硅纤维顶部悬臂装置的批量生产

2017 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2017-09-26 DOI:10.1109/OMN.2017.8051500

J. Rector, S. Beekmans, M. Slaman, R. Verdoold, D. Iannuzzi

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引用次数: 0

摘要

我们提出了一种直接在光纤上批量生产MEMS器件的制造工艺。在这里，描述了逐步制造过程，并演示了最终器件的性能。

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Batch production of silicon fiber-top cantilever devices

We present a fabrication procedure for batch production of MEMS devices directly on top of an optical fiber. Here, the stepwise fabrication procedure is described and the performance of the final device is demonstrated.

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2017 International Conference on Optical MEMS and Nanophotonics (OMN)

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