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Proceedings of 2002 International Symposium on Micromechatronics and Human Science最新文献

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Techniques for reduction in surface roughness and aperture size effect for XeF/sub 2/ etching of Si XeF/sub - 2/蚀刻硅的表面粗糙度降低技术和孔径尺寸效应
Proceedings of 2002 International Symposium on Micromechatronics and Human Science Pub Date : 2002-12-10 DOI: 10.1109/MHS.2002.1058010
K. Sugano, O. Tabata
{"title":"Techniques for reduction in surface roughness and aperture size effect for XeF/sub 2/ etching of Si","authors":"K. Sugano, O. Tabata","doi":"10.1109/MHS.2002.1058010","DOIUrl":"https://doi.org/10.1109/MHS.2002.1058010","url":null,"abstract":"Low etching pressure and high temperature on silicon substrate successfully decrease the etched surface roughness and the aperture effect which represent challenges toward the application of silicon etching with XeF/sub 2/ to MEMS fabrication. Etched roughness and aperture effect are extremely high and limit factors for the design rules of MEMS devices. In order to express an extent of the aperture effect, an uniformity of etched depth is defined as followed: (depth at 25 /spl mu/m)/(depth at 175 /spl mu/m)/spl times/100%. By lowering the charge pressure from 390 to 65 Pa, the etched roughness decreased from 870.8 and 174.4 /spl Aring/ and the uniformity improved from 71.3 to 88.7%. By heightening the substrate temperature from 300 to 440 K, the etched roughness decreased from 151.4 and 44.5 /spl Aring/ and the uniformity increased from 71.3 to 91.6%. These results will allow us to design with less constraints and expand the field of applications of XeF/sub 2/ etching to MEMS.","PeriodicalId":361470,"journal":{"name":"Proceedings of 2002 International Symposium on Micromechatronics and Human Science","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-12-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115096112","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Optimal configuration of micro touch sensor array structure 微触摸传感器阵列结构的优化配置
Proceedings of 2002 International Symposium on Micromechatronics and Human Science Pub Date : 2002-12-10 DOI: 10.1109/MHS.2002.1058026
L. Du, Guiryong Kwon, F. Arai, T. Fukuda, K. Itoigawa, Y. Tukahara
{"title":"Optimal configuration of micro touch sensor array structure","authors":"L. Du, Guiryong Kwon, F. Arai, T. Fukuda, K. Itoigawa, Y. Tukahara","doi":"10.1109/MHS.2002.1058026","DOIUrl":"https://doi.org/10.1109/MHS.2002.1058026","url":null,"abstract":"In this paper, the mathematical model, which is used to optimize configuration of micro touch sensor array structure, is derived. The main focus is on improving the sensitivity of micro touch sensor array. The micro touch sensor array is fabricated by PZT thin film which is synthesized by hydrothermal method. According to cantilever beam theory, the frequency response of micro touch sensor unit to electric input has been discussed. The effects of changing physical parameters such as the location of the electrodes of PZT actuation and sense layer, and the length of the electrodes of PZT layers are studied. Based on the maximum output of micro touch sensor unit, the optimal structure has been obtained from both side of analysis and experiment.","PeriodicalId":361470,"journal":{"name":"Proceedings of 2002 International Symposium on Micromechatronics and Human Science","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-12-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116836313","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Walking gait stability in young and elderly people and improvement of walking stability using optimal cadence 年轻人和老年人的步行步态稳定性及使用最佳节奏改善步行稳定性
Proceedings of 2002 International Symposium on Micromechatronics and Human Science Pub Date : 2002-12-10 DOI: 10.1109/MHS.2002.1058042
M. Arif, Yasuaki Ohtaki, T. Ishihara, H. Inooka
