Journal of Micro and Nano-Manufacturing最新文献

Transfer Learning For Predictive Quality In Laser-Induced Plasma Micro-Machining 激光诱导等离子体微加工中预测质量的迁移学习

Journal of Micro and Nano-Manufacturing Pub Date : 2023-11-07 DOI: 10.1115/1.4064010

Mengfei Chen, Rajiv Malhotra, Weihong (Grace) Guo

{"title":"Transfer Learning For Predictive Quality In Laser-Induced Plasma Micro-Machining","authors":"Mengfei Chen, Rajiv Malhotra, Weihong (Grace) Guo","doi":"10.1115/1.4064010","DOIUrl":"https://doi.org/10.1115/1.4064010","url":null,"abstract":"Abstract In laser-induced plasma micro-machining (LIPMM), a focused, ultrashort pulsed laser beam creates a highly localized plasma zone within a transparent liquid dielectric. When the beam intensity is greater than the breakdown threshold in the dielectric media, plasma is formed which is then used to ablate the workpiece. This paper aims to facilitate in-situ process monitoring and quality prediction for LIPMM by developing a deep learning model to (1) understand the relationship between acoustic emission data and quality of micro-machining with LIPMM, (2) transfer such understanding across different process parameters, and (3) predict quality accurately by fine-tuning models with a smaller dataset. Experiments and results show that the relationship learned from one process parameter can be transferred to other parameters, requiring lesser data and lesser computational time for training the model. We investigate the feasibility of transfer learning and compare the performance of various transfer learning models: different input features, different CNN structures, and the same structure with different fine-tuned layers. The findings provide insights into how to design effective transfer learning models for manufacturing applications.","PeriodicalId":45459,"journal":{"name":"Journal of Micro and Nano-Manufacturing","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2023-11-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"135432995","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Simultaneous Micro- and Nanoscale Silicon Fabrication by Metal-Assisted Chemical Etch 金属辅助化学蚀刻同时制备微纳米级硅

IF 1

Journal of Micro and Nano-Manufacturing Pub Date : 2023-03-21 DOI: 10.1115/1.4062167

Raul Lema Galindo, P. Ajay, S. V. Sreenivasan

{"title":"Simultaneous Micro- and Nanoscale Silicon Fabrication by Metal-Assisted Chemical Etch","authors":"Raul Lema Galindo, P. Ajay, S. V. Sreenivasan","doi":"10.1115/1.4062167","DOIUrl":"https://doi.org/10.1115/1.4062167","url":null,"abstract":"\u0000 Simultaneous micro and nanoscale etching of silicon on a wafer-scale is nowadays performed using plasma etching techniques. These plasma techniques, however, suffer from low throughput due to Aspect-Ratio Dependent Etch (ARDE) rate, etch lag from changes in feature size, loading effects from increased etch area, and undesirable surface characteristics such as sidewall taper and scalloping, which are particularly problematic at the nanoscale and can affect the etch uniformity. Additionally, the hardware required for plasma etching can be very expensive. A potential alternative, which addresses the above issues with plasma etching is Metal Assisted Chemical Etch (MacEtch). To date, however, an integrated micro and nanoscale MacEtch process, which has uniform and clean (i.e. without nanowire-like defects in microscale areas) etch front has not been presented in the literature. In this work, we present for the first time a feasible process flow for simultaneous micro and nanoscale silicon etching without nanowire-like defects, which we call Integrated Micro- and Nanoscale MacEtch (IMN-MacEtch). Successful etching of silicon features ranging from 100 nm to 100 µm was achieved with etch rates of about 1.8 µm/min in a single step to achieve features with an Aspect Ratio (AR) ~18:1. We thus conclude that the process represents a feasible alternative to current dry etch methods for patterning feature sizes spanning three orders of magnitude.","PeriodicalId":45459,"journal":{"name":"Journal of Micro and Nano-Manufacturing","volume":null,"pages":null},"PeriodicalIF":1.0,"publicationDate":"2023-03-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"44345368","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Thermodynamic Evaluation of Electroosmotic Peristaltic Pumping for Shear-Thinning Fluid Flow 剪切减薄流体电渗流蠕动泵送的热力学评价

IF 1

Journal of Micro and Nano-Manufacturing Pub Date : 2023-03-21 DOI: 10.1115/1.4062168

S. Noreen, M. Zahra

引用次数: 0

Electric-field and Mechanical Vibration-assisted Atomic Force Microscope (AFM)-based Nanopatterning 基于电场和机械振动辅助原子力显微镜（AFM）的纳米图案

IF 1

Journal of Micro and Nano-Manufacturing Pub Date : 2023-01-23 DOI: 10.1115/1.4056731

