D. Cheng, K. Sato, M. Shikida, A. Ono, Kenji Sato, K. Asaumi, Y. Iriye
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Development of quartz etching database and 3-D micromachining simulation system
We have characterized anisotropic etching properties of single-crystal quartz by using a spherical specimen made of alpha-quartz. Spherical specimen allowed us to measure etching rates for a number of orientations with a single etching operation. Measured etching-rates further allowed us to perform complete 3-D etching simulation for arbitrary oriented quartz wafer.