{"title":"Walking gait stability in young and elderly people and improvement of walking stability using optimal cadence","authors":"M. Arif, Yasuaki Ohtaki, T. Ishihara, H. Inooka","doi":"10.1109/MHS.2002.1058042","DOIUrl":"https://doi.org/10.1109/MHS.2002.1058042","url":null,"abstract":"Walking stability of human beings varies with age and reduces in the elderly people. Lesser walking stability causes many falls in the elderly people. In this paper, we have investigated the walking stability of young and elderly subjects using approximate entropy, a nonlinear time series analysis method. Walking stability of young and elderly persons are tested on different walking speed (steps/min.) or cadences in controlled walking mode. Results showed that young and most of the elderly subjects tries to optimize their cadence to get better walking stability. This method can be used as a mean to suggest a better walking speed to elderly people to increase their walking stability.","PeriodicalId":361470,"journal":{"name":"Proceedings of 2002 International Symposium on Micromechatronics and Human Science","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-12-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129546586","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Characteristics of an active type surface acoustic wave tactile display 有源型表面声波触觉显示器的特点
Proceedings of 2002 International Symposium on Micromechatronics and Human Science Pub Date : 2002-12-10 DOI: 10.1109/MHS.2002.1058025
M. Takasaki, T. Nara, T. Mizuno
{"title":"Characteristics of an active type surface acoustic wave tactile display","authors":"M. Takasaki, T. Nara, T. Mizuno","doi":"10.1109/MHS.2002.1058025","DOIUrl":"https://doi.org/10.1109/MHS.2002.1058025","url":null,"abstract":"We (2001) have already proposed a novel method to provide human tactile sensation using surface acoustic wave (SAW). A pulse modulated driving voltage excites temporal distribution of standing SAW. The distribution generates alternative friction shift on the surface of a SAW substrate. When the surface with burst SAW is explored, the friction shift can be perceived as tactile sensation at mechanoreceptors in the finger skin. For real reproduction of tactile sensation, the burst frequency was controlled according to the measured rubbing speed. With a fabricated tactile display, we could enjoy the tactile sensation in the case of rubbing on a solid surface with roughness, and a difference of displayed sensation was compared.","PeriodicalId":361470,"journal":{"name":"Proceedings of 2002 International Symposium on Micromechatronics and Human Science","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-12-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114225227","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A novel electro-thermally driven bi-directional microactuator 一种新型电热驱动双向微执行器
Proceedings of 2002 International Symposium on Micromechatronics and Human Science Pub Date : 2002-12-10 DOI: 10.1109/MHS.2002.1058045
Ko-Min Liao, Chin-Chiang Chueh, Rongshun Chen
{"title":"A novel electro-thermally driven bi-directional microactuator","authors":"Ko-Min Liao, Chin-Chiang Chueh, Rongshun Chen","doi":"10.1109/MHS.2002.1058045","DOIUrl":"https://doi.org/10.1109/MHS.2002.1058045","url":null,"abstract":"In this study, an electrothermal microactuator for bi-directional motion is designed and fabricated using surface micromachining processes. The in-plane horizontal motion of the device is based on the uneven thermal expansion of the structure with different beam widths, while the out-of-plane vertical motion is driven by electrostatic force through using the principle of lever to allow bending the beam upward and to enlarge the tip deflection. This microactuator has the advantages of CMOS-compatible, low operation voltage, and simple fabrication processes. The expected applications for the proposed devices are micro switches, micromanipulators, micro optical tweezers, etc. Finite element method (FEM) analysis is used to simulate the electrothermomechanical behavior of the device and to demonstrate the feasibility of our design for bi-directional motions under different applied voltages. The relationship between the applied voltage and the displacement is found, and the performance of the presented design has been examined. Finally, the deviation between simulated and measured results is discussed.","PeriodicalId":361470,"journal":{"name":"Proceedings of 2002 International Symposium on Micromechatronics and Human Science","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-12-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126346831","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
Force measurement with pico-Newton order resolution using a carbon nanotube probe 利用碳纳米管探针进行皮牛顿级分辨率力测量