Huimin Zhou, Yingchun Jiang, C. Ke, Jia Deng

{"title":"Electric-field and Mechanical Vibration-assisted Atomic Force Microscope (AFM)-based Nanopatterning","authors":"Huimin Zhou, Yingchun Jiang, C. Ke, Jia Deng","doi":"10.1115/1.4056731","DOIUrl":"https://doi.org/10.1115/1.4056731","url":null,"abstract":"\u0000 Atomic force microscope (AFM)-based nanopatterning is a cost-effective set of techniques to fabricate nanostructures with arbitrary shapes. However, existing AFM-based nanopatterning approaches have limitations in the patterning resolution and efficiency. Minimum feature size and nanopatterning performance in the mechanical force-induced process are limited by the radius and sharpness of the AFM tip. Electric-field-assisted atomic force microscope (E-AFM) nanolithography can fabricate nanopatterns with features smaller than the tip radius, but it is very challenging to find the appropriate input parameter window because the applicable tip bias range for success nanopatterning in E-AFM process is typically very small. Moreover, the small tip bias range often varies due to the variations in the tip geometry, tip radius, and tip conductive coating thickness, which causes difficult nanopatterning implementation. In this paper, we demonstrate a novel electric-field and mechanical vibration-assisted AFM-based nanofabrication approach, which enables high-resolution (sub-10 nm towards sub-5nm) and high-efficiency nanopatterning processes. The integration of in-plane vibration with the electric field increases the patterning speed, broadens the selectable ranges of applied voltages, and reduces the minimum tip bias required for nanopatterning as compared with E-AFM process, which significantly increases the versatility and capability of AFM-based nanopatterning and effectively avoids the tip damage.","PeriodicalId":45459,"journal":{"name":"Journal of Micro and Nano-Manufacturing","volume":null,"pages":null},"PeriodicalIF":1.0,"publicationDate":"2023-01-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"44753173","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Fabrication of Bioinspired Micro/nano-textured Surfaces Through Scalable Roll Coating Manufacturing 利用可伸缩滚涂工艺制备仿生微/纳米纹理表面

IF 1

Journal of Micro and Nano-Manufacturing Pub Date : 2023-01-23 DOI: 10.1115/1.4056732

B. Black, S. Chockalingam, Md. Didarul Islam, Sipan Liu, Himendra Perera, Saad A Khan, J. Ryu

{"title":"Fabrication of Bioinspired Micro/nano-textured Surfaces Through Scalable Roll Coating Manufacturing","authors":"B. Black, S. Chockalingam, Md. Didarul Islam, Sipan Liu, Himendra Perera, Saad A Khan, J. Ryu","doi":"10.1115/1.4056732","DOIUrl":"https://doi.org/10.1115/1.4056732","url":null,"abstract":"\u0000 Bioinspired, micro/nano-textured surfaces have a variety of applications including superhydrophobicity, self-cleaning, anti-icing, anti-biofouling, and drag reduction. In this paper, a template-free and scalable roll coating process is studied for fabrication of micro/nano-scale topographies surfaces. These micro/nano-scale structures are generated with viscoelastic polymer nanocomposites and derived by controlling ribbing instabilities in forward roll coating. The relationship between process conditions and surface topography is studied in terms of shear rate, capillary number, and surface roughness parameters (e.g., Wenzel factor and the density of peaks). For a given shear rate, the sample roughness increased with a higher capillary number until a threshold point. Similarly, for a given capillary number, the roughness increased up to a threshold range associated with shear rate. The optimum range of the shear rate and the capillary number was found to be 40-60 s-1 and 4.5×105- 6×105, respectively. This resulted in a maximum Wenzel roughness factor of 1.91, a peak density of 3.94×104 (1/mm2), and a water contact angle (WCA)of 128°.","PeriodicalId":45459,"journal":{"name":"Journal of Micro and Nano-Manufacturing","volume":null,"pages":null},"PeriodicalIF":1.0,"publicationDate":"2023-01-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"45384847","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Manufacturing Processes of Implantable Microelectrode Array for In Vivo Neural Electrophysiological Recordings and Stimulation: A State-Of-the-Art Review. 用于体内神经电生理记录和刺激的可植入微电极阵列的制造工艺：最新技术综述。

IF 1

Journal of Micro and Nano-Manufacturing Pub Date : 2022-12-01 Epub Date: 2023-10-09 DOI: 10.1115/1.4063179

