MHS2003. Proceedings of 2003 International Symposium on Micromechatronics and Human Science (IEEE Cat. No.03TH8717)最新文献

{"title":"Motion control for humanoid robots based on the concept learning","authors":"K. Kuwayama, S. Kato, H. Seki, T. Yamakita, H. Itoh","doi":"10.1109/MHS.2003.1249945","DOIUrl":"https://doi.org/10.1109/MHS.2003.1249945","url":null,"abstract":"This paper proposes a concept learning-based approach to motion control for humanoid robots. In this approach, the motion control system is implemented with decision tree learner for the acquisition of balancing property of itself body and movement and depth first search technique for the motion control based on the knowledge concerning balance and stability in the motion. Some performance results by humanoid robot HOAP-1 is reported: stable and anti-tumble motions to stand up from a chair.","PeriodicalId":358698,"journal":{"name":"MHS2003. Proceedings of 2003 International Symposium on Micromechatronics and Human Science (IEEE Cat. No.03TH8717)","volume":"70 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-12-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127159380","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Motion of a miniature robot driven by rapid deformation of piezoelectric element","authors":"Y. Fukaya, A. Torii, K. Doki, A. Ueda","doi":"10.1109/MHS.2003.1249962","DOIUrl":"https://doi.org/10.1109/MHS.2003.1249962","url":null,"abstract":"Many miniature robots with various types of actuators have been developed. In this paper, a motion of a miniature robot driven by rapid deformation of piezoelectric elements is described. This miniature robot consists of a stainless frame and three piezoelectric elements. One piezoelectric element expands and another is contracted rapidly and simultaneously. First the linear displacement of the miniature robot is described. We measured the linear displacement of the miniature robot. The robot moves forward and the linear displacement in one control cycle is 2.99 /spl mu/m. Then, the rotational displacement of the robot is also described. We repeated the rotational displacement measurement on a lot of different places on a flat glass surface. The result obtained by the same input signals and different positions of the robot are different from each other. One of our results indicates that the rotational displacement is 15.6 /spl mu/rad in CW direction and 8.8 /spl mu/rad in CCW direction when the extension of piezoelectric elements is 3 /spl mu/m.","PeriodicalId":358698,"journal":{"name":"MHS2003. Proceedings of 2003 International Symposium on Micromechatronics and Human Science (IEEE Cat. No.03TH8717)","volume":"73 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-12-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126270838","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Performance improvements for stick-slip positioners","authors":"A. Bergander, J. Breguet","doi":"10.1109/MHS.2003.1249910","DOIUrl":"https://doi.org/10.1109/MHS.2003.1249910","url":null,"abstract":"Stick-slip actuators are frequently used systems for micro- and nano positioning because of their high dynamics and simple design. Driving at high velocities however is restricted, as either the actuators are very stiff and have a short stroke, or they have a large deformation but low natural frequencies. Beyond a certain frequency, which is determined by the actuators' natural frequency, the masses to be moved, and the damping ratios, the system cannot be driven in a controlled manner any more, as the velocity no longer increases linearly with the driving frequency and presents a \"chaotic\" behavior. This behavior is a result of a vibration after one step not being completely damped out before the next step occurs. In this paper, we propose a method to actuate stick-slip actuators with low natural frequencies at comparatively high driving frequencies, which permits to increase the velocity compared to the velocity obtained with a simple saw tooth signal of the same frequency. The driving signal for the actuators is convolved with a pulse sequence that cancels occurring vibration, a method that is commonly called \"input shaping\". Particular aspects of signal shaping for stick-slip drives will be discussed, simulation as well as measured experimental results are given.","PeriodicalId":358698,"journal":{"name":"MHS2003. Proceedings of 2003 International Symposium on Micromechatronics and Human Science (IEEE Cat. No.03TH8717)","volume":"51 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-12-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130362821","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A novel microfabrication process of polymer materials and nanoparticles based on self-organization","authors":"M. Shimomura, H. Yabu, T. Sawadaishi","doi":"10.1109/MHS.2003.1249881","DOIUrl":"https://doi.org/10.1109/MHS.2003.1249881","url":null,"abstract":"Dissipative structures formed in the casting polymer