal of Vacuum Science & Technology A Pub Date : 2024-05-23 DOI: 10.1116/6.0003597
Shaojie Cui, Sheng Lei, Yun Li, Junpeng Zhang, Shanshan Hu, Zhengwei Xue
{"title":"Effect of rare earth element Y content on microstructure, magnetic properties, and electrochemical properties of the as-annealed FeCoNiAl0.2Yx high-entropy alloys","authors":"Shaojie Cui, Sheng Lei, Yun Li, Junpeng Zhang, Shanshan Hu, Zhengwei Xue","doi":"10.1116/6.0003597","DOIUrl":"https://doi.org/10.1116/6.0003597","url":null,"abstract":"FeCoNi high-entropy alloy (HEA) is widely used in the aerospace and chemical industry. However, the strength and corrosion resistance of the alloy still need to be improved. In this paper, FeCoNiAl0.2Yx (x = 0, 0.05, 0.1, 0.2, and 0.3 in mole ratio) high entropy alloys with different contents of rare earth (RE) element yttrium (Y) were prepared by the vacuum arc melting method, and then the alloys were subjected to annealing treatment at 800 °C/2h. The microstructure, hardness, magnetism, and corrosion performance of FeCoNiAl0.2Yx HEAs in the annealed state with different contents of element Y were analyzed. The results show that the annealed FeCoNiAl0.2Yx HEAs without the addition of element Y and after the addition of element Y both were composed of a face-centered cubic phase. The alloy showed a dendritic structure inside. The element Y was solidly dissolved in the alloys to refine the microstructure of the alloys, and the dendrites were gradually refined with the addition of Y. The Y element caused the phenomenon of lattice distortion inside the alloys, which led to the increase in the alloys’ hardness. The alloy with x = 0.2 showed the greatest exchange of magnetic atoms and the alloy with x = 0.05 showed the lowest coercivity. The alloy with x = 0.1 showed the lowest self-corrosion current density, the broadest passivation zone, the densest dendrites, the smallest grain spacing, and the weakest tendency for intergranular corrosion. The present study shows that the introduction of element Y improves the microstructural morphology, hardness, magnetism, and corrosion properties of FeCoNiAl0.2Yx HEAs in the annealed state.","PeriodicalId":509398,"journal":{"name":"Journal of Vacuum Science & Technology A","volume":"5 4","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-05-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141104880","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Continuous wave laser-assisted evaporation of halide perovskite thin films from a single stoichiometric source 从单一化学计量源连续波激光辅助蒸发卤化物包晶体薄膜
Journal of Vacuum Science & Technology A Pub Date : 2024-05-22 DOI: 10.1116/6.0003607
Naga Prathibha Jasti, S. Tirosh, Ansuman Halder, Eti Teblum, David Cahen
{"title":"Continuous wave laser-assisted evaporation of halide perovskite thin films from a single stoichiometric source","authors":"Naga Prathibha Jasti, S. Tirosh, Ansuman Halder, Eti Teblum, David Cahen","doi":"10.1116/6.0003607","DOIUrl":"https://doi.org/10.1116/6.0003607","url":null,"abstract":"We report continuous wave laser-assisted evaporation (CLE), a thin film deposition technique that yields phase-pure and stoichiometric thin films of halide perovskites (HaPs) from stoichiometric HaP targets. We use methylammonium lead bromide (MAPbBr3) to demonstrate the ability to grow with CLE well-oriented and smooth thin films on various substrates. Further, we show the broader applicability of CLE by preparing films of several other 3D HaP compounds, viz., methylammonium lead iodide, formamidinium lead bromide, and a 2D one, butylammonium lead iodide. CLE is a single-source, solvent-free, room-temperature process that needs only roughing pump vacuum; it allows the deposition of hybrid organic-inorganic compound films without needing post-thermal treatment or an additional organic precursor source to yield the intended product. The resulting films are polycrystalline and highly oriented. All these features, and the fact that one stoichiometric source serves as the target, make for an attractive, potentially scalable dry deposition approach.","PeriodicalId":509398,"journal":{"name":"Journal of Vacuum Science & Technology A","volume":"38 24","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141109713","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Lattice defects distribution of H+ implanted 4H-SiC investigated by deep-ultraviolet Raman spectroscopy 利用深紫外拉曼光谱研究 H+ 植入 4H-SiC 的晶格缺陷分布
