一种基于mems的紧凑型广角光学扫描仪

2017 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2017-08-01 DOI:10.1109/OMN.2017.8051503

B. Yang, L. Zhou, X. Zhang, S. Koppal, Huikai Xie

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引用次数: 7

摘要

一种扫描约90°的紧凑型激光扫描仪已经被展示出来，它是由一个电热MEMS镜子封装在一个3D打印支架中，带有一个弯曲的圆顶，用于光学放大。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A compact MEMS-based wide-angle optical scanner

A compact laser scanner that scans approximately 90° has been demonstrated, which is enabled by an electrothermal MEMS mirror encapsulated in a 3D printed holder with a curved dome for optical amplification.

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来源期刊

2017 International Conference on Optical MEMS and Nanophotonics (OMN)

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