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2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)最新文献

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Vacuum cavity formation for high thermal isolation in flexible thermal sensor 在柔性热传感器中形成高热隔离的真空腔
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7051091
P. Kim, S. Shibata, M. Shikida
{"title":"Vacuum cavity formation for high thermal isolation in flexible thermal sensor","authors":"P. Kim, S. Shibata, M. Shikida","doi":"10.1109/MEMSYS.2015.7051091","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7051091","url":null,"abstract":"For producing a variety of flexible MEMS sensors, we previously developed a process that uses a Cu On Polyimide (COP) substrate as a starting material and sacrificial Cu etching to produce a cavity and electrical feed-through structures on the substrate [1]. In the current study, we introduced a vacuum cavity realizing high thermal isolation in a flexible thermal sensor, for the first time. Parylene thickness as a function of the amount of dimer usage was studied, and a preliminary experiment exploring the fabrication of the vacuum cavity structure was performed. These results, demonstrate that we successfully produced a vacuum cavity in the thermal sensor. To determine the effect of the thermal isolation by vacuum cavity to thermal sensor, we applied it to a flow sensor, and found that we can reduce the response time to one-half by introducing the vacuum cavity in thermal sensor.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"105 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127333005","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
A 7ppm, 6°/hr frequency-output MEMS gyroscope 7ppm, 6°/小时频率输出MEMS陀螺仪
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7050879
I. Izyumin, M. Kline, Y. Yeh, B. Eminoglu, C. Ahn, V. Hong, Yushi Yang, E. Ng, T. Kenny, B. Boser
{"title":"A 7ppm, 6°/hr frequency-output MEMS gyroscope","authors":"I. Izyumin, M. Kline, Y. Yeh, B. Eminoglu, C. Ahn, V. Hong, Yushi Yang, E. Ng, T. Kenny, B. Boser","doi":"10.1109/MEMSYS.2015.7050879","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7050879","url":null,"abstract":"We report the first frequency-output MEMS gyroscope to achieve <;7 ppm scale factor accuracy and <; 6°/hr bias stability with a 3.24mm2 transducer. By implementing continuous-time mode reversal in an FM gyro, the rate signal is modulated away from DC, making the system insensitive to the resonant frequency of the transducer. The scale factor is almost entirely ratiometric, depending primarily on the mechanical angular gain factor of the transducer and the accuracy of the timing reference. Scale factor sensitivity to variations in quality factor, electro-mechanical coupling coefficients, and circuit drift is significantly reduced compared to conventional open-loop and force-rebalance operating modes.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"71 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126229719","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 42
Preparation of wafer level glass-embedded high-aspect-ratio passives using a glass reflow process 利用玻璃回流工艺制备晶圆级嵌玻璃高纵横比钝化材料
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7050981
Mengying Ma, J. Shang, Bin Luo
{"title":"Preparation of wafer level glass-embedded high-aspect-ratio passives using a glass reflow process","authors":"Mengying Ma, J. Shang, Bin Luo","doi":"10.1109/MEMSYS.2015.7050981","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7050981","url":null,"abstract":"This paper presents an innovative, uncomplicated and inexpensive method based on a glass reflow process to fabricate glass-embedded passives for RF MEMS packaging. Experimental results show that various glass-embedded passives, including annular cylindrical and coaxial cylindrical conductive through-holes, plate and coaxial torus trench capacitors, square spiral, circular spiral and meander trench inductors, and filters, can be manufactured void-free with vertical and smooth sidewall and large signal pathways. This glass-embedded design implements passives with large thickness and provides much surface space for 3D MEMS integration. The HFSS simulation results show that a minor thickness increase contributes to a large increase in Q and a relatively small decrease in L. The best Q (38.9-83.9) and L (19.9-15 nH) were achieved by using square spiral inductors.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"38 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125894329","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Highly sensitive sers Diagnosis for Bacteria by three dimensional Nano-Mushrooms and Nano-Stars-Array sandwiched on Bacterial Aggregation 三维纳米蘑菇和夹在细菌聚集体上的纳米星形阵列对细菌的高灵敏度sers诊断
