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Proceedings of 2002 International Symposium on Micromechatronics and Human Science最新文献

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Design and fabrication of silicon micro components 硅微元件的设计与制造
Proceedings of 2002 International Symposium on Micromechatronics and Human Science Pub Date : 2002-12-10 DOI: 10.1109/MHS.2002.1058003
S. Buttgenbach
{"title":"Design and fabrication of silicon micro components","authors":"S. Buttgenbach","doi":"10.1109/MHS.2002.1058003","DOIUrl":"https://doi.org/10.1109/MHS.2002.1058003","url":null,"abstract":"Due to their manifold benefits, microsystems are being regarded as a key technology for innovation in many branches of industry. One of the leading techniques for the fabrication of microsystems is silicon micromachining. The paper reports on a modular CAD environment for the design of silicon micro components and gives some examples of micromachined devices developed at Braunschweig, including a micro tactile sensor, micro gripper, and micro chemical analysis system.","PeriodicalId":361470,"journal":{"name":"Proceedings of 2002 International Symposium on Micromechatronics and Human Science","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-12-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124819591","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
A testing mechanism and testing procedure for materials in inertial drives 惯性驱动中材料的测试机构和测试程序
Proceedings of 2002 International Symposium on Micromechatronics and Human Science Pub Date : 2002-12-10 DOI: 10.1109/MHS.2002.1058037
A. Bergander, J. Breguet
{"title":"A testing mechanism and testing procedure for materials in inertial drives","authors":"A. Bergander, J. Breguet","doi":"10.1109/MHS.2002.1058037","DOIUrl":"https://doi.org/10.1109/MHS.2002.1058037","url":null,"abstract":"Stick-slip actuators and other friction based drives have a high potential for efficient low cost and high-resolution positioning applications. So for, they are mostly used in research laboratories; there is only a very small number of commercial products in the market. There might be several explanations for this, but the lacking information about wear in these actuators is certainly one reason. The goal in conceiving a testing mechanism for material combinations in stick-slip actuators is, as with any wear test, to be as close as possible to the final application. This means that a reciprocating ball-on-plate rig, driven by a linear motor, as it is used for many wear tests, is not very useful. We propose a testing apparatus and as well as possible testing methods, which permit the comparison of the different material combinations in the contact points of stick-slip actuators.","PeriodicalId":361470,"journal":{"name":"Proceedings of 2002 International Symposium on Micromechatronics and Human Science","volume":"37 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-12-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132133965","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
100 nm square single crystal silicon shear strain gauge 100纳米方形单晶硅剪切应变计
Proceedings of 2002 International Symposium on Micromechatronics and Human Science Pub Date : 2002-12-10 DOI: 10.1109/MHS.2002.1058039
T. Toriyama, S. Sugiyama
{"title":"100 nm square single crystal silicon shear strain gauge","authors":"T. Toriyama, S. Sugiyama","doi":"10.1109/MHS.2002.1058039","DOIUrl":"https://doi.org/10.1109/MHS.2002.1058039","url":null,"abstract":"Fabrication and characteristics of a /spl sim/100 nm square p-type single crystal silicon four-terminal shear strain gauge (Si FSSG) were described. The shear piezoresistance was measured in order to verify the ability of nano metric scale Si FSSG. The shear piezoresistance coefficient /spl pi//sub 44/ was found to be 77.4/spl times/10/sup -11/ Pa/sup -1/ at surface impurity concentration Ns=9/spl times/10/sup 19/ cm/sup -3/. This value was 54.8% larger than the value obtained from p/sup +/ diffused piezoresistor used for the conventional mechanical sensors. A good prospect for the application of Si FSSG to the nano metric mechanical sensors was obtained.","PeriodicalId":361470,"journal":{"name":"Proceedings of 2002 International Symposium on Micromechatronics and Human Science","volume":" 26","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-12-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132094836","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Algorithm for analyzing optimal mask movement pattern in moving mask deep X-ray lithography 移动掩模深x射线光刻中最佳掩模运动模式分析算法
Proceedings of 2002 International Symposium on Micromechatronics and Human Science Pub Date : 2002-12-10 DOI: 10.1109/MHS.2002.1058027
N. Matsuzuka, O. Tabata
