MHS2003. Proceedings of 2003 International Symposium on Micromechatronics and Human Science (IEEE Cat. No.03TH8717)最新文献

Superplastic nano/microforming of bulk metallic glasses and the application to micromachines 大块金属玻璃的超塑性纳米/微成形及其在微机械上的应用

MHS2003. Proceedings of 2003 International Symposium on Micromechatronics and Human Science (IEEE Cat. No.03TH8717) Pub Date : 2003-12-08 DOI: 10.1109/MHS.2003.1249878

Y. Saotome

{"title":"Superplastic nano/microforming of bulk metallic glasses and the application to micromachines","authors":"Y. Saotome","doi":"10.1109/MHS.2003.1249878","DOIUrl":"https://doi.org/10.1109/MHS.2003.1249878","url":null,"abstract":"Bulk metallic glasses as second-generation amorphous alloys exhibit Newtonian viscous flow under very low stresses in the supercooled liquid temperature range and furthermore, the materials exhibit superior micro/nano formability and good geometrical transferability of die. These alloys are therefore expected to become some of the most useful materials for fabricating nano-/micro-machines (MEMS) and devices. The present paper demonstrates the macroscopic and microscopic deformation behavior of La-, Zr-, Pd- and Pt-based bulk metallic glasses, as well as micromachine production methods for the materials. Nano/microforming techniques are shown as follows: microextrusion with microdies made of laser-micromachined polyimide and of Ni by UV-LIGA (lithography and electroforming) process, submicron imprinting with silicon die fabricated by EB lithography and etching, microforging of microgear of 10 /spl mu/m in module with Ni-microdie fabricated by UV-LIGA process, microforging of micro cantilever with laser-micromachined polyimide die. As a result, bulk metallic glasses are highly useful for realizing high-performance micro-actuators and microstructures due to their excellent characteristics as functional or structural materials, including isotropic homogeneity free from crystalline anisotropy on micrometer and nanometer scales.","PeriodicalId":358698,"journal":{"name":"MHS2003. Proceedings of 2003 International Symposium on Micromechatronics and Human Science (IEEE Cat. No.03TH8717)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-12-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115009787","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A novel type of micropump using SMA actuator for microflow application 采用SMA作动器的新型微流泵

MHS2003. Proceedings of 2003 International Symposium on Micromechatronics and Human Science (IEEE Cat. No.03TH8717) Pub Date : 2003-12-08 DOI: 10.1109/MHS.2003.1249908

Shuxiang Guo, Jun Oohira, T. Fukuda

引用次数: 14

A humanoid robotic hand performing the sign language motions 一个人形机器人手执行手语动作

MHS2003. Proceedings of 2003 International Symposium on Micromechatronics and Human Science (IEEE Cat. No.03TH8717) Pub Date : 2003-12-08 DOI: 10.1109/MHS.2003.1249915

K. Hoshino, I. Kawabuchi

{"title":"A humanoid robotic hand performing the sign language motions","authors":"K. Hoshino, I. Kawabuchi","doi":"10.1109/MHS.2003.1249915","DOIUrl":"https://doi.org/10.1109/MHS.2003.1249915","url":null,"abstract":"In this paper, studies have been made in five for the purpose of realization of the robot hand that is capable of conveying feelings and sensitivities by finger movement. First, a small-sized and light-weight robot hand was developed to be used as the humanoid according to the concept of extracting required minimum motor functions and mounting them to the robot. Second, basic characteristics of movements were checked by experiments, simple feedforward control mechanism was designed based on speed control, and a system capable of tracking joint time-series change command with arbitrary shape was realized. Third, tracking performances with regard to sinusoidal input with different frequencies were studied for evaluation of the system thus realized, and space- and time-related accuracy were investigated. Fourth, finger character movements by signal language were generated as examples of information transmission by finger movements. A series of results thus obtained indicated that this robot hand is capable of transmitting information promptly with comparatively high accuracy through movements. Finally, the remote control was enabled through data glove with regressive model obtained by the singular value decomposition.","PeriodicalId":358698,"journal":{"name":"MHS2003. Proceedings of 2003 International Symposium on Micromechatronics and Human Science (IEEE Cat. No.03TH8717)","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-12-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125130851","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 12

Microneedles array for fluid extraction and drug delivery 用于液体提取和药物输送的微针阵列

MHS2003. Proceedings of 2003 International Symposium on Micromechatronics and Human Science (IEEE Cat. No.03TH8717) Pub Date : 2003-12-08 DOI: 10.1109/MHS.2003.1249939

Ran Liu, Xiaohao Wang, Zhaoying Zhou, J.D. Williams

引用次数: 2

Application of the H infinity control and a zippering machine modeling for replication process of double stranded DNA 应用H∞控制和拉链机建模双链DNA复制过程

MHS2003. Proceedings of 2003 International Symposium on Micromechatronics and Human Science (IEEE Cat. No.03TH8717) Pub Date : 2003-12-08 DOI: 10.1109/MHS.2003.1249919

H. Hirohumi

引用次数: 0

Verification of etching rule in CAES CAES中蚀刻规律的验证

MHS2003. Proceedings of 2003 International Symposium on Micromechatronics and Human Science (IEEE Cat. No.03TH8717) Pub Date : 2003-12-08 DOI: 10.1109/MHS.2003.1249948