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7050927
Chun-Wei Lee, Jen-Kuei Wu, F. Tseng
{"title":"Highly sensitive sers Diagnosis for Bacteria by three dimensional Nano-Mushrooms and Nano-Stars-Array sandwiched on Bacterial Aggregation","authors":"Chun-Wei Lee, Jen-Kuei Wu, F. Tseng","doi":"10.1109/MEMSYS.2015.7050927","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7050927","url":null,"abstract":"This paper reports a highly sensitive SERS Diagnosis system by incorporating three dimensional Nano-Mushrooms and Nano-Stars-Array sandwiched on Bacterial Aggregation. Through the action of ACEOF and nano-mushroom/bacteria/nano-stars-array self-aggregation process, the signal can be much enhanced by 5 orders of magnitude in 5 minutes. Detection limit can approach 1 bacterium/ml from the analysis result.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"149 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122462521","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Simultaneous impedance spectroscopy and stimulation of human iPS-derived cardiac 3D spheroids in hanging-drop networks 吊坠网络中人类ips衍生的心脏三维球体的同步阻抗谱和刺激
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7050928
S. C. Burgel, Yannick R. F. Schmid, I. Agarkova, D. Fluri, J. Kelm, A. Hierlemann, O. Frey
{"title":"Simultaneous impedance spectroscopy and stimulation of human iPS-derived cardiac 3D spheroids in hanging-drop networks","authors":"S. C. Burgel, Yannick R. F. Schmid, I. Agarkova, D. Fluri, J. Kelm, A. Hierlemann, O. Frey","doi":"10.1109/MEMSYS.2015.7050928","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7050928","url":null,"abstract":"Here, we present electrical impedance spectroscopy (EIS) data of human iPS-derived cardiac 3D spheroids with electric stimulation integrated in a hanging drop network. Microscopy videos of the beating spheroids were correlated with synchronously obtained EIS recordings. For stimulation, the spheroid was exposed to a continuous sinusoidal electric field - in contrast to traditional pulse trains. This stimulating field was supplied via the same electrodes that were used for the EIS recordings. Our measurements revealed a beating frequency modulation upon tuning the stimulation signal amplitude.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123765649","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Self-mixing by on-chip preparation of aqueous two phase systems and its influence on extraction kinetics 片上自混合制备水两相体系及其对萃取动力学的影响
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7051013
Pavithra Wijethunga, H. Moon
{"title":"Self-mixing by on-chip preparation of aqueous two phase systems and its influence on extraction kinetics","authors":"Pavithra Wijethunga, H. Moon","doi":"10.1109/MEMSYS.2015.7051013","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7051013","url":null,"abstract":"This paper introduces an advantageous self-mixing phenomenon created during the formation of aqueous two-phase systems in a digital microfluidic device, for the first time. The influence of such self-mixing on enhancement of on-chip extraction kinetics is quantified and reported, highlighting a significant mixing capability in the absence of forced mixing. Results suggest potential applications of the self-mixing concept in portable microfluidics, where implementing complicated mixing sequences or device geometries are problematic.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"49 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128386991","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
The Capillary number effect on the capture efficiency of cancer cells on composite microfluidic filtration chips 毛细管数对复合微流控过滤芯片上癌细胞捕获效率的影响
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7050989
Cong Zhao, Rui Xu, Kui Song, Dayu Liu, Shuo Ma, Chen Tang, Chun Liang, Y. Zohar, Yi-Kuen Lee
