2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)最新文献_第6页

A temperature-stable mems oscillator on an ovenized micro-platform using a PLL-based heater control system 基于锁相环加热器控制系统的温度稳定微机电系统振荡器

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7051078

Zhengzheng Wu, M. Rais-Zadeh

引用次数: 16

Self-lifting artificial insect wings via electrostatic flapping actuators 通过静电扑动装置的自举人工昆虫翅膀

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7050876

Xiaojun Yan, Mingjing Qi, Liwei Lin

引用次数: 35

Electroplated stencil reinforced with arch structures for printing fine and long conductive paste 用于印刷细、长导电浆料的拱形结构增强电镀钢板

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7050941

Pi-Hsun Chen, Che-Hsin Lin

{"title":"Electroplated stencil reinforced with arch structures for printing fine and long conductive paste","authors":"Pi-Hsun Chen, Che-Hsin Lin","doi":"10.1109/MEMSYS.2015.7050941","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7050941","url":null,"abstract":"This study presents an MEMS-based stencil reinforced with arch structures and a surrounding buffer reservoir for printing conductive paste of fine and long lines. The developed reinforced stencil successfully solves the problems came with the conventional stencil structure including limited printable line width and ease of fracture. A novel process was developed to fabricate a thin yet robust electroplated stencil by using two AZ4620 layers and one SU-8 layer as the electroplating molds. A precise stencil with a long and high-density line structure can be produced with the developed method. The printing results show that the developed stencil is capable of printing parallel lines of 20 μm in pitch. The printable length of the fine parallel lines is longer than 10 mm with the arch structure reinforced stencil. In addition, the developed stencil is capable of printing closed ring patterns with small pitch, which is not possible to be printed using conventional stencil or screen printing technologies. The MEMS-based stencil developed in the present study will give substantial impact on the paste printing technologies.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131061394","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

Out-of-plane micro-force function generator with inherent self-feedback for micro-deformation modifying 具有固有自反馈的面外微力函数发生器，用于微变形修正

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7051146

Xinghua Wang, D. Xiao, Xuezhong Wu, Z. Hou, Zhihua Chen, Hanhui He

引用次数: 3

Large full scale, linearity and cross-axis rejection in low-power 3-axis gyroscopes based on nanoscale piezoresistors 基于纳米压阻的低功耗三轴陀螺仪的大满量程、线性和跨轴抑制

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7050880

S. Dellea, F. Giacci, A. Longoni, P. Rey, A. Berthelot, G. Langfelder

引用次数: 9

Integrated piezoelectrically driven acousto-optic modulator 集成式压电驱动声光调制器

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7051125

Siddhartha Ghosh, G. Piazza

引用次数: 1

Simultaneous multi-frequency switchable oscillator and FSK modulator based on a capacitive-gap MEMS disk array 基于电容隙MEMS磁盘阵列的同步多频可切换振荡器和FSK调制器

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7051136

T. Naing, T. Rocheleau, C. Nguyen

{"title":"Simultaneous multi-frequency switchable oscillator and FSK modulator based on a capacitive-gap MEMS disk array","authors":"T. Naing, T. Rocheleau, C. Nguyen","doi":"10.1109/MEMSYS.2015.7051136","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7051136","url":null,"abstract":"An electromechanical circuit constructed from array-composites of capacitive-gap micromechanical resonators with differing frequencies, wired in closed-loop feedback with a single ASIC amplifier, provides a first MEMS-based multi-frequency oscillator generating simultaneous oscillation outputs in the vicinity of 61 MHz. The use of only one amplifier for all frequencies (as opposed to one for each frequency) saves substantial power and is made possible by exploiting softening and damping non-linearities in the MEMS resonators, often considered a limitation, but here providing amplitude limiting that prevents amplifier desensitization to other frequencies. Furthermore, electrical stiffness-based frequency tuning enables Frequency-Shift Keyed (FSK) modulation of the output waveform, offering a space and power-efficient multichannel transmitter, as desired for mobile applications requiring long battery life, such as wireless sensor nodes. Indeed, while capable of multiple simultaneous and independent frequency outputs, this oscillator consumes only 137 μW, which is one-third that of previous multi-frequency efforts that only produce one frequency at a time [1].","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"217 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123018190","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 3

Chemically responsive protein-photoresist hybrid actuator 化学反应蛋白-光刻胶混合驱动器

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7050993

D. Serien, S. Takeuchi

引用次数: 3

Anomalous resistance change of ultrastrained individual MWCNT using MEMS-based strain engineering 基于mems应变工程的超应变单壁碳纳米管的异常电阻变化

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7050966

K. Yamauchi, T. Kuno, K. Sugano, Y. Isono

{"title":"Anomalous resistance change of ultrastrained individual MWCNT using MEMS-based strain engineering","authors":"K. Yamauchi, T. Kuno, K. Sugano, Y. Isono","doi":"10.1109/MEMSYS.2015.7050966","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7050966","url":null,"abstract":"This research clarified the anomalous electric resistance change of ultrastrained multi-walled carbon nanotube (MWCNT), as well as its mechanical properties, using the Electrostatically Actuated NAnotensile Testing device (EANAT) mounted on the in-situ SEM nanomanipulation system. The Young's modulus of MWCNT and its shear stress during interlayer sliding deformation were estimated from the load-displacement curve. The electrical resistance of the MWCNT was 215 kΩ without strain, which was similar to the previously reported value, however the anomalous resistance change was observed under enormous strain. Although the resistance change ratio was almost constant during interlayer sliding of the MWCNT, it specifically showed a sharp raise at the end of the sliding in spite of the MWCNT not breaking mechanically. The molecular dynamics (MD) simulation provided a good understanding that the atomic reconfiguration due to the hard sticking at the edge of extracted outer layer of MWCNT might induce the sharp raise of resistance without its mechanically breaking. This result reported here is extremely important for reliability of MWCNT interconnects.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129047620","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Ultrasensitive surface-enhanced Raman spectroscopy using directionally arrayed gold nanoparticle dimers 使用定向排列金纳米颗粒二聚体的超灵敏表面增强拉曼光谱

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7051029

K. Sugano, D. Matsui, T. Tsuchiya, O. Tabata

引用次数: 5