{"title":"A compact MEMS-based wide-angle optical scanner","authors":"B. Yang, L. Zhou, X. Zhang, S. Koppal, Huikai Xie","doi":"10.1109/OMN.2017.8051503","DOIUrl":null,"url":null,"abstract":"A compact laser scanner that scans approximately 90° has been demonstrated, which is enabled by an electrothermal MEMS mirror encapsulated in a 3D printed holder with a curved dome for optical amplification.","PeriodicalId":411243,"journal":{"name":"2017 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 International Conference on Optical MEMS and Nanophotonics (OMN)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMN.2017.8051503","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 7
Abstract
A compact laser scanner that scans approximately 90° has been demonstrated, which is enabled by an electrothermal MEMS mirror encapsulated in a 3D printed holder with a curved dome for optical amplification.