{"title":"The Capillary number effect on the capture efficiency of cancer cells on composite microfluidic filtration chips","authors":"Cong Zhao, Rui Xu, Kui Song, Dayu Liu, Shuo Ma, Chen Tang, Chun Liang, Y. Zohar, Yi-Kuen Lee","doi":"10.1109/MEMSYS.2015.7050989","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7050989","url":null,"abstract":"We present a systematic study of the Capillary number (Ca) effect on the capture efficiency of cancer cells on a composite microfluidic filtration chip. By altering the Ca in microchip experiments, the balance between the viscous force and the cell cortical tension affecting the capture efficiency has been investigated experimentally and analyzed theoretically. A `Phase Diagram' for the capture efficiency of microfiltration chips is presented, for the first time, as a function of the normalized cell diameter and Ca. A critical value of Ca, around 0.03~0.04, has been identified for enhancing the capture efficiency of cancer cells. The phase diagram is found to be consistent with the results of cancer-cell capture in microfiltration systems reported previously by others. The diagram can be a useful tool for designing the next generation microfiltration devices for isolating circulating tumor cells.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"94 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133234206","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Ultracompact optoflex neural probes for high-resolution electrophysiology and optogenetic stimulation 用于高分辨率电生理和光遗传刺激的超紧凑型光弯曲神经探针
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7051049
M. Chamanzar, Daniel J. Denman, T. Blanche, M. Maharbiz
{"title":"Ultracompact optoflex neural probes for high-resolution electrophysiology and optogenetic stimulation","authors":"M. Chamanzar, Daniel J. Denman, T. Blanche, M. Maharbiz","doi":"10.1109/MEMSYS.2015.7051049","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7051049","url":null,"abstract":"We report on the development of high-density neural probes for distributed neuronal recording and stimulation. Our hybrid silicon-parylene probes provide high spatial resolution and incorporate a monolithically integrated flexible cable to address the challenge of stable recordings in chronic neural implants. We address a long-standing but often overlooked issue in parylene processing to realize reliable multilayer interconnects. We also discuss the design of ultracompact parylene optical waveguides for localized optogenetic stimulation of neurons. We demonstrate in-vivo electrophysiology recordings in mice.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134519386","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 27
Self-assembly of microcomponents using the entropic effect 利用熵效应的微组件的自组装
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1299/JSMEMNM.2015.7._30AM2-PN-_7
U. Okabe, T. Okano, H. Suzuki
{"title":"Self-assembly of microcomponents using the entropic effect","authors":"U. Okabe, T. Okano, H. Suzuki","doi":"10.1299/JSMEMNM.2015.7._30AM2-PN-_7","DOIUrl":"https://doi.org/10.1299/JSMEMNM.2015.7._30AM2-PN-_7","url":null,"abstract":"We propose the use of the entropic effect (the depletion volume effect), which is at work in the assembly of biomolecules, for the self-assembly of artificially engineered microcomponents. When the solution contains macromolecule at relatively high concentration, microcomponents formed assembled structures. The bonding energy is not originated from the surface; it is generated by increasing the translational entropy of macromolecules in the solution. We expect that use of the depletion volume effect promotes the search of the global free-energy minimum in the system by avoiding being trapped to the local minima in the self-assembly process.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132289115","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Microfabricated liquid chamber utilizing solvent-drying for in-situ TEM imaging of nanoparticle self-assembly 利用溶剂干燥技术制备纳米粒子自组装原位TEM成像的微腔
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7050872
Won Chul Lee, Jungwon Park, D. Weitz, S. Takeuchi, A. Alivisatos
{"title":"Microfabricated liquid chamber utilizing solvent-drying for in-situ TEM imaging of nanoparticle self-assembly","authors":"Won Chul Lee, Jungwon Park, D. Weitz, S. Takeuchi, A. Alivisatos","doi":"10.1109/MEMSYS.2015.7050872","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7050872","url":null,"abstract":"This work presents a microfabricated liquid-sample chamber for real-time TEM (Transmission Electron Microscopy) of nanoscale processes driven by liquid evaporation. Previous liquid-microchambers for TEM hold liquid samples in fully-closed (vacuum-tight) micro/nano-scale structures, thus evaporation-driven nanoscale phenomena couldn't be studied. The present work uses intended leakage/failure in bonding and e-beam induced heating in order to generate solvent-drying during TEM imaging, and the captured real-time nanometer-scale movies visualize critical steps in the self-assembly process of 2D nanoparticle arrays including the two-step crystallization process.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129625327","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
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