solutions are utilized for micro- and nano-patterning of polymer materials. We have found that the typical dissipative structures were formed in the casting process of polymer solutions on solid surfaces. Dynamic regular structures formed in casting polymer solutions are fixed as regular patterns, stripes, and lattices, etc., of polymer materials. We have also found regular pattern formation in casting solutions of nanoparticles.","PeriodicalId":358698,"journal":{"name":"MHS2003. Proceedings of 2003 International Symposium on Micromechatronics and Human Science (IEEE Cat. No.03TH8717)","volume":"39 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-12-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123723510","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Nanometer physics in microsystem research: reversed anisotropy observed in wet chemical etching of silicon","authors":"K. Sato, M. Shikida","doi":"10.1109/MHS.2003.1249906","DOIUrl":"https://doi.org/10.1109/MHS.2003.1249906","url":null,"abstract":"Microsystem research is reinforced by nanometer physics introducing atomistic models. We found that anisotropy in wet chemical etching of silicon was dominated not only by the surface orientation of single crystal wafer but also by the activeness of atomic steps on Si [111] surface as well. The activeness of the atomic step on [111] surface was highly oriented, and was reversely oriented between two etchants of KOH and of TMAH. The differences in macroscopic etching behavior between the two etchants were explained by the difference in activeness of the atomic steps. It should be noted that conventional static model counting the number of dangling bond on a surface atom is no more applicable to discuss anisotropy in etching which is quite a dynamic phenomena.","PeriodicalId":358698,"journal":{"name":"MHS2003. Proceedings of 2003 International Symposium on Micromechatronics and Human Science (IEEE Cat. No.03TH8717)","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-12-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123951999","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Development of biological-micro-manipulation system in scanning electron microscope","authors":"H. Eda, T. Ishikawa, Y. Tomita, Y. Yamamoto, L. Zhou, K. Kawakami, J. Shimizu","doi":"10.1109/MHS.2003.1249934","DOIUrl":"https://doi.org/10.1109/MHS.2003.1249934","url":null,"abstract":"In an application of biological and medical engineering, there are increasing demands of implementing dissection, inspection and/or evaluation at the sub-micron scale. Currently, most of such operations are manually done by highly skilled operators with the assistance of scanning electron microscopes or CCD camera. The limited visible area at a high magnification of SEM makes it more difficult for the operator to trace the target. The operators have also to experience a long time training to familiarize the feeling of micro-scale movements in order to achieve high accuracy. The operations are tedious and time-consuming. It is, therefore, strongly expected to develop a manipulation system possible for unskilled operators to easily execute the desired tasks. Our goal is to develop a manipulation system enabling unskilled operators to deal with biological objects in sub-micro size as easily as to deal with objects in usual size. The scope of this paper includes the conceptual design, the prototype development, field tests and the operability evaluation. The system is modularized into the manipulation unit, the control unit and the man-machine interface. The manipulation unit is further comprised of a twin-arm manipulator mounted on a rotary table and a specimen stage with four degrees of freedom linear along X, Y and Z direction, and rotational around the Z-axis. The manipulator is driven by PZT actuators with magnifier elements and able to cover an envelope as wide as 200 /spl mu/m for each axis of X, Y and Z. Instead of doing a direct operation, the operator steers the manipulator via user-friendly interface, which is designed to absorb the optical and mechanical variations. The control unit merges the visual information of the SEM and the manipulation information from the user interface and derives the optimum locomotion from the arm for the desired operation. The image processing algorithm of the vision system can capture specified object and auto-locate it with in the scope of SEM (low vacuum type). With this function, the operator is able to concentrate on the operation without paying much attention to the changes in SEM magnification and other conditions. By feeding the force exerted on the tool tip back to the joystick, the operator actually feel the resistance so that the contact between the tool and the specimen, and force applied to the specimen are identical. The field test has demonstrated that the modules are able to cooperate each other to complete the complicated tasks.","PeriodicalId":358698,"journal":{"name":"MHS2003. Proceedings of 2003 