{"title":"Pulsed Laser Assisted Chemical Etch for analytic surface preparation","authors":"R. Chivas, S. Silverman, N. Dandekar","doi":"10.1109/IRPS.2012.6241787","DOIUrl":"https://doi.org/10.1109/IRPS.2012.6241787","url":null,"abstract":"Pulsed Laser Assisted Chemical Etching (PLACE) is an advanced method of surface preparation for analytic investigations such as: Focused Ion Beam (FIB) circuit edit, Failure Analysis chemical processes (poly-Si etch), Backside SIMS and Optical techniques such as Photoemission Microscopy. PLACE can achieve ultra-high purity and fine dimensional control since it is a dry process relying on pyrolytic vapor phase reactions initiated, and constrained, by a pulsed laser.","PeriodicalId":341663,"journal":{"name":"2012 IEEE International Reliability Physics Symposium (IRPS)","volume":"90 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-04-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127501413","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Fundamental failure mechanisms limiting maximum voltage operation in AlGaN/GaN HEMTs","authors":"M. D. Hodge, R. Vetury, J. Shealy","doi":"10.1109/IRPS.2012.6241816","DOIUrl":"https://doi.org/10.1109/IRPS.2012.6241816","url":null,"abstract":"The authors report on the fundamental failure mechanisms limiting maximum applied voltage in AlGaN/GaN HEMTs. Device failure in high voltage off state conditions was studied by controlling drain leakage current and maximum applied drain voltage simultaneously. It was found that failure was associated with loss in gate control of channel current and a permanent degradation of gate diode leakage current. No permanent significant change until device failure was observed in ON-state parameters such as Ron, Idss and Idmax, thus distinguishing this failure mode from the inverse pieozo-electric effect as reported in literature.","PeriodicalId":341663,"journal":{"name":"2012 IEEE International Reliability Physics Symposium (IRPS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-04-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130027487","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Aging statistics based on trapping/detrapping: Silicon evidence, modeling and long-term prediction","authors":"J. Velamala, K. Sutaria, T. Sato, Yu Cao","doi":"10.1109/IRPS.2012.6241795","DOIUrl":"https://doi.org/10.1109/IRPS.2012.6241795","url":null,"abstract":"The aging process due to Negative Bias Temperature Instability (NBTI) exhibits a significant amount of variability and thus poses a dramatic challenge for long-term reliability prediction from short-term stress measurement. To develop a robust prediction method in this circumstance, this work first collects statistical device data from a 65nm test chip with a resolution of 0.2mV in threshold voltage (Vth) measurement. By comparing model prediction from short-term stress data (<;20k second) with direct long-term measurement (up to 200k second), we conclude that (1) the degradation follows a logarithmic dependence on time, as opposed to the conventional power law; (2) the Reaction-Diffusion (R-D) based tn model significantly overestimates the aging rate and exaggerates its variance; (3) the log(t) model, derived from the trapping/de-trapping (T-D) mechanism, correctly captures the aging variability due to the randomness in number of available traps, and accurately predicts the mean and the variance of Vth shift. These results guide the development of a new aging model for robust long-term lifetime prediction.","PeriodicalId":341663,"journal":{"name":"2012 IEEE International Reliability Physics Symposium (IRPS)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-04-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132901762","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"The impact of 45 to 28nm node-scaling on the electromigration of flip-chip bumps","authors":"C. Hau-Riege, Y. Yau, L. Zhao","doi":"10.1109/IRPS.2012.6241793","DOIUrl":"https://doi.org/10.1109/IRPS.2012.6241793","url":null,"abstract":"The impact of 45nm to 28nm node-scaling on the electromigration of lead-free flip-chip bumps has been studied. Specifically, different UBM and PI open sizes as well as plated Ni and sputtered Cu UBM thicknesses were experimentally investigated. UBM sizes between 84 and 65 μm directly impact lifetime, while PI open diameters between 30 to 20 μm did not. A current-density exponent (n) value of 1 was measured when Joule heating