Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components最新文献_第3页

Speckle reduction technique for embeddable MEMS-laser pico-projector 可嵌入mems激光微投影仪的散斑减小技术

Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components Pub Date : 2014-03-07 DOI: 10.1117/12.2040331

N. Abelé, C. Le Gros, J. Masson, L. Kilcher

引用次数: 7

Free-standing broadband low-loss optical metamaterial filter 独立式宽带低损耗光学超材料滤波器

Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components Pub Date : 2014-03-07 DOI: 10.1117/12.2045514

Lan Lin, Z. Jiang, S. Yun, D. Werner, T. Mayer

引用次数: 0

Rapidly analyzing parametric resonance and manufacturing yield of MEMS 2D scanning mirrors using hybrid finite-element/behavioral modeling 基于混合有限元/行为模型快速分析MEMS二维扫描镜的参数共振和成品率

Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components Pub Date : 2014-03-07 DOI: 10.1117/12.2041067

S. Maity, Shuangqin Liu, S. Rouvillois, G. Lorenz, M. Kamon

引用次数: 5

Design and fabrication of three-axis accelerometer sensor microsystem for wide temperature range applications using semi-custom process 采用半定制工艺设计和制造宽温度范围应用的三轴加速度计传感器微系统

Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components Pub Date : 2014-03-07 DOI: 10.1117/12.2037344

A. Merdassi, Y. Wang, G. Xereas, V. Chodavarapu

引用次数: 2

Wafer-level microstructuring of glassy carbon 晶圆级玻璃碳的微结构

Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components Pub Date : 2014-03-07 DOI: 10.1117/12.2038396

Loïc Hans, K. Prater, C. Kilchoer, T. Scharf, H. Herzig, A. Hermerschmidt

{"title":"Wafer-level microstructuring of glassy carbon","authors":"Loïc Hans, K. Prater, C. Kilchoer, T. Scharf, H. Herzig, A. Hermerschmidt","doi":"10.1117/12.2038396","DOIUrl":"https://doi.org/10.1117/12.2038396","url":null,"abstract":"Glassy carbon is used nowadays for a variety of applications because of its mechanical strength, thermal stability and non-sticking adhesion properties. One application is glass molding that allows to realize high resolution diffractive optical elements on large areas and at affordable price appropriate for mass production. We study glassy carbon microstructuring for future precision compression molding of low and high glass-transition temperature. For applications in optics the uniformity, surface roughness, edge definition and lateral resolution are very important parameters for a stamp and the final product. We study different methods of microstructuring of glassy carbon by etching and milling. Reactive ion etching with different protection layers such as photoresists, aluminium and titanium hard masks have been performed and will be compare with Ion beam etching. We comment on the quality of the structure definition and give process details as well as drawbacks for the different methods. In our fabrications we were able to realize optically flat diffractive structures with slope angles of 80° at typical feature sizes of 5 micron and 700 nm depth qualified for high precision glass molding.","PeriodicalId":395835,"journal":{"name":"Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115172660","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 3

MEMS and the direct detection of exoplanets MEMS和系外行星的直接探测

Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components Pub Date : 2014-03-07 DOI: 10.1117/12.2044134

Sandrine Thomas, B. Macintosh, R. Belikov

{"title":"MEMS and the direct detection of exoplanets","authors":"Sandrine Thomas, B. Macintosh, R. Belikov","doi":"10.1117/12.2044134","DOIUrl":"https://doi.org/10.1117/12.2044134","url":null,"abstract":"Deformable mirrors, and particularly MEMS, are crucial components for the direct imaging of exoplanets for both ground-based and space-based instruments. Without deformable mirrors, coronagraphs are incapable of reaching contrasts required to image Jupiter-like planets. The system performance is limited by image quality degradation resulting from wavefront error introduced from multiple effects including: atmospheric turbulence, static aberrations in the system, non-common-path aberrations, all of which vary with time. Correcting for these effects requires a deformable mirror with fast response and numerous actuators having moderate stroke. Not only do MEMS devices fulfill this requirement but their compactness permits their application in numerous space- and ground-based instruments, which are often volume- and mass-limited. In this paper, I will briefly explain how coronagraphs work and their requirements. I then will discuss the Extreme Adaptive Optics needed to compensate for the introduced wavefront error and how MEMS devices are a good choice to achieve the performance needed to produce the contrasts necessary to detect exoplanets. As examples, I will discuss a facility instrument for the Gemini Observatory, called the Gemini Planet Imager, that will detect Jupiter-like planets and present recent results from the NASA Ames Coronagraph Experiment laboratory, in the context of a proposed space- based mission called EXCEDE. EXCEDE is planned to focus on protoplanetary disks.","PeriodicalId":395835,"journal":{"name":"Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115334306","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Integration of real-time 3D image acquisition and multiview 3D display 集成实时三维图像采集和多视角三维显示

Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components Pub Date : 2014-03-07 DOI: 10.1117/12.2037444

Zhaoxing Zhang, Z. Geng, Tuotuo Li, Wei Li, Jingyi Wang, Yongchun Liu

引用次数: 3

Optical design of a broadband scanning adaptive optics ophthalmoscope for the mouse eye 一种宽频扫描自适应光学鼠眼检眼镜的光学设计

Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components Pub Date : 2014-03-07 DOI: 10.1117/12.2041993

Y. Sulai, A. Dubra

引用次数: 3

Quantitative thermal characterization of microelectronic devices by using CCD-based thermoreflectance microscopy 利用基于ccd的热反射显微镜对微电子器件进行定量热表征

Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components Pub Date : 2014-03-07 DOI: 10.1117/12.2041052

Dong Uk Kim, S. Ryu, Jun Ki Kim, K. Chang

{"title":"Quantitative thermal characterization of microelectronic devices by using CCD-based thermoreflectance microscopy","authors":"Dong Uk Kim, S. Ryu, Jun Ki Kim, K. Chang","doi":"10.1117/12.2041052","DOIUrl":"https://doi.org/10.1117/12.2041052","url":null,"abstract":"A thermoreflectance microscopy (TRM) system has emerged as a non-destructive and non-contact tool for a high resolution thermal imaging technique for micro-scale electronic and optoelectronic devices. Quantitative imaging of the temperature distribution is necessary for elaborate thermal characterization under operating conditions, such as thermal profiling and performance and reliability analysis. We introduce here a straightforward TRM system to perform quantitative thermal characterization of microelectronics devices. The quantitative imaging of the surface temperature distribution of a polysilicon micro-resistor is obtained by a lock-in measurement technique and calibration process in the conventional CCD-based widefield microscope. To confirm the quantitative thermal measurement, the measured thermal information is compared to that obtained with an infrared thermography (IRT) system. In addition to quantitative surface temperature distribution, the sub-micron defects on microelectronic devices can be clearly distinguished from the thermoreflectance images, which are hardly perceptible with a conventional widefield microscopy system. The thermal resolution of the proposed TRM system is experimentally determined by measuring standard deviation values of thermoreflectance data with respect to the iteration number. The spatial and thermal resolutions of our system are measured ~670 nm and ~13 mK, respectively. We believe that quantitative thermal imaging in the TRM system can be used for improvement of microelectronic devices and integrated circuit (IC) designs.","PeriodicalId":395835,"journal":{"name":"Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123885320","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 2

Residual stress control during the growth and release process in gold suspended microstructures 金悬浮微结构生长与释放过程中残余应力的控制

Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components Pub Date : 2014-03-07 DOI: 10.1117/12.2041433

Akshdeep Sharma, D. Bansal, Amit Kumar, D. Kumar, K. Rangra

引用次数: 5