2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)最新文献_第8页

A novel fabrication and wafer level hermetic sealing method for SOI-MEMS devices using SOI cap wafers 一种利用SOI帽晶圆制造SOI- mems器件的新型晶圆级密封方法

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7050976

M. M. Torunbalci, S. E. Alper, T. Akin

引用次数: 5

Room temperature synthesis of silicon dioxide thin films for MEMS and silicon surface texturing MEMS用二氧化硅薄膜的室温合成及硅表面变形

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7050970

A. Ashok, P. Pal

引用次数: 2

Two-dimensional MoS2 nanomechanical resonators freelysuspended on microtrenches on flexible substrate 二维二硫化钼纳米机械谐振器自由悬浮在柔性衬底上的微沟槽上

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7051099

R. Yang, Zenghui Wang, Peng Wang, R. Lujan, T. Ng, P. Feng

{"title":"Two-dimensional MoS2 nanomechanical resonators freelysuspended on microtrenches on flexible substrate","authors":"R. Yang, Zenghui Wang, Peng Wang, R. Lujan, T. Ng, P. Feng","doi":"10.1109/MEMSYS.2015.7051099","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7051099","url":null,"abstract":"This digest paper reports on the first high-frequency nanomechanical resonators based on molybdenum disulfide (MoS2) crystalline flakes freely-suspended on microtrenches (~13μm wide and 14μm deep) fabricated on flexible substrate, with bendability and stretchability. Through investigations of the device resonances via optical excitation and detection by ultrasensitive laser interferometry, we first observe multimode resonances up to ~50MHz with the polydimethylsiloxane (PDMS) substrate under different bending and stretching conditions. The device resonance frequencies (fres) first increase and then stabilize while quality (Q) factors are enhanced with PDMS trench widening of up to 161% in the region away from the MoS2 flake and 61% at the MoS2 flake edge, without breaking the device. This platform could facilitate investigations of the strain limits in devices, strain-induced bandgap tuning in two-dimensional (2D) crystals, and strain-engineered performance enhancement (e.g., fres, Q, and mobility) in 2D resonators. Furthermore, it is well suited for exploring new 2D flexible and wearable electronic components such as strain gauges and resonant transducers.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132120213","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 8

Droplet flow focusing for molecular binding detection 液滴流动聚焦用于分子结合检测

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7050929

Sunggu Kim, Junghoon Lee

引用次数: 0

A low-noise sub-500µW lorentz force based integrated magnetic field sensing system 一种低噪声低于500 μ W的基于洛伦兹力的集成磁场传感系统

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7051113

S. Brenna, P. Minotti, A. Bonfanti, G. Laghi, G. Langfelder, A. Longoni, A. Lacaita

引用次数: 4

Microfluidic switching devices showing controllable hysteresis 具有可控磁滞的微流控开关装置

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7051009

Salvador Ortiz, J. Lell

引用次数: 0

Displacement magnification of gel actuator using pNIPAAm-SU8 hybrid structure 采用pNIPAAm-SU8混合结构的凝胶致动器位移放大

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7051151

Takanobu Kogure, Ryoya Okada, S. Maeda, S. Nagasawa

引用次数: 0

Mass-fabrication compatible mechanism for converting in-plane to out-of-plane motion 批量制造用于将平面内运动转换为平面外运动的兼容机构

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7051104

Inbar Hotzen, O. Ternyak, S. Shmulevich, D. Elata

引用次数: 10

In vitro dynamic fertilization by using EWOD device 利用EWOD装置进行体外动态受精

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7051006

Lung-Yuan Chung, Hsien-Hua Shen, Yu-Hsiang Chung, Chihchen Chen, Chia-Hsien Hsu, Hong-Yuan Huang, D. Yao

引用次数: 2

On-chip enucleation using an untethered microrobot incorporated with an acoustically oscillating bubble 利用无系绳微型机器人结合声振荡气泡进行片上去核

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2015-03-02 DOI: 10.1109/MEMSYS.2015.7051145

I. Park, Young Rang Lee, Sung Jin Hong, Kang Yong Lee, S. Chung

{"title":"On-chip enucleation using an untethered microrobot incorporated with an acoustically oscillating bubble","authors":"I. Park, Young Rang Lee, Sung Jin Hong, Kang Yong Lee, S. Chung","doi":"10.1109/MEMSYS.2015.7051145","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7051145","url":null,"abstract":"This paper presents a novel on-chip enucleation method using a magnetically driven microrobot incorporated with an acoustically excited bubble. The proposed microrobot mainly consists of a compressible bubble for the manipulation of a cell and twin neodymium magnets for the motion control of the microrobot in an aqueous medium. First, the two-dimensional (2D) motion control of the microrobot - horizontal, vertical, and rotational motions - is demonstrated by using an external magnetic controller attached beneath the bottom of a chip owing to the interaction forces induced by twin magnets installed inside both the microrobot and controller. Second, the enucleation of a cell is separately investigated using an acoustically oscillating bubble. When a bubble is acoustically excited at its natural frequency, it oscillates and simultaneously generates cavitational microstreaming and radiation forces around it. The flow pattern and strength of the microstreaming in different frequencies and voltages are studied using a microscopic PIV system. The flow strength is proportional to the voltage and strongly dependent on the frequency and maximum at its natural frequency. To investigate the effects of the microstreaming on the inside of a cell through a narrow slit, particle extraction test is conducted using a small PDMS cylinder chamber. It shows that most of the particles initially filled in the chamber are extracted by an acoustically excited bubble and the chamber becomes empty within 160 seconds. Finally, as proof of concept, the embryo extraction from a fish egg (1.7 mm diameter) dyed by methylene blue is successfully achieved using the proposed microrobot. This on-chip enucleation technique may improve the efficiency of enucleation processes with minimizing the contact damage between a cell and a micromanipulation tool.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"62 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126271543","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 2