is neglected, thereby suggesting a void-growth-limited mechanism. This value increases to 2 or greater when Joule heating is included, showing that Joule heating can strongly impact Imax extrapolations. Also, a thin plated Ni layer (1.5μm) and a thin sputtered Cu layer (2kÅ) independently led to significant early fails due to improper barrier coverage (rather than the thickness of the layer), which enhanced intermetallic transformation and therefore electromigration failure.","PeriodicalId":341663,"journal":{"name":"2012 IEEE International Reliability Physics Symposium (IRPS)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-04-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121704659","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Soft Defect Localization (SDL) applied on analog and mixed-mode ICs failure analysis","authors":"Jinglong Li, Chunlei Wu","doi":"10.1109/IRPS.2012.6241907","DOIUrl":"https://doi.org/10.1109/IRPS.2012.6241907","url":null,"abstract":"Soft Defect Localization (SDL) has been applied on digital ICs failure analysis. But for analog and mixed-mode ICs, it is not so common. The analog failure types and characters are various, such as pulse width, amplitude, delay time, and so on. It is difficult to detect them directly by SDL system. In this paper, two FA cases are introduced to explain how to perform SDL on analog failures.","PeriodicalId":341663,"journal":{"name":"2012 IEEE International Reliability Physics Symposium (IRPS)","volume":"40 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-04-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125079623","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Min-log approach to modeling dielectric breakdown data","authors":"E. Yashchin, Baozhen Li, J. Stathis, E. Wu","doi":"10.1109/IRPS.2012.6241911","DOIUrl":"https://doi.org/10.1109/IRPS.2012.6241911","url":null,"abstract":"The process of dielectric breakdown in thin films has been studied extensively in the literature. Typically, these processes are modeled in terms of stochastic quantities related to a Weibull distribution. In many cases the direct Weibull approach is not capable of explaining the observed times to dielectric breakdown (TDDB), leading to the necessity to introduce more complex models. This, in turn, leads to considerable complications in the process of modeling and analyzing this phenomenon. In this article we present an approach to analysis of TDDB data based on the assumption that a sample can be viewed as a collection of competing cells, where the same stochastic process of degradation is taking place in the individual cells. Every cell, therefore, has its individual time to failure, and the cell having the shortest time is the one that actually causes the failure. In many cases, this is the only lifetime that is actually observable, as the sample and the ongoing processes in the cells could be affected by the dielectric discharge in one of them. We consider the situation where times of breakdown of individual cells can be modeled by a lognormal distribution and develop an approach based on the finite-sample distribution of minimum. This model leads to a relatively simple explanation of the TDDB data, including both low and high percentiles. We develop procedures for inference based on complete or right-censored TDDB data and illustrate its application for data obtained in the course of stress-based experiments.","PeriodicalId":341663,"journal":{"name":"2012 IEEE International Reliability Physics Symposium (IRPS)","volume":"79 1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-04-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128103836","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
M. Bagatin, S. Gerardin, A. Paccagnella, V. Ferlet-Cavrois
{"title":"Alpha-induced soft errors in Floating Gate flash memories","authors":"M. Bagatin, S. Gerardin, A. Paccagnella, V. Ferlet-Cavrois","doi":"10.1109/IRPS.2012.6241811","DOIUrl":"https://doi.org/10.1109/IRPS.2012.6241811","url":null,"abstract":"We study the sensitivity to alpha particles of state-of-the-art Multi-Level Cell (MLC) and Single-Level Cell (SLC) NAND Floating Gate (FG) flash memories with NAND architecture. We show that starting from a feature size of 50 nm, MLC flash memories are sensitive to alpha particles, whereas SLC devices do not show any sensitivity down to a feature size of 34 nm. We calculate the alpha-induced soft error rates on the field, discuss