P. Kehayias, E. Levine, A. Rodarte, J. Walraven, A. Mounce
{"title":"Electronics Failure Analysis Demonstrations using a Quantum Diamond Microscope","authors":"P. Kehayias, E. Levine, A. Rodarte, J. Walraven, A. Mounce","doi":"10.31399/asm.cp.istfa2022p0007","DOIUrl":"https://doi.org/10.31399/asm.cp.istfa2022p0007","url":null,"abstract":"\u0000 One approach for finding faults in integrated circuits (ICs) is magnetic imaging, where we map the magnetic fields emitted by internal currents in the device and use this knowledge to infer the current paths and fault locations. This gives us access to information about the IC internal properties without needing voltage probes, as the magnetic fields are unimpeded by opaque insulating and conducting layers. Magnetic imaging benefits from optimizing the spatial resolution and minimizing the standoff distance between the magnetic sensor and the circuit, motivating new experimental approaches that excel at these attributes. In this work, we apply the quantum diamond microscope (QDM) instrument to example failure analysis situations, building on our previous work using the QDM to interrogate the internal states of commercial ICs to achieve micrometer-scale spatial resolution and standoff distance.","PeriodicalId":417175,"journal":{"name":"International Symposium for Testing and Failure Analysis","volume":"51 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115755098","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Failure and Thermal Dissipation Analysis with Infrared Thermography","authors":"Stephan R. Larmann","doi":"10.31399/asm.cp.istfa2022tph1","DOIUrl":"https://doi.org/10.31399/asm.cp.istfa2022tph1","url":null,"abstract":"\u0000 This presentation is a pictorial overview on the implementation of lock in thermography, the various types of images that can be obtained, and the interpretation of the results. It also includes a refresher on the use of discrete Fourier transforms (DFT) in signal processing.","PeriodicalId":417175,"journal":{"name":"International Symposium for Testing and Failure Analysis","volume":"58 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126385588","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Failure Analysis Challenges for Chip Scale Packages (2022 Update)","authors":"Susan X. Li","doi":"10.31399/asm.cp.istfa2022tpr1","DOIUrl":"https://doi.org/10.31399/asm.cp.istfa2022tpr1","url":null,"abstract":"\u0000 This presentation provides an overview of chip-scale packages (CSPs) and the challenges they create for failure analysis. It begins with a review of stacked, multichip, and wafer-level packages, using images and illustrations to highlight complexities. It then presents examples of package-level failure mechanisms including various forms of cracking, inadvertent wire bond contact, and die-edge chipping. It likewise assesses die-level analysis challenges and provides practical solutions. The presentation also includes several case studies and describes new and emerging challenges.","PeriodicalId":417175,"journal":{"name":"International Symposium for Testing and Failure Analysis","volume":"40 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126702024","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Inspection of Charge Effect on Metal Layer by Using SCM","authors":"Gyubaek Lee, Da-Hee Park, Minjung Kim","doi":"10.31399/asm.cp.istfa2022p0355","DOIUrl":"https://doi.org/10.31399/asm.cp.istfa2022p0355","url":null,"abstract":"\u0000 The importance of charging damage grows as the IC industry continues downward scaling. It was found that electrical test on metal pad to check contact failure, layer connection and resistance caused charging damage as serious as plasma charging. As for the side effect of it, DC charge is accumulated on the metal TEG, which causes some failure such as incomplete etch problems in the next metal fabrication. This paper provides that charge effect on metal surface is able to be verified by Scanning Capacitance Microscope (SCM). SCM has been used to analyze carrier trap on semiconductor layer in 2D mapping image as well as dopant distribution. In this paper, we will present SCM as more effective and sensitive than contact based DC-EFM (Electrostatic Force Microscope) and verify how to detect the charge on the surface of metal with a physical model based on a parasitic capacitance. It is possible to analyze MIM (Metal-Insulator-Metal) structure because permittivity of insulator is varied like MOS (Metal Oxide Semiconductor) for induced dielectric dipole polarization. Even though it is required to deposit additional insulator layer on a metal, it is highly beneficial to inspect charge effect during post-processing.","PeriodicalId":417175,"journal":{"name":"International Symposium for Testing and Failure Analysis","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126889350","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A. S. Nair, P. Hoffrogge, P. Czurratis, C. Hollerith, Alexander Roch, Alireza Haghighat, K. Pressel, Frank Zudock, M. Wolf, E. Kühnicke
