石英蚀刻数据库及三维微加工仿真系统的开发

MHS2003. Proceedings of 2003 International Symposium on Micromechatronics and Human Science (IEEE Cat. No.03TH8717) Pub Date : 2003-12-08 DOI:10.1109/MHS.2003.1249949

D. Cheng, K. Sato, M. Shikida, A. Ono, Kenji Sato, K. Asaumi, Y. Iriye

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引用次数: 10

摘要

我们用α -石英制成的球形试样表征了单晶石英的各向异性刻蚀特性。球形试样使我们能够测量蚀刻率的若干方向与一个单一的蚀刻操作。测量的蚀刻速率进一步允许我们对任意取向的石英晶圆进行完整的三维蚀刻模拟。

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Development of quartz etching database and 3-D micromachining simulation system

We have characterized anisotropic etching properties of single-crystal quartz by using a spherical specimen made of alpha-quartz. Spherical specimen allowed us to measure etching rates for a number of orientations with a single etching operation. Measured etching-rates further allowed us to perform complete 3-D etching simulation for arbitrary oriented quartz wafer.

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MHS2003. Proceedings of 2003 International Symposium on Micromechatronics and Human Science (IEEE Cat. No.03TH8717)

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