technology trends in comparison to heavy-ions.","PeriodicalId":341663,"journal":{"name":"2012 IEEE International Reliability Physics Symposium (IRPS)","volume":"341 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-04-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134151856","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"A study of junction photocurrent changes caused by defective gate oxide","authors":"H. Lin","doi":"10.1109/IRPS.2012.6241786","DOIUrl":"https://doi.org/10.1109/IRPS.2012.6241786","url":null,"abstract":"It has been widely revealed that the Atomic Force Microscope (AFM) laser beam may induce photoperturbation which can significantly deteriorate the characterization accuracy of AFM-based tools. This paper gives direct evidence that the optical excitation process may yield a temporary source of minority carriers, and that the inversion layer can be formed beneath the oxide layer of the NMOS transistor. By taking advantage of this non-negligible photoelectric effect, a novel approach that is likely to be used to evaluate gate oxide quality or gate oxide reliability was developed. In this study, it was observed that defective gate oxide can cause junction photocurrent changes, or the junction photocurrent can be correlated to gate oxide quality.","PeriodicalId":341663,"journal":{"name":"2012 IEEE International Reliability Physics Symposium (IRPS)","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-04-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115224918","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Scaling effect and circuit type dependence of neutron induced single event transient","authors":"Hideyuki Nakamura, Taiki Uemura, Kan Takeuchi, Toshikazu Fukuda, Shigetaka Kumashiro, Tohru Mogami","doi":"10.1109/IRPS.2012.6241812","DOIUrl":"https://doi.org/10.1109/IRPS.2012.6241812","url":null,"abstract":"Neutron induced single event transient (SET) has been measured on NAND and inverter (INV) chain with changing fan-out, drive strength, size of drain diffusion area, temperature and VDD on 40nm and 90nm bulk CMOS technology. As the pulse width distribution varies with the length of SET target chain as well, it is important to use the chain length similar with the actual logic circuits. Using tens of stages of target chain, pulses wider than 150ps have been rarely observed. The results of the measurement show that the SER of SET changes depending on the cell type and fan-out. SER of SET in combinational logic circuits decreases by half from 90nm to 40nm for the same gate count and the same clock frequency.","PeriodicalId":341663,"journal":{"name":"2012 IEEE International Reliability Physics Symposium (IRPS)","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-04-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114280612","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
R. O'Connor, K. Cherkaoui, R. Nagle, M. Schmidt, I. Povey, M. Pemble, P. Hurley
{"title":"Improved reliability of Al2O3/InGaAs/InP MOS structures through in-situ forming gas annealing","authors":"R. O'Connor, K. Cherkaoui, R. Nagle, M. Schmidt, I. Povey, M. Pemble, P. Hurley","doi":"10.1109/IRPS.2012.6241923","DOIUrl":"https://doi.org/10.1109/IRPS.2012.6241923","url":null,"abstract":"In this paper we report on the leakage currents and time dependent dielectric breakdown characteristics of Al<sub>2</sub>O<sub>3</sub>/InGaAs/InP MOS structures where the Al<sub>2</sub>O<sub>3</sub> dielectric is formed by atomic layer deposition (ALD) and the structures were annealed in-situ in the ALD reactor after Al<sub>2</sub>O<sub>3</sub> growth. The effect of an in-situ forming gas (H<sub>2</sub>/N<sub>2</sub>) anneals and an in-situ H<sub>2</sub>/Ar plasma anneals was examined. The in-situ forming gas anneal was found to improve the time dependent dielectric breakdown characteristics without significant degradation of the gate stack capacitance. We also show that the H<sub>2</sub>/Ar plasma treatment results in a marked reliability improvement but also causes a significant degradation of the gate stack capacitance which is confirmed by TEM to be a result on an increased physical thickness of the gate dielectric.","PeriodicalId":341663,"journal":{"name":"2012 IEEE International Reliability Physics Symposium (IRPS)","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-04-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123630176","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}