International Symposium on Micromechatronics and Human Science (IEEE Cat. No.03TH8717)","volume":"8 4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-12-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128587367","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Fabrication of magnetic actuator for use in colon endoscope","authors":"M. Sendoh, Y. Sudi, K. Ishiyama, K. Arai","doi":"10.1109/MHS.2003.1249927","DOIUrl":"https://doi.org/10.1109/MHS.2003.1249927","url":null,"abstract":"Magnetic actuator for colonoscope navigation is fabricated. The actuator composed of tube-shape permanent magnet and spiral structure that made by rubber. The magnet is magnetized to the direction of its diameter. By applying the rotational magnetic field the machine rotate and moved in an intestine. The actuator is attached on an end of simulated endoscope. The actuator with flexible air tubes can move in small and large intestines of pig. This result suggests that the actuator have great possibility for colonoscope navigation.","PeriodicalId":358698,"journal":{"name":"MHS2003. Proceedings of 2003 International Symposium on Micromechatronics and Human Science (IEEE Cat. No.03TH8717)","volume":"2014 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-12-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125637887","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Recognizing object surface properties using impedance perception","authors":"Ryo Kikuuwe, T. Yoshikawa","doi":"10.1017/S0263574704000918","DOIUrl":"https://doi.org/10.1017/S0263574704000918","url":null,"abstract":"Using the impedance perception algorithm, which we previously proposed, the stiffness matrix that constrains the motion-force relation of the robot's end-effector is obtained on-line. This paper describes two methods of extracting information on local properties of object surfaces from the stiffness matrix when the end-effector is slid on the surfaces. At the present time, the scope is limited to two classes of surfaces; flat and convex cylindrical surfaces. Since the proposed perception technique is designed separately from control strategies, and they can be used for both autonomous and remote controlled robots. Results of preliminary experiments are presented.","PeriodicalId":358698,"journal":{"name":"MHS2003. Proceedings of 2003 International Symposium on Micromechatronics and Human Science (IEEE Cat. No.03TH8717)","volume":"43 8","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-12-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"120889453","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Development of quartz etching database and 3-D micromachining simulation system","authors":"D. Cheng, K. Sato, M. Shikida, A. Ono, Kenji Sato, K. Asaumi, Y. Iriye","doi":"10.1109/MHS.2003.1249949","DOIUrl":"https://doi.org/10.1109/MHS.2003.1249949","url":null,"abstract":"We have characterized anisotropic etching properties of single-crystal quartz by using a spherical specimen made of alpha-quartz. Spherical specimen allowed us to measure etching rates for a number of orientations with a single etching operation. Measured etching-rates further allowed us to perform complete 3-D etching simulation for arbitrary oriented quartz wafer.","PeriodicalId":358698,"journal":{"name":"MHS2003. Proceedings of 2003 International Symposium on Micromechatronics and Human Science (IEEE Cat. No.03TH8717)","volume":"50 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-12-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116426497","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Current issues of MEMS foundry network in Japan","authors":"T. Mihara, R. Ota","doi":"10.1109/MHS.2003.1249879","DOIUrl":"https://doi.org/10.1109/MHS.2003.1249879","url":null,"abstract":"The MEMS makes miniaturization, being the low in cost and the mass production of the precise mechanism parts and the modules of the machine, the optics, and fluid and so on possible. Also, it is the technology of \"pivot\" which differentiates a product and it is indispensable to strengthen the international competitiveness of the product. However, specifically in Japan, the specific company, which has the strong in-house application, was developing MEMS in large volume so far. As for this report, the intention of the MEMS foundry service industry committee which was started in July, 2002 to promote industry of MEMS in a little with numerous kind, and the best field of the participation company, an activity is explained. It is keen to contribute to the competitiveness reinforcement by the industry in a wide range of fields using MEMS by a lot of people.","PeriodicalId":358698,"journal":{"name":"MHS2003. Proceedings of 2003 International Symposium on Micromechatronics and Human Science (IEEE Cat. No.03TH8717)","volume":"19 17-19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-12-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116705227","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}