A new micro jerk sensor with viscous coupling

Abstract

We propose a new method for detection of jerk (derivative of acceleration) which is suitable for the MEMS (micro electro mechanical system) sensor. The sensor has two vibrators that arc connected with viscous coupling, and the sensor converts the jerk to the displacement of the second vibrator. In this paper, we explain a new principle of the jerk detection with a two degrees freedom sensor model and analyze the behavior of the sensor model to the viscosity.