Proceedings of 2002 International Symposium on Micromechatronics and Human Science Pub Date : 2002-12-10 DOI: 10.1109/MHS.2002.1058019
F. Arai, M. Nakajima, L. Dong, T. Fukuda
{"title":"Force measurement with pico-Newton order resolution using a carbon nanotube probe","authors":"F. Arai, M. Nakajima, L. Dong, T. Fukuda","doi":"10.1109/MHS.2002.1058019","DOIUrl":"https://doi.org/10.1109/MHS.2002.1058019","url":null,"abstract":"Force measurement with pico-Newton (pN) order resolution is presented by using a carbon nanotube (CNT) probe. Based on the theoretical analysis, a CNT is suitable for the sensitive force measurement. A CNT probe is constructed by attaching a CNT to the tip of an atomic force microscope (AFM) cantilever, by the electron-beam-induced deposition (EBID) though the nanorobotic manipulators inside a field-emission scanning electron microscope (FE-SEM). In order to attach a CNT quickly and correctly, CNTs are dispersed in ethanol by ultrasonic waves for several hours and oriented by electrophoresis. We measured pico-Newton order contact forces with a CNT probe, which is constructed with nanorobotic manipulators, by measuring deformation of a CNT probe from FE-SEM images.","PeriodicalId":361470,"journal":{"name":"Proceedings of 2002 International Symposium on Micromechatronics and Human Science","volume":"55 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-12-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125981849","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Integrated sensors for PZT actuators based on thick-film resistors 基于厚膜电阻的PZT致动器集成传感器
Proceedings of 2002 International Symposium on Micromechatronics and Human Science Pub Date : 2002-12-10 DOI: 10.1109/MHS.2002.1058031
A. Bergander, T. Maeder, B. Valencia, J. Breguet, P. Ryser
{"title":"Integrated sensors for PZT actuators based on thick-film resistors","authors":"A. Bergander, T. Maeder, B. Valencia, J. Breguet, P. Ryser","doi":"10.1109/MHS.2002.1058031","DOIUrl":"https://doi.org/10.1109/MHS.2002.1058031","url":null,"abstract":"A common problem when using piezoceramic actuators for precise positioning is their hysteresis. Either external sensors such as capacitive or inductive probes, optical sensors or strain gauges are commonly used. The latter are the most favorable solution in many cases, as they occupy the smallest volume and disturbances can mostly be avoided. Drawbacks are the assembly of these strain gauges on the target, their small gauge factor and their size. We propose a sensor based on thick-film technology which permits to avoid these problems. It will allow to increase the integration level of subminiature mechatronic systems. A piezoceramic element is covered with an electrode on either side. Afterwards, an insulating layer is patterned, followed by the required number of piezoresistive elements and the necessary electrode pads and conductive tracks. Experiments in the laboratory have shown that position control using these resistances is possible, taking advantage of the reliability, the intimate contact between sensor and actuator, a negligible creep and the stability. In this paper we present several possible sensor configurations, applications and measurement results.","PeriodicalId":361470,"journal":{"name":"Proceedings of 2002 International Symposium on Micromechatronics and Human Science","volume":"81 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-12-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123179937","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Micromachined active tactile sensor for detecting contact force and hardness of an object 用于检测物体接触力和硬度的微机械主动触觉传感器
Proceedings of 2002 International Symposium on Micromechatronics and Human Science Pub Date : 2002-12-10 DOI: 10.1109/MHS.2002.1058013
T. Shimizu, M. Shikida, K. Sato, K. Itoigawa, Y. Hasegawa