Journal of Vacuum Science & Technology A Pub Date : 2024-05-22 DOI: 10.1116/6.0003643
Gengyu Wang, Wenbo Luo, Dailei Zhu, Yuedong Wang, Y. Shuai, Chuangui Wu, W. Zhang
{"title":"Lattice defects distribution of H+ implanted 4H-SiC investigated by deep-ultraviolet Raman spectroscopy","authors":"Gengyu Wang, Wenbo Luo, Dailei Zhu, Yuedong Wang, Y. Shuai, Chuangui Wu, W. Zhang","doi":"10.1116/6.0003643","DOIUrl":"https://doi.org/10.1116/6.0003643","url":null,"abstract":"The defects distribution of ion-implanted SiC is a key to understanding changes in the electronic, optical, and mechanical properties of SiC devices. However, accessing the defect distribution within the sample primarily relies on simulation, yet a number of factors remain unaccounted for in the simulation results, ultimately resulting in numerous inaccuracies. To address this issue, a defect distribution investigation method based on the combination of argon ion etching and deep-ultraviolet (DUV) Raman spectroscopy has been established. The defects at different depths were exposed to the surface by etching, and the crystal quality of the surface layer was assessed using Raman spectra with a 266 nm DUV laser. The spectra for the H+ implanted 4H-SiC showed that the full width at half maximum of the transverse optical mode at 781 cm−1 and the longitudinal optical mode at 965 cm−1 exhibited an increasing and then decreasing trend, approximate to a Gaussian distribution. These results were confirmed with the transmission electron microscopy cross-sectional image and SRIM-2013 simulation. The establishment of this analytical investigation method can be widely applied to other semiconductor materials, without the need for electrodes and sample contamination.","PeriodicalId":509398,"journal":{"name":"Journal of Vacuum Science & Technology A","volume":"26 11","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141109974","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Effects of different element coatings on the interface characteristics and thermal conductivity of vacuum-sintered diamond/Cu composites 不同元素涂层对真空烧结金刚石/铜复合材料界面特性和热导率的影响
Journal of Vacuum Science & Technology A Pub Date : 2024-05-20 DOI: 10.1116/6.0003600
Q. W. Zhou, L. Bolzoni, F. Yang
{"title":"Effects of different element coatings on the interface characteristics and thermal conductivity of vacuum-sintered diamond/Cu composites","authors":"Q. W. Zhou, L. Bolzoni, F. Yang","doi":"10.1116/6.0003600","DOIUrl":"https://doi.org/10.1116/6.0003600","url":null,"abstract":"The interface structure holds paramount significance in enhancing the thermal conductivity (TC) of diamond/Cu composites, positioning them as a promising candidate for thermal management applications. Diamond/Cu composites (55% volume fraction) with three distinct interfacial carbides were fabricated via sintering at 950 °C using Cu and diamond powder coated with Ti, Cr, and W. During the sintering process, interfacial layers of TiC, Cr3C2, and W2C carbides formed at the composite interfaces. The findings reveal that the interfacial bonding strength among these three composites adheres to the following hierarchy: Ti-D/Cu exceeds Cr-D/Cu, which surpasses W-D/Cu. This hierarchy stems from the varying degrees of carbide coating integrity attained at 950 °C. Furthermore, the coating morphology differs on the diamond-{100} and -{111} crystal planes. Notably, among the interfacial carbides, TiC coating exhibits the most compact and contiguous structure postsintering. Consequently, Ti-D/Cu composites boast the highest density, reaching 95.49%, along with a remarkable TC of 317.66 W/mK. A comparative analysis of the fracture morphology of these composites reveals that Ti-D/Cu, characterized by the most robust interfacial bonding, exhibits a intransgranular fracture mechanism. This study offers profound insights and theoretical implications for the interface design of diamond/Cu composites, paving the way for their effective utilization in heat dissipation materials.","PeriodicalId":509398,"journal":{"name":"Journal of Vacuum Science & Technology A","volume":"61 8","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-05-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141123410","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Direct imaging of the magnetoelectric coupling in multiferroic BaTiO3/La0.9Ba0.1MnO3 多铁性 BaTiO3/La0.9Ba0.1MnO3 中磁电耦合的直接成像
