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2017 International Conference on Optical MEMS and Nanophotonics (OMN)最新文献

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Keynote Mo-K: Graphene for next generation silicon photonics 主题演讲Mo-K:下一代硅光子学的石墨烯
2017 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2017-08-01 DOI: 10.1109/OMN.2017.8050212
M. Lipson
{"title":"Keynote Mo-K: Graphene for next generation silicon photonics","authors":"M. Lipson","doi":"10.1109/OMN.2017.8050212","DOIUrl":"https://doi.org/10.1109/OMN.2017.8050212","url":null,"abstract":"We show that graphene can be provide electro-optic properties to traditionally passive optical materials and enable efficient integrated active nanophotonic devices. We show devices with GHz absorption modulation based on ring resonators. We also report the first experimental demonstration of a graphene electro-refractive modulator with VπL of 0.14 V cm, and minimal absorption modulation based on graphene capacitor integrated on Si3N4 with embedded high-K and high breakdown dielectric.","PeriodicalId":411243,"journal":{"name":"2017 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"37 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123553778","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Uncooled infrared sensor using torsional resonator and electrostatic detection 非制冷红外传感器采用扭转谐振器和静电检测
2017 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2017-08-01 DOI: 10.1109/OMN.2017.8051492
Tomoya Hatagaki, S. Kumagai, K. Park, M. Sasaki
{"title":"Uncooled infrared sensor using torsional resonator and electrostatic detection","authors":"Tomoya Hatagaki, S. Kumagai, K. Park, M. Sasaki","doi":"10.1109/OMN.2017.8051492","DOIUrl":"https://doi.org/10.1109/OMN.2017.8051492","url":null,"abstract":"A new torsional resonator is designed for the infrared sensor. The actuation uses the fringe field from the vertical sidewall. The electrostatic detection bases on the transmitted voltage to the electrode near to the resonator.","PeriodicalId":411243,"journal":{"name":"2017 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"90 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128703058","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Analog Silicon Photonic MEMS phase-shifter with double-step electrostatic actuation 双步静电驱动的模拟硅光子MEMS移相器
2017 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2017-08-01 DOI: 10.1109/OMN.2017.8051437
H. Sattari, Teodoro Graziosi, Marcell Kiss, T. J. Seok, Sangyoon Han, Ming C. Wu, N. Quack
{"title":"Analog Silicon Photonic MEMS phase-shifter with double-step electrostatic actuation","authors":"H. Sattari, Teodoro Graziosi, Marcell Kiss, T. J. Seok, Sangyoon Han, Ming C. Wu, N. Quack","doi":"10.1109/OMN.2017.8051437","DOIUrl":"https://doi.org/10.1109/OMN.2017.8051437","url":null,"abstract":"We present the design of an analog Silicon Photonic MEMS phase shifter based on vertically moving adiabatic couplers. Using a two-step electrostatic actuation method, the phase shifter can be turned on selectively by applying an actuation voltage on a first pair of electrodes, and the phase of the optical signal can be tuned continuously by applying an actuation voltage at a second electrode pair. A mechanical movement of only 20nm at 19V actuation voltage allows for a full π phase shift. The design exhibits a compact footprint of 60um × 44um and low excess insertion loss below 0.1dB.","PeriodicalId":411243,"journal":{"name":"2017 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"216 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130140993","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Photothermal intracellular delivery with self-aligned cell seeding 光热细胞内递送与自对准细胞播种
2017 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2017-08-01 DOI: 10.1109/OMN.2017.8051513
Tianxing Man, Xiongfeng Zhu, Y. Chow, T. Liu, Ximiao Wen, M. Teitell, P. Chiou
{"title":"Photothermal intracellular delivery with self-aligned cell seeding","authors":"Tianxing Man, Xiongfeng Zhu, Y. Chow, T. Liu, Ximiao Wen, M. Teitell, P. Chiou","doi":"10.1109/OMN.2017.8051513","DOIUrl":"https://doi.org/10.1109/OMN.2017.8051513","url":null,"abstract":"We demonstrated a photothermal delivery approach with self-aligned cell seeding, which was realized by simple fabrication of microwells and sharp tips. Calcein molecules (622 Da) were successfully delivered into cells with above 80% viability.","PeriodicalId":411243,"journal":{"name":"2017 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"35 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114421353","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A compact MEMS-based wide-angle optical scanner 一种基于mems的紧凑型广角光学扫描仪
2017 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2017-08-01 DOI: 10.1109/OMN.2017.8051503
B. Yang, L. Zhou, X. Zhang, S. Koppal, Huikai Xie
{"title":"A compact MEMS-based wide-angle optical scanner","authors":"B. Yang, L. Zhou, X. Zhang, S. Koppal, Huikai Xie","doi":"10.1109/OMN.2017.8051503","DOIUrl":"https://doi.org/10.1109/OMN.2017.8051503","url":null,"abstract":"A compact laser scanner that scans approximately 90° has been demonstrated, which is enabled by an electrothermal MEMS mirror encapsulated in a 3D printed holder with a curved dome for optical amplification.","PeriodicalId":411243,"journal":{"name":"2017 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130274430","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Femtosecond switching of infrared light using a plasmonic cadmium oxide perfect absorber 利用等离子体氧化镉完美吸收器实现红外光的飞秒开关