{"title":"Algorithm for analyzing optimal mask movement pattern in moving mask deep X-ray lithography","authors":"N. Matsuzuka, O. Tabata","doi":"10.1109/MHS.2002.1058027","DOIUrl":"https://doi.org/10.1109/MHS.2002.1058027","url":null,"abstract":"Moving mask deep X-ray lithography has demonstrated its feasibility for fabricating some 3-dimensional (3D) microstructures such as micro-nozzles and micro-lens arrays and so on. In this technique, the determination of mask movement patterns is crucial for realizing the desired target microstructures. For theoretical determination of optimal movement patterns, an algorithm exploiting the Fourier transformation technique called \"Inverse Approach\" was proposed. As a first step towards the completion of the Inverse Approach, the algorithm limited to the 2 space dimensions, vertical and lateral, was developed. Straightforward application of this algorithm to the fabrication of V-shaped grooves did not yield satisfying results. We reported an adopted version of this algorithm which ultimately allowed successful fabrication of the V-shaped grooves. Furthermore, this algorithm could be applied to the determination of an optimal mask.","PeriodicalId":361470,"journal":{"name":"Proceedings of 2002 International Symposium on Micromechatronics and Human Science","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-12-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130297852","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Integrated micro chemical systems and life science 集成微化学系统和生命科学
Proceedings of 2002 International Symposium on Micromechatronics and Human Science Pub Date : 2002-12-10 DOI: 10.1109/MHS.2002.1058007
T. Kitamori
{"title":"Integrated micro chemical systems and life science","authors":"T. Kitamori","doi":"10.1109/MHS.2002.1058007","DOIUrl":"https://doi.org/10.1109/MHS.2002.1058007","url":null,"abstract":"Our research group has developed the micro unit operation (MUO) and the continuous flow chemical processing (CFCP) methods, 2D and 3D multi-phase layered flow network, and the thermal lens microscope (TLM), for design, control, and ultra sensitive detection of non-fluorescent molecules at sub-single molecule (y-mole) levels. These methods have enabled integration of any type of chemical system on microchips almost freely. The performances of those integrated micro systems, such as processing time, throughput, detection limit, etc., were proved to be two to three orders superior to conventional systems. High throughput processing of the micro immunoassay systems for diagnosis and the micro bioassay systems for toxic screenings are the most typical examples for human and life science application. The micro bioassay system is introduced as an example of our integration technique for complicated systems. Furthermore, bio-MEMS using living cell and the Japanese national research projects on microchip chemical technologies are also introduced briefly.","PeriodicalId":361470,"journal":{"name":"Proceedings of 2002 International Symposium on Micromechatronics and Human Science","volume":"99 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-12-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124466109","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
A new micro jerk sensor with viscous coupling 一种新型粘滞耦合微加速度传感器
Proceedings of 2002 International Symposium on Micromechatronics and Human Science Pub Date : 2002-12-10 DOI: 10.1109/MHS.2002.1058038
M. Fujiyoshi, Y. Nonomura, F. Arai, T. Fukuda
{"title":"A new micro jerk sensor with viscous coupling","authors":"M. Fujiyoshi, Y. Nonomura, F. Arai, T. Fukuda","doi":"10.1109/MHS.2002.1058038","DOIUrl":"https://doi.org/10.1109/MHS.2002.1058038","url":null,"abstract":"We propose a new method for detection of jerk (derivative of acceleration) which is suitable for the MEMS (micro electro mechanical system) sensor. The sensor has two vibrators that arc connected with viscous coupling, and the sensor converts the jerk to the displacement of the second vibrator. In this paper, we explain a new principle of the jerk detection with a two degrees freedom sensor model and analyze the behavior of the sensor model to the viscosity.","PeriodicalId":361470,"journal":{"name":"Proceedings of 2002 International Symposium on Micromechatronics and Human Science","volume":"23 5","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-12-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131957290","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Analysis of the effect of fatigue on walking gait stability 疲劳对步行步态稳定性的影响分析
Proceedings of 2002 International Symposium on Micromechatronics and Human Science Pub Date : 2002-12-10 DOI: 10.1109/MHS.2002.1058043
M. Arif, Y. Ohtaki, R. Nagatomi, T. Ishihara, H. Inooka
{"title":"Analysis of the effect of fatigue on walking gait stability","authors":"M. Arif, Y. Ohtaki, R. Nagatomi, T. Ishihara, H. Inooka","doi":"10.1109/MHS.2002.1058043","DOIUrl":"https://doi.org/10.1109/MHS.2002.1058043","url":null,"abstract":"Effect of fatigue on the stability of normal walking is studied in this paper. A 3D accelerometer sensor was used to measure the accelerations of center of gravity of a walking person. Variability of acceleration in lateral, vertical and anterior/posterior directions was used as an index to assess the walking stability. We observed decreases in walking stability in lateral, vertical and anterior/posterior directions after fatigue.","PeriodicalId":361470,"journal":{"name":"Proceedings of 2002 International Symposium on Micromechatronics and Human Science","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-12-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130901380","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
A multi-axis force-moment micro sensor for application in fluid mechanics 一种用于流体力学的多轴力力矩微传感器
Proceedings of 2002 International Symposium on Micromechatronics and Human Science Pub Date : 2002-12-10 DOI: 10.1109/MHS.2002.1058032
