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Design, Modeling and Testing of Polysilicon Optothermal Actuators for Power Scavenging Wireless Microrobots 电力清除无线微型机器人多晶硅光热驱动器的设计、建模与测试
2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04) Pub Date : 2004-08-25 DOI: 10.1109/ICMENS.2004.50
Francis R. Szabo, Paul E. Kladiti
{"title":"Design, Modeling and Testing of Polysilicon Optothermal Actuators for Power Scavenging Wireless Microrobots","authors":"Francis R. Szabo, Paul E. Kladiti","doi":"10.1109/ICMENS.2004.50","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.50","url":null,"abstract":"The biggest hurdle to be solved, in order to create autonomous Micro-Electro-Mechanical Systems (MEMS) microrobots, is generating power for their actuator engines. Most present actuators require orders of magnitude more power than is presently available from micropower sources. To enable smaller microrobots, this research investigated a simplified power concept that eliminates the need for on-board power supplies and control circuitry by using actuators powered wirelessly from the environment. The use of lasers to directly power micrometer scale silicon thermal actuators was explored. Optothermal actuators, intended for use on a small wirelessly propelled autonomous MEMS microrobot, were modeled, designed, fabricated and tested, using the PolyMUMPs silicon-metal chip fabrication process. A 760 µm by 710 µm prototype MEMS polysilicon-based microrobot, using optothermal actuators, was designed, fabricated and tested. Each of its parts was demonstrated to provide actuation using energy from an external laser. The optothermal actuators provided 2 µm of deflection to the microrobot drive shaft, with 60 mW of pulsed laser power. The results of these experiments demonstrated the validity of a new class of wireless polysilicon actuators for MEMS devices, which are not directly dependant on electrical power for actuation. The experiments also demonstrated a potentially viable design that could be used to propel the world’s smallest autonomous MEMS microrobot.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114969819","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 12
Dynamic Response of a Microbeam-Supported Microplate under Interfacial Microwave Load 界面微波载荷作用下微柱支撑微孔板的动态响应
2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04) Pub Date : 2004-08-25 DOI: 10.1109/ICMENS.2004.55
A. Allievi
{"title":"Dynamic Response of a Microbeam-Supported Microplate under Interfacial Microwave Load","authors":"A. Allievi","doi":"10.1109/ICMENS.2004.55","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.55","url":null,"abstract":"An analytical model has been developed to understand the rotational dynamics of a microbeam-supported rigid microplate, which is positioned across a microchannel partially filled with an isotropic liquid. Physical phenomena included in this work are those associated with surface tension, buoyancy, hydrodynamics, interfacial microwaves, and torsional stiffness of the microbeam supports. Consideration of surface tension results in nonlinear terms for the righting moment and for the forcing function terms of the ordinary differential equation of rotational motion. Response characteristics are investigated for varying microwave amplitudes and frequencies, as well as microplate and microbeam principal dimensions. Results show that the analysis presented in this work can be used in designing microdevices for measurement of fluid properties, microwave features and pulsating pressures.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116817357","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Modeling of Surface Forces between Micron-Sized Objects in Dry Condition 微米级物体在干燥条件下的表面力建模
2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04) Pub Date : 2004-08-25 DOI: 10.1109/ICMENS.2004.97
A. Hariri, J. Zu, R. Mrad
{"title":"Modeling of Surface Forces between Micron-Sized Objects in Dry Condition","authors":"A. Hariri, J. Zu, R. Mrad","doi":"10.1109/ICMENS.2004.97","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.97","url":null,"abstract":"Capillary, van der Walls (vdW) and electrostatic forces, which usually termed as surface forces, can significantly affect the behavior and performance of Micro Electro Mechanical Systems (MEMS) containing surfaces that can contact each other. Here, we are concerned with vdW force, which is the dominant surface force between conducting surfaces in the dry condition. In this study, we first review existing roughness models described by stochastic processes of Gaussian and Fractal type. Then, the vdW force is formulated using two methods by considering the first and second order probability density function (pdf) of the height distribution of rough surfaces. The resulting formulae are functions of the correlation ( ñ) between successive sampling points. By analyzing these formulae based on the correlation and other parameters, the upper and lower bound of vdW force are identified and a numericalbased closed-form formula for the upper bound is derived. Finally, various situations are discussed based on the developed equations and data from a surface micro machining process.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123663939","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Applicability of an Optimized Fiber Optic Smart Structure 一种优化的光纤智能结构的适用性