N. Baba, K. Makino, T. Kakinaga, O. Tabata, Y. Isono, J. Korvink

引用次数: 0

A micro snake-like robot for small pipe inspection 用于小管道检测的微型蛇形机器人

MHS2003. Proceedings of 2003 International Symposium on Micromechatronics and Human Science (IEEE Cat. No.03TH8717) Pub Date : 2003-12-08 DOI: 10.1109/MHS.2003.1249959

S. Wakimoto, J. Nakajima, M. Takata, T. Kanda, K. Suzumori

引用次数: 60

Design and fabrication of a coupled microneedle array and insertion guide array for safe penetration through skin 用于安全穿透皮肤的耦合微针阵列和插入引导阵列的设计和制造

MHS2003. Proceedings of 2003 International Symposium on Micromechatronics and Human Science (IEEE Cat. No.03TH8717) Pub Date : 2003-12-08 DOI: 10.1109/MHS.2003.1249938

S. Khumpuang, R. Maeda, S. Sugiyama

{"title":"Design and fabrication of a coupled microneedle array and insertion guide array for safe penetration through skin","authors":"S. Khumpuang, R. Maeda, S. Sugiyama","doi":"10.1109/MHS.2003.1249938","DOIUrl":"https://doi.org/10.1109/MHS.2003.1249938","url":null,"abstract":"Ordinary flat hollow tip, microneedles have been designed and fabricated for biomedical MEMS applications. With the facilitation of an insertion guide, the needles can be pushed down through the viable-epidermis with less bending. The microneedle array has the ability of integration with microfluidic devices since the needles are hollow so that the liquid can flow through the holes. 100 microneedles are contained in a 5 /spl times/ 5 mm/sup 2/ array chip and the same size of another array chip contains 100 insertion guide holes. A standard silicon micromachining process was employed to fabricate both arrays. The shape of microneedle is as simple as a tube so that the designed theories and simulations can be more precise than the complicated shape. The result of testing shows that there was no microneedle broken during the penetration to the skin via the guiding holes. The finite-element analyses of stresses and deformed shapes have been carried out with the explanation of deformed shape and stress occurred in the needle structure.","PeriodicalId":358698,"journal":{"name":"MHS2003. Proceedings of 2003 International Symposium on Micromechatronics and Human Science (IEEE Cat. No.03TH8717)","volume":"86 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-12-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124154477","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 20

Improvement of operation speed for the legged robot with wheels by intelligent motion control 通过智能运动控制提高带轮腿机器人的运行速度

MHS2003. Proceedings of 2003 International Symposium on Micromechatronics and Human Science (IEEE Cat. No.03TH8717) Pub Date : 2003-12-08 DOI: 10.1109/MHS.2003.1249964

A. Sugiura, T. Oomichi

{"title":"Improvement of operation speed for the legged robot with wheels by intelligent motion control","authors":"A. Sugiura, T. Oomichi","doi":"10.1109/MHS.2003.1249964","DOIUrl":"https://doi.org/10.1109/MHS.2003.1249964","url":null,"abstract":"Actuator miniaturizations for reducing robot weight have been mainly discussed as an improvement of operation speed of the robot. However, it only expects the performance improving of actuator, so it is difficult to point contribution of robotics technology such as intelligent control. We have been trying to design the actuator small, examining the motion pattern and detail torque and necessary power for the movement of the robot, and we aim at the miniaturization of the robot. Furthermore, we proposed the design method using maximum torque of motor instead of using allowable continuous torque. In case of the proposed technique, the motor torque is higher than allowable continuous torque, and the temperature of the motor rises more than the tolerance. Therefore, motor temperature-rise should be estimated if the operation is possible under the allowable temperature of the motor. It means the motor temperature-rise is needed to estimate before operation. Then, the estimation method of the temperature-rise was proposed when the robot was operated. The method was also applied for the 4-legged robot with 6 wheels. The task model of five terrain floors and mission model of integrated terrain floors simulated for a power plant were chosen for the movement object of the robot, and computer simulation was done for that. In addition, the experiment was done to verify the computer simulation using the experiment equipment of the temperature-rise. As a result, we showed the proposed the model of the motor temperature-rise. As a result, we showed the proposed the model of the motor temperature-rise was useful, and we could design using maximum motor torque. When the motor temperature-rise was assumed to be 40/spl deg/C for the mission model, the improvement of the robot operation speed was 4.4 times. When the motor temperature-rise was assumed to be 20/spl deg/C, the improvement of the robot operation speed was 1.6 times.","PeriodicalId":358698,"journal":{"name":"MHS2003. Proceedings of 2003 International Symposium on Micromechatronics and Human Science (IEEE Cat. No.03TH8717)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-12-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116797127","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 2

Design and fabrication of flexible thermopile for power generation 发电用柔性热电堆的设计与制造

MHS2003. Proceedings of 2003 International Symposium on Micromechatronics and Human Science (IEEE Cat. No.03TH8717) Pub Date : 2003-12-08 DOI: 10.1109/MHS.2003.1249950

S. Hasebe, J. Ogawa, T. Toriyama, S. Sugiyama, H. Ueno, K. Itoigawa

引用次数: 9