集成式压电驱动声光调制器

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI:10.1109/MEMSYS.2015.7051125

Siddhartha Ghosh, G. Piazza

{"title":"集成式压电驱动声光调制器","authors":"Siddhartha Ghosh, G. Piazza","doi":"10.1109/MEMSYS.2015.7051125","DOIUrl":null,"url":null,"abstract":"This paper presents a new type of acousto-optic modulator based on the conjunction of a piezoelectric contour mode resonator (CMR) with a photonic whispering gallery mode resonator (WGMR). The monolithic device fabricated in aluminum nitride (AlN) exhibits the coupling of piezoelectrically-generated lateral vibrations into a traveling-wave photonic ring resonator in a fully-integrated platform with electrodes directly patterned on the CMR body. We demonstrate the optical sensing of a piezoelectrically actuated mechanical mode at 654 MHz, enabling new possibilities for MEMS-based RF-photonics applications or new degrees of control of phonon-photon interactions in the field of optomechanics.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"35 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Integrated piezoelectrically driven acousto-optic modulator\",\"authors\":\"Siddhartha Ghosh, G. Piazza\",\"doi\":\"10.1109/MEMSYS.2015.7051125\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents a new type of acousto-optic modulator based on the conjunction of a piezoelectric contour mode resonator (CMR) with a photonic whispering gallery mode resonator (WGMR). The monolithic device fabricated in aluminum nitride (AlN) exhibits the coupling of piezoelectrically-generated lateral vibrations into a traveling-wave photonic ring resonator in a fully-integrated platform with electrodes directly patterned on the CMR body. We demonstrate the optical sensing of a piezoelectrically actuated mechanical mode at 654 MHz, enabling new possibilities for MEMS-based RF-photonics applications or new degrees of control of phonon-photon interactions in the field of optomechanics.\",\"PeriodicalId\":337894,\"journal\":{\"name\":\"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)\",\"volume\":\"35 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-03-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.2015.7051125\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2015.7051125","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 1

摘要

本文提出了一种新型声光调制器，该调制器是基于压电轮廓模谐振器(CMR)和光子低语通道模谐振器(WGMR)的结合。用氮化铝(AlN)制造的单片器件显示出压电产生的横向振动耦合到一个完全集成的平台上的行波光子环谐振器中，电极直接图案化在CMR体上。我们展示了654 MHz压电驱动机械模式的光学传感，为基于mems的射频光子学应用或光力学领域声子-光子相互作用的新控制程度提供了新的可能性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Integrated piezoelectrically driven acousto-optic modulator

This paper presents a new type of acousto-optic modulator based on the conjunction of a piezoelectric contour mode resonator (CMR) with a photonic whispering gallery mode resonator (WGMR). The monolithic device fabricated in aluminum nitride (AlN) exhibits the coupling of piezoelectrically-generated lateral vibrations into a traveling-wave photonic ring resonator in a fully-integrated platform with electrodes directly patterned on the CMR body. We demonstrate the optical sensing of a piezoelectrically actuated mechanical mode at 654 MHz, enabling new possibilities for MEMS-based RF-photonics applications or new degrees of control of phonon-photon interactions in the field of optomechanics.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

自引率

0.00%

发文量