2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04) Pub Date : 2004-08-25 DOI: 10.1109/ICMENS.2004.35
Yu Fan, M. Kahrizi
{"title":"Applicability of an Optimized Fiber Optic Smart Structure","authors":"Yu Fan, M. Kahrizi","doi":"10.1109/ICMENS.2004.35","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.35","url":null,"abstract":"In recent years, fiber optic smart structure is widely studied because of its intrinsic benefits [1] [2]. One of the most striking evolvements is the technology, of which FBG (Fiber Bragg Grating) sensor systems are embedded in fiber reinforced composite materials, so that any ambience induced responses of the host structures can be monitored in real time, consequently proper actuations are initiated. Thus a neural system is realized. This work reports an entire optimization process of the FBG sensors embedded in Graphite/Epoxy composite material. Moreover, performance of the sensor system was observed and the applicability is discussed. Due to the mechanically orthotropic characteristics of the Graphite/Epoxy composite material, two FBG sensors were orthogonally embedded along the two principle axes in mid-plane of the specimen. When strain load was applied along one of the axes, longitudinal and shear responses of the structure were simultaneously monitored, hence its orthotropic properties were determined. Further, any randomly oriented strain applied to the specimen will be analytically quantified along the two sensors. Recurring to surface mounted resistance strain gage concept, the embedded FBG strain gage array was recalibrated, and its sensing alterability is quantified. This work tends to provide a quantitative discussion on FBG sensors’ residual erroneousness after an optimized embedment, the conclusion may give designers a reference to properly interpret FBG sensors’ performances, in case they are used as an embedded strain gage.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"52 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125014696","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
New Functions Elaborated in Oxide Glasses by Nanotechnology 纳米技术在氧化玻璃中的新功能
2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04) Pub Date : 2004-08-25 DOI: 10.1109/ICMENS.2004.114
J. Nishii, K. Hirao
{"title":"New Functions Elaborated in Oxide Glasses by Nanotechnology","authors":"J. Nishii, K. Hirao","doi":"10.1109/ICMENS.2004.114","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.114","url":null,"abstract":"Recent three topics of Nanotechnology Glass Project were described. (1) A proton-conducting hybrid material was fabricated using a glass plate with nano-pores. The conductivity of the hybrid glass plate was comparable to Nafion, and no corrosion or degradation observed up to 120°C. (2) Nano-particles of CdTe were synthesized in a water solution and embedded in the glass matrix using a sol-gel method. The emission quantum efficiency pf 3% was attained. (3) Deep dry etching followed by overcladding buried the DOE with a deep groove inside a Si0₂ plate, which was used for fabrication of an ultra small demultiplexer.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"52 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117237539","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
PEGylated-poly-l-lysine Dendrimers for Delivery of Chloroquine Phosphate 聚酰基化聚赖氨酸树状大分子递送磷酸氯喹
2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04) Pub Date : 2004-08-25 DOI: 10.1109/ICMENS.2004.123
D. Bhadra, S. Bhadra, N. K. Jain
{"title":"PEGylated-poly-l-lysine Dendrimers for Delivery of Chloroquine Phosphate","authors":"D. Bhadra, S. Bhadra, N. K. Jain","doi":"10.1109/ICMENS.2004.123","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.123","url":null,"abstract":"The antimalarial drugs are used for prophylactic suppressive chemotherapy of malaria but various toxicity and resistance problems associated with such chemotherapy need some sustained delivery and safer carriers. Dendrimers are recently reported as carriers for various chemotherapeutic agents. Their structures are of regular repeated molecular architecture. Due to number of – NH2 group and charged species like carbonyl groups available on dendritic structures there is huge possibilities for drug loading and drug delivery and further their chemical architecture increases stability of such carriers as compared to other conventional carriers like liposomes, nanoparticles and microparticles. The present work was undertaken to solubilize and load model drug Chloroquine phosphate (CP) and reduce drawbacks of simple drug administration.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"111 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122263185","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Analysis of Alternative Capacitor Topologies for MEMS Switches Fabricated with Printed Circuit Technology 采用印刷电路技术制造MEMS开关的备选电容拓扑分析