Journal of Vacuum Science & Technology A Pub Date : 2024-02-16 DOI: 10.1116/6.0003005
F. Stramaglia, G. Panchal, L. Tovaglieri, C. Lichtensteiger, F. Nolting, C. Vaz
{"title":"Direct imaging of the magnetoelectric coupling in multiferroic BaTiO3/La0.9Ba0.1MnO3","authors":"F. Stramaglia, G. Panchal, L. Tovaglieri, C. Lichtensteiger, F. Nolting, C. Vaz","doi":"10.1116/6.0003005","DOIUrl":"https://doi.org/10.1116/6.0003005","url":null,"abstract":"We report the direct imaging of the magnetic response of a 4.8 nm La0.9Ba0.1MnO3 film to the voltage applied across a 5 nm BaTiO3 film in a BaTiO3/La0.9Ba0.1MnO3 multiferroic heterostructure using x-ray photoemission electron microscopy (XPEEM). Specifically, we have written square ferroelectric domains on the BaTiO3 layer with an atomic force microscope in contact mode and imaged the corresponding magnetic contrast through the x-ray circular dichroic effect at the Mn L-edge with high spatial lateral resolution using XPEEM. We find a sudden decrease in the magnetic contrast for positive writing voltages above +6 V associated with the switching of the ferroelectric polarization of the BaTiO3, consistent with the presence of a magnetoelectric effect through changes in the hole carrier density at the BaTiO3/La0.9Ba0.1MnO3 interface. Temperature-dependent measurements show a decrease in the Curie temperature and magnetic moment in the areas where a positive voltage above +6 V was applied, corresponding to the hole depletion state and suggesting the onset of a spin-canted state of bulk La0.9Ba0.1MnO3. Our results are the first direct imaging of magnetoelectric coupling in such multiferroic heterostructure.","PeriodicalId":509398,"journal":{"name":"Journal of Vacuum Science & Technology A","volume":"24 5","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-02-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139960848","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Preparation and tribological properties of Ni/DLC multilayer film 镍/DLC 多层薄膜的制备和摩擦学特性
Journal of Vacuum Science & Technology A Pub Date : 2024-02-15 DOI: 10.1116/6.0003431
Yanxia Wu, Jiawei Qi, Ke Li, Xiaoyan Zhou, Shengwang Yu, Caili Zhang, Ying Liu
{"title":"Preparation and tribological properties of Ni/DLC multilayer film","authors":"Yanxia Wu, Jiawei Qi, Ke Li, Xiaoyan Zhou, Shengwang Yu, Caili Zhang, Ying Liu","doi":"10.1116/6.0003431","DOIUrl":"https://doi.org/10.1116/6.0003431","url":null,"abstract":"Ni was selected as a transition layer and sublayer in the diamondlike carbon-based multilayered film with varied bilayer periods (from 228 to 970 nm) prepared by magnetron sputtering. The reaction between Ni- and C-containing particles was discussed, and the influences of bilayer periods on the structure and morphology, accompanied with the frictional behaviors at different loading forces (2 and 5 N), as well as the field emission properties were investigated. The results showed that Ni grew in the (111) plane, and there was no Ni–C bond or graphene formed in the film because of the relatively lower energy during deposition. Moreover, the content of sp2C in the film, the hardness, and the field emission performance exhibited an initial increase followed by a subsequent decrease with increasing bilayer periods. However, the frictional coefficient decreased owing to more graphitization with an increase of the applied load. Particularly noteworthy was that the film possessed a bilayer period of 710 nm, displayed a compact structure with a smaller grain size, and showed reduced sp2C content in the role of Ni. This resulted in sustained lower surface roughness, heightened hardness, decreased coefficient of friction, and a smaller opening electric field.","PeriodicalId":509398,"journal":{"name":"Journal of Vacuum Science & Technology A","volume":"30 12","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-02-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"139962754","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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