{"title":"1D-ResNet Framework for Ultrasound Signal Classification","authors":"A. S. Nair, P. Hoffrogge, P. Czurratis, C. Hollerith, Alexander Roch, Alireza Haghighat, K. Pressel, Frank Zudock, M. Wolf, E. Kühnicke","doi":"10.31399/asm.cp.istfa2022p0021","DOIUrl":"https://doi.org/10.31399/asm.cp.istfa2022p0021","url":null,"abstract":"\u0000 Minor flaws are becoming extremely relevant as the complexity of the semiconductor package evolves. Scanning acoustic microscopy is one analytical tool for detecting flaws in such a complex package. Minor changes in the reflected signal that could indicate a fault can be lost during image reconstruction, despite the high sensitivity. Because of recent AI (Artificial Intelligence) advancements, more emphasis is being placed on developing AI-based algorithms for high precision-automated signal interpretation for failure detection. This paper presents a new deep learning model for classifying ultrasound signals based on the ResNet architecture with 1D convolution layers. The developed model was validated on two test case scenarios. One use case was the detection of voids in the die attach, the other the detection of cracks below bumps in Flip-chip samples. The model was trained to classify signals into different classes. Even with a small dataset, experiment results confirmed that the model predicts with a 98 percent accuracy. This type of signal-based model could be extremely useful in situations where obtaining large amounts of labeled image data is difficult. Through this work we propose an intelligent signal classification methodology to automate high volume failure analysis in semiconductor devices.","PeriodicalId":417175,"journal":{"name":"International Symposium for Testing and Failure Analysis","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125908429","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Che Nan Siti Nurjatikesuma, Loo Huey Wen, Oung Pey Fen, Lee Chong Haw
{"title":"A Novel Fault Analysis Approach for a High Resistance via with Nano-Probing on FIB Recess Sample and TEM Lamella","authors":"Che Nan Siti Nurjatikesuma, Loo Huey Wen, Oung Pey Fen, Lee Chong Haw","doi":"10.31399/asm.cp.istfa2022p0343","DOIUrl":"https://doi.org/10.31399/asm.cp.istfa2022p0343","url":null,"abstract":"\u0000 This paper presents a novel approach of utilizing TEM lamella for nano-probing in localizing high resistive via within via - metal interconnect. Nano-probing on TEM lamella allows better resolution in a way multiple layers can be accessed within a single probing session at a cross section view. Depending on the layout structure of the failing interconnect, probing on TEM lamella has greatly accelerated the defect finding when compared to the conventional front side probing. The standard practice of multi-layer nano-probing capability with access to only two metal layers is also presented in this paper on a FIB recess sample.","PeriodicalId":417175,"journal":{"name":"International Symposium for Testing and Failure Analysis","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129396233","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Automated TEM Lamella Preparation using Remote CAD to SEM Alignment","authors":"Hyun Woo Shim, Taehun Lee, J. Kwon","doi":"10.31399/asm.cp.istfa2022p0206","DOIUrl":"https://doi.org/10.31399/asm.cp.istfa2022p0206","url":null,"abstract":"\u0000 Automated TEM lamella preparation using the remote CAD to SEM image alignment has been demonstrated for high volume failure analysis. The proposed method not only provides a secure means of using CAD design data during the lamella prep process, but offers an improved flexibility compared to conventional methods of processing CAD design file in a tool environment. The experiment showed that the new method is 3.1 times higher in throughput and requires 74 times less manhours, compared to manual process.","PeriodicalId":417175,"journal":{"name":"International Symposium for Testing and Failure Analysis","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132396346","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Absolute Temperature Thermal Mapping Methodology for Tester