MEMS 3-dimensional scanner for handheld confocal microscope

2017 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2017-08-01 DOI:10.1109/OMN.2017.8051504

Tianbo Liu, D. Dickensheets

引用次数: 7

Abstract

A MEMS scanning mirror based on a deformable SU-8 membrane mirror supported by a biaxial gimbal with SU-8 flexures delivers 3-dimensional beam scanning for a handheld confocal microscope. Beam scanning and focusing performance are characterized.

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手持式共聚焦显微镜用MEMS三维扫描仪

一种基于可变形SU-8膜镜的MEMS扫描镜，由SU-8弯曲的双轴框架支撑，为手持共聚焦显微镜提供三维光束扫描。对波束扫描和聚焦性能进行了表征。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2017 International Conference on Optical MEMS and Nanophotonics (OMN)

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