Dongyang Yi, Yao Yao, Yi Wang, Lei Chen

{"title":"Manufacturing Processes of Implantable Microelectrode Array for In Vivo Neural Electrophysiological Recordings and Stimulation: A State-Of-the-Art Review.","authors":"Dongyang Yi, Yao Yao, Yi Wang, Lei Chen","doi":"10.1115/1.4063179","DOIUrl":"10.1115/1.4063179","url":null,"abstract":"<p><p>Electrophysiological recording and stimulation of neuron activities are important for us to understand the function and dysfunction of the nervous system. To record/stimulate neuron activities as voltage fluctuation extracellularly, microelectrode array (MEA) implants are a promising tool to provide high temporal and spatial resolution for neuroscience studies and medical treatments. The design configuration and recording capabilities of the MEAs have evolved dramatically since their invention and manufacturing process development has been a key driving force for such advancement. Over the past decade, since the White House Brain Research Through Advancing Innovative Neurotechnologies (BRAIN) Initiative launched in 2013, advanced manufacturing processes have enabled advanced MEAs with increased channel count and density, access to more brain areas, more reliable chronic performance, as well as minimal invasiveness and tissue reaction. In this state-of-the-art review paper, three major types of electrophysiological recording MEAs widely used nowadays, namely, microwire-based, silicon-based, and flexible MEAs are introduced and discussed. Conventional design and manufacturing processes and materials used for each type are elaborated, followed by a review of further development and recent advances in manufacturing technologies and the enabling new designs and capabilities. The review concludes with a discussion on potential future directions of manufacturing process development to enable the long-term goal of large-scale high-density brain-wide chronic recordings in freely moving animals.</p>","PeriodicalId":45459,"journal":{"name":"Journal of Micro and Nano-Manufacturing","volume":null,"pages":null},"PeriodicalIF":1.0,"publicationDate":"2022-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10583290/pdf/jmnm-23-1024_041001.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"49683377","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

The Effect of Speed-Varying Micro-Cutting Tool Dynamics on Stability During High Speed Micromilling of Ti6Al4V 高速微铣削Ti6Al4V时变速微刀具动力学对稳定性的影响

IF 1

Journal of Micro and Nano-Manufacturing Pub Date : 2022-11-11 DOI: 10.1115/1.4056215

G. S., B. Panigrahi, Kundan K. Singh

{"title":"The Effect of Speed-Varying Micro-Cutting Tool Dynamics on Stability During High Speed Micromilling of Ti6Al4V","authors":"G. S., B. Panigrahi, Kundan K. Singh","doi":"10.1115/1.4056215","DOIUrl":"https://doi.org/10.1115/1.4056215","url":null,"abstract":"\u0000 Chatter free machining is necessary in micromilling to avoid the catastrophic failure of micro-end mill. The accuracy of the prediction of chatter free machining condition in high speed micromilling has been improved in present work by including speed varying micro-end mill dynamics. An optimum design of exponential window has been devised to remove the unwanted spindle dynamics from the displacement signal to construct the speed dependent frequency response function (FRF) of micro-end mill. The stiffness of the micro-end mill has been found to be increasing with increase in spindle speed and the natural frequency of the micro-end mill has been found to be changing with change in spindle speeds. The cutting velocity-chip load dependent cutting coefficients has been included to predict the stability using Nyquist criterion. The predicted stability lobe with speed varying micro-end mill dynamics has increased chatter free depth of cut significantly compared to the chatter free depth of cut predicted with static micro-end mill dynamics. The increase in depth of cut with speed varying dynamics has been found to be 28% at 20000 rpm, 150% at 52000 rpm and 250% at 70000 rpm. A critical value of acceleration of the workpiece has been identified for chatter onset detection and it has been validated with machined surface image analysis. The magnitude of acceleration in both feed and normal to feed direction has been characterized to analyze the effect of spindle speed and depth of cut on the vibration of workpiece.","PeriodicalId":45459,"journal":{"name":"Journal of Micro and Nano-Manufacturing","volume":null,"pages":null},"PeriodicalIF":1.0,"publicationDate":"2022-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"41331114","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

Fabrication of Micro-channels On Biomaterial Ti-6Al-4V ELI Using Micro Abrasive Jet Machining 微磨料射流在生物材料Ti-6Al-4V ELI上制备微通道

IF 1

Journal of Micro and Nano-Manufacturing Pub Date : 2022-10-17 DOI: 10.1115/1.4055991

Anu Tomy, S. Somashekhar

引用次数: 0

Metal Assisted Chemical Etch of Polycrystalline Silicon 金属辅助化学蚀刻多晶硅

IF 1

Journal of Micro and Nano-Manufacturing Pub Date : 2022-08-30 DOI: 10.1115/1.4055401

Crystal Barrera, P. Ajay, Akhila Mallavarapu, Mark Hrdy, S. V. Sreenivasan

引用次数: 0

Pulsed Power Supply Superposed with RF Oscillating Wave for the Improvement of Micro EDM Process 脉冲电源与射频振荡波叠加改善微细电火花加工工艺

IF 1

Journal of Micro and Nano-Manufacturing Pub Date : 2022-07-13 DOI: 10.1115/1.4054974

Peiyao Cao, H. Tong, Yong Li

引用次数: 1