Applications","authors":"B. Lai, N. Leslie, P. Sabbineni, V. Ravikumar","doi":"10.31399/asm.cp.istfa2022p0120","DOIUrl":"https://doi.org/10.31399/asm.cp.istfa2022p0120","url":null,"abstract":"\u0000 Infrared lock-in thermography systems are frequently utilized for non-destructive failure analysis of integrated circuits due to sensitivity of the thermal detector to small temperature changes from electrical activity. This thermal sensitivity can also be leveraged for design verification and debug of device thermal management via absolute temperature mapping. The application of temperature mapping to a device under test (DUT) that requires boards and sockets, such as in tester based applications, has traditionally been challenging, due to the requirement that the DUT not be moved and the difficulty of heating the DUT through the thermal mass of the boards and sockets to which the DUT is mounted. This paper describes a proposed alternative single-temperature in-situ calibration method to eliminate the need for a heated thermal chuck for absolute temperature mapping. Preliminary results are promising and show that the new alternative single-temperature in-situ method results in temperature measurements within 1 °C close to room temperature and within 2.5 °C at elevated temperatures up to approximately 75 °C, as compared to the 1 °C accuracy of the current standard two-temperature in-situ method. While this alternate method is not as accurate as the standard two-temperature in-situ calibration method, the fact that it can be performed at a single room temperature means that it enables absolute temperature mapping for use cases requiring boards or socketed DUTs, as is the case for tester applications. An example characterization of a DUT utilizing varying clock signal inputs shows the added flexibility and ease of setup that the alternative single-temperature workflow brings, creating new opportunities for use-cases such as boards and testers where the use of a heated thermal chuck is not viable.","PeriodicalId":417175,"journal":{"name":"International Symposium for Testing and Failure Analysis","volume":"64 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122198995","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"The Fundamentals of Nanoprobe Analysis (2022 Update)","authors":"Randal E. Mulder","doi":"10.31399/asm.cp.istfa2022tpb1","DOIUrl":"https://doi.org/10.31399/asm.cp.istfa2022tpb1","url":null,"abstract":"\u0000 This presentation provides an overview of nanoprobe systems and what they reveal about defects and abnormalities in semiconductor device structures and materials. The presentation covers the basic operating principles, implementation, and capabilities of atomic force probe and beam-based imaging techniques, including AFP pico-current contrast and scanning capacitance imaging, SEM/FIB active voltage contrast imaging, and SEM/FIB electron-beam absorbed current (EBAC), induced current (EBIC), and induced resistance change (EBIRCH) imaging. It also includes guidelines for probing transistors and copper metallization and case studies in which nanoprobing was used to analyze gate oxide and substrate defects, intermittent bit cell failures, threshold voltage shifts, and time-domain popcorn noise.","PeriodicalId":417175,"journal":{"name":"International Symposium for Testing and Failure Analysis","volume":"49 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115902073","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
T. A. Hayes, Adam P. Cohn, Robert M. Kasse, Hernan Sanchez
{"title":"Advanced Lithium-Ion Battery Failure Analysis—An Evolving Methodology for An Evolving Technology","authors":"T. A. Hayes, Adam P. Cohn, Robert M. Kasse, Hernan Sanchez","doi":"10.31399/asm.cp.istfa2022p0051","DOIUrl":"https://doi.org/10.31399/asm.cp.istfa2022p0051","url":null,"abstract":"\u0000 Root cause failure analysis of lithium-ion batteries provides important feedback for cell design, manufacture, and use. As batteries are being produced with larger form factors and higher energy densities, failure analysis techniques must be adapted to characteristics of the specific batteries. This paper will discuss the significance of melted copper in lithium-ion battery cells that have experienced thermal runaway and how the interpretation of such evidence has evolved over time. Specialized testing techniques that may prove helpful in determining the root cause of battery failures will also be described.","PeriodicalId":417175,"journal":{"name":"International Symposium for Testing and Failure Analysis","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116341292","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}