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2017 International Conference on Optical MEMS and Nanophotonics (OMN)最新文献

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MEMS micromirror based light sheet generator for biomedical imaging 基于MEMS微镜的生物医学成像光源发生器
2017 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2017-09-28 DOI: 10.1109/OMN.2017.8051499
R. Bauer, D. Uttamchandani
{"title":"MEMS micromirror based light sheet generator for biomedical imaging","authors":"R. Bauer, D. Uttamchandani","doi":"10.1109/OMN.2017.8051499","DOIUrl":"https://doi.org/10.1109/OMN.2017.8051499","url":null,"abstract":"Two MEMS micromirrors with resonant or static actuation are used as a MEMS enabled light sheet generator, with light sheet dimensions of 3.5μm by 550μm and offset positioning of 150μm in the focal plane.","PeriodicalId":411243,"journal":{"name":"2017 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"47 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-09-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123308349","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Micromachined drilling of dielectric substrates of varying bandgap using laser accelerated particles 利用激光加速粒子对不同带隙介质基板进行微机械钻孔
2017 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2017-09-26 DOI: 10.1109/OMN.2017.8051486
Tirtha Mitra, A. Brown, J. Talghader
{"title":"Micromachined drilling of dielectric substrates of varying bandgap using laser accelerated particles","authors":"Tirtha Mitra, A. Brown, J. Talghader","doi":"10.1109/OMN.2017.8051486","DOIUrl":"https://doi.org/10.1109/OMN.2017.8051486","url":null,"abstract":"It has been observed that absorbing particles accelerated by Continuous Wave (CW) lasers initiate catastrophic failure in the form of micromachined drill holes. This process was tested using stainless steel, PMMA, and silica particles with fused silica, sapphire, and spinel substrates. Hole drilling occurred at laser power densities as low as 250kW/cm2, far below the damage thresholds seen in typical situations. A potential dependence of accelerated particle breakdown on substrate bandgap may suggest that the underlying physical process is similar to that seen for CW laser breakdown of contaminated optical coatings.","PeriodicalId":411243,"journal":{"name":"2017 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-09-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114993851","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
A new extremely small sensor for measuring a blood flow and a contact pressure simultaneously 一种新型的非常小的传感器，可以同时测量血流量和接触压力
2017 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2017-09-26 DOI: 10.1109/OMN.2017.8051497
R. Inoue, Hirofumi Nogami, E. Higurashi, R. Sawada
{"title":"A new extremely small sensor for measuring a blood flow and a contact pressure simultaneously","authors":"R. Inoue, Hirofumi Nogami, E. Higurashi, R. Sawada","doi":"10.1109/OMN.2017.8051497","DOIUrl":"https://doi.org/10.1109/OMN.2017.8051497","url":null,"abstract":"A number of laser Doppler blood flow sensors have been developed over the past few decades. However, they remain uncommon in practice. This is because the contact pressure between the skin and the sensor is not measured simultaneously with blood flow, despite the fact that blood flow is greatly affected by contact pressure. Thus, reliable and highly reproducible measurement of blood flow could not be realized. Therefore, we have developed a micro electro mechanical systems (MEMS) blood flow sensor which has a built-in pressure sensor, for reliable and highly reproducible measurement.","PeriodicalId":411243,"journal":{"name":"2017 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-09-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133529863","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Batch production of silicon fiber-top cantilever devices 硅纤维顶部悬臂装置的批量生产
2017 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2017-09-26 DOI: 10.1109/OMN.2017.8051500
J. Rector, S. Beekmans, M. Slaman, R. Verdoold, D. Iannuzzi
{"title":"Batch production of silicon fiber-top cantilever devices","authors":"J. Rector, S. Beekmans, M. Slaman, R. Verdoold, D. Iannuzzi","doi":"10.1109/OMN.2017.8051500","DOIUrl":"https://doi.org/10.1109/OMN.2017.8051500","url":null,"abstract":"We present a fabrication procedure for batch production of MEMS devices directly on top of an optical fiber. Here, the stepwise fabrication procedure is described and the performance of the final device is demonstrated.","PeriodicalId":411243,"journal":{"name":"2017 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-09-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126701653","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Q-switched tunable solid-state laser using a MOEMS mirror 利用MOEMS反射镜的调q可调谐固态激光器
2017 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2017-09-26 DOI: 10.1109/OMN.2017.8051449
A. Paterson, R. Bauer, W. Lubeigt, D. Uttamchandani
{"title":"Q-switched tunable solid-state laser using a MOEMS mirror","authors":"A. Paterson, R. Bauer, W. Lubeigt, D. Uttamchandani","doi":"10.1109/OMN.2017.8051449","DOIUrl":"https://doi.org/10.1109/OMN.2017.8051449","url":null,"abstract":"Simultaneous wavelength tuning and Q-switching of a Yb:KGW laser using a single, electrothermally actuated MOEMS mirror is reported for the first time. A 15.4 nm tuning range is achieved at 2.06 kHz pulse repetition frequency.","PeriodicalId":411243,"journal":{"name":"2017 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-09-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124733093","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Development of electrothermal lens actuator for endoscopic blood flow sensor 内窥镜血流传感器电热透镜致动器的研制
