{"title":"一种新型粘滞耦合微加速度传感器","authors":"M. Fujiyoshi, Y. Nonomura, F. Arai, T. Fukuda","doi":"10.1109/MHS.2002.1058038","DOIUrl":null,"url":null,"abstract":"We propose a new method for detection of jerk (derivative of acceleration) which is suitable for the MEMS (micro electro mechanical system) sensor. The sensor has two vibrators that arc connected with viscous coupling, and the sensor converts the jerk to the displacement of the second vibrator. In this paper, we explain a new principle of the jerk detection with a two degrees freedom sensor model and analyze the behavior of the sensor model to the viscosity.","PeriodicalId":361470,"journal":{"name":"Proceedings of 2002 International Symposium on Micromechatronics and Human Science","volume":"23 5","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-12-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"A new micro jerk sensor with viscous coupling\",\"authors\":\"M. Fujiyoshi, Y. Nonomura, F. Arai, T. Fukuda\",\"doi\":\"10.1109/MHS.2002.1058038\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We propose a new method for detection of jerk (derivative of acceleration) which is suitable for the MEMS (micro electro mechanical system) sensor. The sensor has two vibrators that arc connected with viscous coupling, and the sensor converts the jerk to the displacement of the second vibrator. In this paper, we explain a new principle of the jerk detection with a two degrees freedom sensor model and analyze the behavior of the sensor model to the viscosity.\",\"PeriodicalId\":361470,\"journal\":{\"name\":\"Proceedings of 2002 International Symposium on Micromechatronics and Human Science\",\"volume\":\"23 5\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2002-12-10\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of 2002 International Symposium on Micromechatronics and Human Science\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MHS.2002.1058038\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of 2002 International Symposium on Micromechatronics and Human Science","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MHS.2002.1058038","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
We propose a new method for detection of jerk (derivative of acceleration) which is suitable for the MEMS (micro electro mechanical system) sensor. The sensor has two vibrators that arc connected with viscous coupling, and the sensor converts the jerk to the displacement of the second vibrator. In this paper, we explain a new principle of the jerk detection with a two degrees freedom sensor model and analyze the behavior of the sensor model to the viscosity.