D. Dao, A. Nguyen, C. Nguyen, T. Toriyama, J. Wells, S. Sugiyama
{"title":"A multi-axis force-moment micro sensor for application in fluid mechanics","authors":"D. Dao, A. Nguyen, C. Nguyen, T. Toriyama, J. Wells, S. Sugiyama","doi":"10.1109/MHS.2002.1058032","DOIUrl":"https://doi.org/10.1109/MHS.2002.1058032","url":null,"abstract":"This paper presents the development of a six-degree of freedom (6-DOF) force moment sensor utilizing the piezoresistive effects in silicon. The proposed sensor can independently detect six components of force and moment on a test particle in a turbulent flow. By combining p-type conventional and shear piezoresistors in Si[111], and arranging them suitably on the sensing area, the total number of piezoresistors used in this sensing chip is only eighteen, much fewer than that of the prior art piezoresistive 6-DOF force sensors. Calibration for six components of force versus output voltages was completed. The sensitivities are linear, close to the design values. Preliminary results of measurement of forces and moments acting on a test particle in turbulent flow will be presented.","PeriodicalId":361470,"journal":{"name":"Proceedings of 2002 International Symposium on Micromechatronics and Human Science","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-12-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132143680","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Development of robust variable structure controller based on sliding mode for large scale energy systems 基于滑模的大型能源系统鲁棒变结构控制器的研制
Proceedings of 2002 International Symposium on Micromechatronics and Human Science Pub Date : 2002-12-10 DOI: 10.1109/MHS.2002.1058033
M. Moteleb, M. Moursy
{"title":"Development of robust variable structure controller based on sliding mode for large scale energy systems","authors":"M. Moteleb, M. Moursy","doi":"10.1109/MHS.2002.1058033","DOIUrl":"https://doi.org/10.1109/MHS.2002.1058033","url":null,"abstract":"In the recent variable structure control (VSC) applications literature there has been considerable effort devoted to improve the controller design procedures such that a desired plant behavior or response may be obtained. In this paper the VSC design breaks into two phases included the concept of sliding mode control. Phase 1 entails constructing switching surfaces so that the system restricted to the switching surfaces produces a desired behavior. Phase 2 entails constructing switched feedback gains, which derive the plant state trajectory to the sliding surface and maintain it there. The suggested VSC technique with sliding mode is realized numerically for multivariable nonlinear power system. Also, the control algorithms are verified for both non-reheat and reheat two-area power system under consideration. The practical results obtained in this paper indicate that the proposed control strategy has significant advantages and open bright horizons to improve the power system dynamic performance.","PeriodicalId":361470,"journal":{"name":"Proceedings of 2002 International Symposium on Micromechatronics and Human Science","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-12-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130053729","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Computational intelligence in autonomous mobile robotics-A review 自主移动机器人中的计算智能研究综述
Proceedings of 2002 International Symposium on Micromechatronics and Human Science Pub Date : 2002-12-10 DOI: 10.1109/MHS.2002.1058040
L. Wang
{"title":"Computational intelligence in autonomous mobile robotics-A review","authors":"L. Wang","doi":"10.1109/MHS.2002.1058040","DOIUrl":"https://doi.org/10.1109/MHS.2002.1058040","url":null,"abstract":"In the recent decades the application of artificial evolution to autonomous mobile robots to enable them to adapt their behaviors to changes of the environments has attracted much attention. For example, the robots in next generation should be able to carry out work in unstructured dynamic human environments. As a result, an infant research field called evolutionary robotics (ER) has been quickly developed that is primarily concerned with the use of computation intelligence techniques for the automatic design of adaptive robots. The paper intends to discuss the applications of computational intelligence in the field of autonomous robotics. As an innovative and effective solution to autonomous robot controller design, it can derive adaptive robotic controllers capable of elegantly dealing with continuous changes in unstructured environments in an efficient manner. In the paper, the basic concepts regarding computational intelligence and evolutionary robotics are introduced, and then a variety of successful applications of computational intelligence in autonomous robotics along the dimension of computation intelligence adopted are surveyed and discussed. Future research in this field is also suggested. Finally, conclusions are drawn.","PeriodicalId":361470,"journal":{"name":"Proceedings of 2002 International Symposium on Micromechatronics and Human Science","volume":"43 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-12-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124100739","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 11
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