2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04) Pub Date : 2004-08-25 DOI: 10.1109/ICMENS.2004.31
B. Deken
{"title":"Analysis of Alternative Capacitor Topologies for MEMS Switches Fabricated with Printed Circuit Technology","authors":"B. Deken","doi":"10.1109/ICMENS.2004.31","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.31","url":null,"abstract":"New architectures to reduce the acuation voltage of a cantilever beam MEMS switch are presented. Voltage reduction is achieved through manipulation of the shape of the capacitor plates to increase the effective area and decrease the effective distance between plates. Improvements are achieved without a physical increase in footprint dimensions, beam to substrate separation, or a decrease in the spring constant of the beam. The architectures are particularly applications that require a small footprint, high degrees of electrical isolation, and low switching times.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130754271","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Hydrolyzable Polyrotaxanes Consisting of β-Cyclodextrins and Pluronic® for Drug Delivery 由β-环糊精和Pluronic&#174组成的可水解聚轮烷用于给药
2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04) Pub Date : 2004-08-25 DOI: 10.1109/ICMENS.2004.1508987
A. Ito, T. Ooya, N. Yui
{"title":"Hydrolyzable Polyrotaxanes Consisting of β-Cyclodextrins and Pluronic® for Drug Delivery","authors":"A. Ito, T. Ooya, N. Yui","doi":"10.1109/ICMENS.2004.1508987","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.1508987","url":null,"abstract":"In recent years, polyrotaxanes (PRXs) have been extensively studied as a novel supramolecular assembly that has interlocked structure between a cyclic molecule and a linear polymeric chain. Based on the interlocked structure of PRXs, one can expect excellent properties in terms of supramolecular motion of the cyclic molecules. In pharmaceutical fields, we have studied biodegradable PRXs as a drug carrier, in which many α-cyclodextrins (α-CDs) are threaded onto a poly (ethylene glycol) (PEG) capped with bulky blocking group via peptide linkages1). Drugs were immobilized α-CDs via biodegradable spacer. When the terminals of PRX were enzymatically hydrolyzed, drug-immobilized α-CDs could be released.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"153 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127272915","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Tracking Promyelocytic Leukemia Nuclear Bodies for Disease Detection: A Proof of Concept via Filtering 跟踪早幼粒细胞白血病核体用于疾病检测:通过过滤的概念验证
2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04) Pub Date : 2004-08-25 DOI: 10.1109/ICMENS.2004.147
J. Hailes, M. Kouritzin, R. Marsh, J. McCrosky
{"title":"Tracking Promyelocytic Leukemia Nuclear Bodies for Disease Detection: A Proof of Concept via Filtering","authors":"J. Hailes, M. Kouritzin, R. Marsh, J. McCrosky","doi":"10.1109/ICMENS.2004.147","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.147","url":null,"abstract":"Nonlinear filtering has proven to be a valuable tool in many applications ranging from search and rescue to performing arts. Herein we discuss an application of filtering to medical imaging. A sample problem in detecting, tracking, and characterizing the movement of promyelocytic leukemia nuclear bodies within a cell nucleus is used to demonstrate the utility of nonlinear filtering in this area. Simulation results are presented and discussed.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127151934","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Fabrications of Micro-Channel Device by Hot Emboss and Direct Bonding of PMMA 热压印与PMMA直接键合制备微通道器件
2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04) Pub Date : 2004-08-25 DOI: 10.1109/ICMENS.2004.66
J. Mizuno, T. Harada, T. Glinsner, M. Ishizuka, T. Edura, K. Tsutsui, H. Ishida, S. Shoji, Y. Wada
{"title":"Fabrications of Micro-Channel Device by Hot Emboss and Direct Bonding of PMMA","authors":"J. Mizuno, T. Harada, T. Glinsner, M. Ishizuka, T. Edura, K. Tsutsui, H. Ishida, S. Shoji, Y. Wada","doi":"10.1109/ICMENS.2004.66","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.66","url":null,"abstract":"We have fabricated and evaluated the mechanical, optical and fluidic characteristics a 50µm wide and a 30µm deep micro-channel device produced by hot emboss and direct bonding of PMMA plate with dimensions of 20mm × 20mm × 1mm. The fabricated micro-channel device was evaluated the bond strength, which was confirmed to be high enough for practical use as well as for quite severe cleaning conditions as ultrasonic cleaning in pure water. The optical loss around bonded interface was also evaluated and no increase in the light absorption was observed. The above results confirmed that the hot emboss and direct bonding technologies for micro-channel manufacturing using the PMMA plates realizes high performance micro channel devices.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"35 2","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114021938","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 14
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