非制冷红外传感器采用扭转谐振器和静电检测

2017 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2017-08-01 DOI:10.1109/OMN.2017.8051492

Tomoya Hatagaki, S. Kumagai, K. Park, M. Sasaki

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引用次数: 0

摘要

为红外传感器设计了一种新的扭转谐振器。驱动器使用垂直侧壁的边缘场。静电检测基于传输到靠近谐振器的电极的电压。

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Uncooled infrared sensor using torsional resonator and electrostatic detection

A new torsional resonator is designed for the infrared sensor. The actuation uses the fringe field from the vertical sidewall. The electrostatic detection bases on the transmitted voltage to the electrode near to the resonator.

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2017 International Conference on Optical MEMS and Nanophotonics (OMN)

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