2017 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2017-08-01 DOI: 10.1109/OMN.2017.8051452
Yuanmu Yang, Kyle Kelly, E. Sachet, S. Campione, T. Luk, J. Maria, M. Sinclair, I. Brener
{"title":"Femtosecond switching of infrared light using a plasmonic cadmium oxide perfect absorber","authors":"Yuanmu Yang, Kyle Kelly, E. Sachet, S. Campione, T. Luk, J. Maria, M. Sinclair, I. Brener","doi":"10.1109/OMN.2017.8051452","DOIUrl":"https://doi.org/10.1109/OMN.2017.8051452","url":null,"abstract":"Using a high-electron-mobility cadmium oxide perfect absorber and intraband optical pumping, we experimentally demonstrate a reflective polarizer with a polarization extinction ratio of 91 that can be switched on and off within 800 fs.","PeriodicalId":411243,"journal":{"name":"2017 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134422956","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
MEMS 3-dimensional scanner for handheld confocal microscope 手持式共聚焦显微镜用MEMS三维扫描仪
2017 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2017-08-01 DOI: 10.1109/OMN.2017.8051504
Tianbo Liu, D. Dickensheets
{"title":"MEMS 3-dimensional scanner for handheld confocal microscope","authors":"Tianbo Liu, D. Dickensheets","doi":"10.1109/OMN.2017.8051504","DOIUrl":"https://doi.org/10.1109/OMN.2017.8051504","url":null,"abstract":"A MEMS scanning mirror based on a deformable SU-8 membrane mirror supported by a biaxial gimbal with SU-8 flexures delivers 3-dimensional beam scanning for a handheld confocal microscope. Beam scanning and focusing performance are characterized.","PeriodicalId":411243,"journal":{"name":"2017 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"41 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133075635","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Dual-band tunable graphene-based filter 双波段可调谐石墨烯滤波器
2017 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2017-08-01 DOI: 10.1109/OMN.2017.8051458
M. Goldflam, I. Ruiz, S. Howell, T. Beechem
{"title":"Dual-band tunable graphene-based filter","authors":"M. Goldflam, I. Ruiz, S. Howell, T. Beechem","doi":"10.1109/OMN.2017.8051458","DOIUrl":"https://doi.org/10.1109/OMN.2017.8051458","url":null,"abstract":"We have demonstrated a scalable dual-band tunable infrared filter based on gating of a continuous graphene layer. The measured and modeled response of the device are in good agreement.","PeriodicalId":411243,"journal":{"name":"2017 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123872410","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Sub-10-nanometer-scale laser ablation on hard materials from dielectric near-field nanophotonics 介电近场纳米光子学在硬材料上的亚10纳米激光烧蚀
2017 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2017-08-01 DOI: 10.1109/OMN.2017.8051484
Y. Kwon, Hewei Liu, Soongyu Yi, H. Bian, Feng Chen, Zongfu Yu, Hongrui Jiang
{"title":"Sub-10-nanometer-scale laser ablation on hard materials from dielectric near-field nanophotonics","authors":"Y. Kwon, Hewei Liu, Soongyu Yi, H. Bian, Feng Chen, Zongfu Yu, Hongrui Jiang","doi":"10.1109/OMN.2017.8051484","DOIUrl":"https://doi.org/10.1109/OMN.2017.8051484","url":null,"abstract":"This paper demonstrates sub-10-nanometer (nm) laser ablation on hard materials. An 800-nm-wavelength femtosecond laser is focused down to sub-diffraction-limited scale by a silicon nanophotonic structure fabricated on a silicon-on-isolator (SOI) substrate, which is utilized to enable the ablation on the silicon dioxide (SiO2) layer of the SOI. Atomic force microscopy (AFM) results show a minimum ablation linewidth of about 8 nm with a depth-to-width ratio close to 1.","PeriodicalId":411243,"journal":{"name":"2017 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124041633","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Phase control through Huygens' metasurfaces 通过惠更斯的超表面进行相位控制
2017 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2017-08-01 DOI: 10.1109/OMN.2017.8051460
D. Czaplewski, H. Cai, T. Roy, K. Ogando, L. Stan, D. López
{"title":"Phase control through Huygens' metasurfaces","authors":"D. Czaplewski, H. Cai, T. Roy, K. Ogando, L. Stan, D. López","doi":"10.1109/OMN.2017.8051460","DOIUrl":"https://doi.org/10.1109/OMN.2017.8051460","url":null,"abstract":"We describe a dielectric Huygens' metasurface, operating in the visible spectrum, that can manipulate the phase of the transmitted light over a full 2π with high transmission efficiency. The metasurface is comprised of dielectric cylindrical nanoparticles embedded in a glass-like medium. The size of the nanoparticles and their separation are much smaller than the wavelength of visible light. From the metasurface, we construct a lens that focuses light to a diffraction limited spot size with high efficiency.","PeriodicalId":411243,"journal":{"name":"2017 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121594853","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
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