2017 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2017-09-26 DOI: 10.1109/OMN.2017.8051498
M. Hashimoto, Y. Taguchi
{"title":"Development of electrothermal lens actuator for endoscopic blood flow sensor","authors":"M. Hashimoto, Y. Taguchi","doi":"10.1109/OMN.2017.8051498","DOIUrl":"https://doi.org/10.1109/OMN.2017.8051498","url":null,"abstract":"A novel blood flow sensor enabling a precise measurement in an endoscope has been developed. In this paper, a device design and a validity of an electrothermal actuator for the lens control are reported.","PeriodicalId":411243,"journal":{"name":"2017 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-09-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129384149","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Optoelectro microfluidic chip for sequential sensing of mass diffusion coefficient 用于质量扩散系数序列传感的光电微流控芯片
2017 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2017-09-26 DOI: 10.1109/OMN.2017.8051511
Makoto Kamata, Y. Taguchi, Y. Nagasaka
{"title":"Optoelectro microfluidic chip for sequential sensing of mass diffusion coefficient","authors":"Makoto Kamata, Y. Taguchi, Y. Nagasaka","doi":"10.1109/OMN.2017.8051511","DOIUrl":"https://doi.org/10.1109/OMN.2017.8051511","url":null,"abstract":"Optoelectro-microfluidic sensor based on a laser-induced dielectrophoresis is developed for the biological sensing. A sequential sensing of mass diffusion coefficient is demonstrated using two nanobeads sample.","PeriodicalId":411243,"journal":{"name":"2017 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"68(1) 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-09-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129651538","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Development of selective pattering method of biomolecules using photothermal effect on engineering plastic micro wells 基于工程塑料微孔光热效应的生物分子选择性图像化方法的发展
2017 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2017-09-26 DOI: 10.1109/OMN.2017.8051470
Takehiro Nagashima, K. Yamada, Y. Chonan, R. Sudo, Y. Taguchi
{"title":"Development of selective pattering method of biomolecules using photothermal effect on engineering plastic micro wells","authors":"Takehiro Nagashima, K. Yamada, Y. Chonan, R. Sudo, Y. Taguchi","doi":"10.1109/OMN.2017.8051470","DOIUrl":"https://doi.org/10.1109/OMN.2017.8051470","url":null,"abstract":"Selective attachment of biomolecules to micro wells contributes to fabrication of biodevices and biosensors. The biomolecules can be patterned on the engineering plastic micro wells by using the photothermal method. Our method provides a highly selective and highly resolved patterning method.","PeriodicalId":411243,"journal":{"name":"2017 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"39 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-09-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115799444","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Tunable optical response and purcell enhancement of gated plasmonic structures 门控等离子体结构的可调谐光学响应和purcell增强
2017 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2017-08-01 DOI: 10.1109/OMN.2017.8051450
R. Sokhoyan, G. K. Shirmanesh, Yu-Jung Lu, K. Thyagarajan, R. Pala, H. Atwater
{"title":"Tunable optical response and purcell enhancement of gated plasmonic structures","authors":"R. Sokhoyan, G. K. Shirmanesh, Yu-Jung Lu, K. Thyagarajan, R. Pala, H. Atwater","doi":"10.1109/OMN.2017.8051450","DOIUrl":"https://doi.org/10.1109/OMN.2017.8051450","url":null,"abstract":"We experimentally demonstrate plasmonic nanostructures that enable dynamic electrical control of the phase and/or amplitude of the plane wave reflected from the nanostructures. We also demonstrate dynamically controlled Purcell enhancement of spontaneous emission of InP quantum dots (QDs) coupled to plasmonic heterostructures.","PeriodicalId":411243,"journal":{"name":"2017 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"199 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115681953","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Antireflective structures for tunable liquid-filled lens 可调充液透镜的抗反射结构
2017 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2017-08-01 DOI: 10.1109/OMN.2017.8051488
Sang‐In Bae, Youngseop Lee, K. Jeong
{"title":"Antireflective structures for tunable liquid-filled lens","authors":"Sang‐In Bae, Youngseop Lee, K. Jeong","doi":"10.1109/OMN.2017.8051488","DOIUrl":"https://doi.org/10.1109/OMN.2017.8051488","url":null,"abstract":"This work presents novel antireflective structures (ARS) on flexible membrane for tunable liquid-filled lens by using wafer-level MEMS fabrication. ARS on flexible membrane with enhanced optical transmittance will provide new visions for miniaturized camera systems.","PeriodicalId":411243,"journal":{"name":"2017 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"38 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123042830","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
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