基于纳米压阻的低功耗三轴陀螺仪的大满量程、线性和跨轴抑制

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI:10.1109/MEMSYS.2015.7050880

S. Dellea, F. Giacci, A. Longoni, P. Rey, A. Berthelot, G. Langfelder

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引用次数: 9

摘要

这项工作提出了基于纳米级压阻读出的面内和面外科里奥利速率陀螺仪，并在底部晶圆(传感器形成的地方)和顶部晶圆(布线和金属衬垫制造的地方)之间使用共晶键合。陀螺仪具有新颖的设计与中央杠杆感框架，以最大限度地提高设备的对称性和紧凑性。压阻式纳米计沿杠杆系统的位置优化了比例系数。在±3000 dps的全量程(FSR)上运行显示出相当有竞争力的性能，线性误差低于0.25%，交叉轴抑制比最先进的消费陀螺仪好50倍。

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Large full scale, linearity and cross-axis rejection in low-power 3-axis gyroscopes based on nanoscale piezoresistors

This work presents in-plane and out-of-plane Coriolis rate gyroscopes based on nano-scale piezoresistive readout and using an eutectic bonding between the bottom wafer, where the sensor is formed, and the cap wafer, where routing and metal pads are fabricated. The gyroscopes feature a novel design with a central levered sense frame, to maximize the device symmetry and compactness. The position of the piezoresistive nano-gauges along the lever system optimizes the scale-factor. Operation on a ± 3000 dps full-scale-range (FSR) demonstrates quite competitive performance, with a linearity error lower than 0.25% and a cross-axis rejection 50× better than state-of-the art consumer gyroscopes.

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来源期刊

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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