{"title":"Micromachined active tactile sensor for detecting contact force and hardness of an object","authors":"T. Shimizu, M. Shikida, K. Sato, K. Itoigawa, Y. Hasegawa","doi":"10.1109/MHS.2002.1058013","DOIUrl":"https://doi.org/10.1109/MHS.2002.1058013","url":null,"abstract":"We propose a new type of micromachined tactile sensor that can detect both the contact force and hardness of an object. It consists of a diaphragm with a mesa structure, a piezo-resistive displacement sensor on the diaphragm, and a chamber for pneumatic actuation. We designed the device so that it detects the touch of human finger distinguished from that of hard bodies. We fabricated devices by micromachining technologies to prove the principle. The sensor element is 6.0 mm/spl times/6.0 mm/spl times/0.4 mm, and it has a displacement sensing element of piezo-resistor at the periphery of the diaphragm structure. We experimentally confirmed the characteristics of the device by using pneumatic actuation.","PeriodicalId":361470,"journal":{"name":"Proceedings of 2002 International Symposium on Micromechatronics and Human Science","volume":"184 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-12-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114446309","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Wire-in-hole operation using a magnetic suspension parallel motion hand 井内钢丝绳作业采用磁悬浮平行运动机械手
Proceedings of 2002 International Symposium on Micromechatronics and Human Science Pub Date : 2002-12-10 DOI: 10.1109/MHS.2002.1058020
S. Ohno, Z. Liu, T. Nakamura
{"title":"Wire-in-hole operation using a magnetic suspension parallel motion hand","authors":"S. Ohno, Z. Liu, T. Nakamura","doi":"10.1109/MHS.2002.1058020","DOIUrl":"https://doi.org/10.1109/MHS.2002.1058020","url":null,"abstract":"This paper deals with wiring tasks in fabrication of micro mechatronics. Insertion of a flexible wire into a hole is very difficult, because the wire will bear large resistance force duping the insertion, which gets the wire to deform. Conventional methods move robot end effector to follow the wire deformation. However it is difficult to detect a small deformation by vision, especially in case of uncertain-shape object. Also in some cases vision cannot be used. So we proposed a method to use only force information while insertion process. The proposed method was implemented to our parallel motion mechanism. The system consists of two finger rods, each of which has three degrees of freedom and magnetic actuators and sensors are attached directly to the finger links. The actuator consists of an air-core coil and a permanent magnet. This design makes the control easy due to X-Y-Z decoupled motion.","PeriodicalId":361470,"journal":{"name":"Proceedings of 2002 International Symposium on Micromechatronics and Human Science","volume":"129 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-12-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134458753","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Design and synthesis of new-type ultra-fine magnetic fluid and its evaluation of material property 新型超细磁流体的设计合成及其材料性能评价
Proceedings of 2002 International Symposium on Micromechatronics and Human Science Pub Date : 2002-12-10 DOI: 10.1109/MHS.2002.1058035
K. Yagi, S. Yoshida, M. Tokuda
{"title":"Design and synthesis of new-type ultra-fine magnetic fluid and its evaluation of material property","authors":"K. Yagi, S. Yoshida, M. Tokuda","doi":"10.1109/MHS.2002.1058035","DOIUrl":"https://doi.org/10.1109/MHS.2002.1058035","url":null,"abstract":"In order to improve the characteristics of magnetite, we have been tried to combine Fe/sub 3/O/sub 4/ particles with polysaccharide. The water solubility of the polysaccharide which had magnetite (Fe/sub 3/O/sub 4/) of the magnetic oxidized iron were chosen to have living body adaptability and to hold the design of the new compound material which had magnetism and dispersion stability. Magnetite was chosen as the core material, glycosaminoglycans (mucopolysaccharides) and compound polysaccharides were used as the dispersion material of the non-magnetism as the outside shell coat material from the polysaccharide. The sample made by this research group could be placed on the function material in and had multiple functions (magnetism, fluidity, living body adaptability). Evaluation and measurement was performed on the character of the material as a new type ultra-fine magnetic fluid, and the control of the magnetic character, the dispersion stability, and the preparation conditions were evaluated.","PeriodicalId":361470,"journal":{"name":"Proceedings of 2002 International Symposium on Micromechatronics and Human Science","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-12-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115553694","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
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