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TV-Holography (ESPI) in Material Diagnostics 材料诊断中的电视全息(ESPI)
Topical Meeting on Lasers in Materials Diagnostics Pub Date : 1900-01-01 DOI: 10.1364/lmd.1987.wb2
O. J. Løkberg, J. T. Malmo
{"title":"TV-Holography (ESPI) in Material Diagnostics","authors":"O. J. Løkberg, J. T. Malmo","doi":"10.1364/lmd.1987.wb2","DOIUrl":"https://doi.org/10.1364/lmd.1987.wb2","url":null,"abstract":"Almost a quarter of a century ago hologram interferometry was hailed as the promising tool for material testing and diagnosis. This prophesy has been partly fulfilled, but mainly within the safe enclosure of the laboratory and for carefully designed experiments. The limitation of the technique has been-and still is, even with the new thermoplastic materials- the time delay between recording and display.","PeriodicalId":331014,"journal":{"name":"Topical Meeting on Lasers in Materials Diagnostics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130317568","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Laser-Induced Modulated Reflectance in Semiconductor Materials Analysis 半导体材料的激光诱导调制反射分析
Topical Meeting on Lasers in Materials Diagnostics Pub Date : 1900-01-01 DOI: 10.1364/lmd.1987.tha1
A. Rosencwaig
{"title":"Laser-Induced Modulated Reflectance in Semiconductor Materials Analysis","authors":"A. Rosencwaig","doi":"10.1364/lmd.1987.tha1","DOIUrl":"https://doi.org/10.1364/lmd.1987.tha1","url":null,"abstract":"During the past few years, thermal wave physics has been successfully applied to studies of semiconductor materials and microelectronic devices. Previously, we described how these materials and devices might be examined with thermal wave imaging.1 This imaging is performed in a scanning electron microscope with a thermoelastic technique for thermal wave detection. Although this technique is a very sensitive detection method for thermal waves,2 it has limited applicability for integrated circuit process control and inspection because it requires contact to a transducer and thus is potentially contaminating. Furthermore the results are often strongly dependent on difficult to control acoustic variables such as sample geometry and sample/detector coupling. To overcome these problems we have developed a noncontact thermal wave technique that can be used at the high modulation frequencies required for micron-scale resolution.3–5","PeriodicalId":331014,"journal":{"name":"Topical Meeting on Lasers in Materials Diagnostics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130578653","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Resonance Ionization Mass Spectrometry Using Ion-Beam Sampling 使用离子束取样的共振电离质谱法
Topical Meeting on Lasers in Materials Diagnostics Pub Date : 1900-01-01 DOI: 10.1364/lmd.1987.thc2
D. Goeringer, W. Christie
{"title":"Resonance Ionization Mass Spectrometry Using Ion-Beam Sampling","authors":"D. Goeringer, W. Christie","doi":"10.1364/lmd.1987.thc2","DOIUrl":"https://doi.org/10.1364/lmd.1987.thc2","url":null,"abstract":"Sputter atomization/resonance ionization mass spectrometry (SA/RIMS) is a highly sensitive technique for materials analysis which combines ion beam sputtering, resonance ionization, and mass spectrometry. A pulsed beam of high-energy primary ions bombards the sample producing a plume of neutral atoms. The cloud of sputtered neutrals is intersected and ionized by a synchronized, pulsed laser beam tuned to a resonant transition for specific sample atoms. Laser-generated ions are then extracted into a mass spectrometer for mass analysis. Ion beam sputtering allows the sampling process to be highly controlled by varying the energy, current density, and composition of the primary beam; the pulsed nature of the beam results in efficient sample utilization. Use of a micro-focused beam permits imaging of small areas and particles. The pulsed dye laser generates the high optical power necessary to efficiently ionize the sputtered atoms. Mass analysis of the laser-generated ions provides the capability for isotope ratio measurements.","PeriodicalId":331014,"journal":{"name":"Topical Meeting on Lasers in Materials Diagnostics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125521578","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Two and Three Dimensional Imaging of Thin Films Using the Raman Microprobe 利用拉曼微探针对薄膜进行二维和三维成像
Topical Meeting on Lasers in Materials Diagnostics Pub Date : 1900-01-01 DOI: 10.1364/lmd.1987.wa1
P. Fauchet
{"title":"Two and Three Dimensional Imaging of Thin Films Using the Raman Microprobe","authors":"P. Fauchet","doi":"10.1364/lmd.1987.wa1","DOIUrl":"https://doi.org/10.1364/lmd.1987.wa1","url":null,"abstract":"There is an increasing need for non-destructive characterization techniques that require no special sample preparation, can be used in-situ, and provide quantitative information with good spatial resolution. The Raman microprobe fulfills these requirements. We illustrate the capabilities of the Raman microprobe by presenting results obtained on thin films after laser-induced damage, after laser or rapid thermal annealing, and on heteroepitaxial semiconductor layers. The prospects for two and three-dimensional imaging of important properties such as composition, strain, and crystalline quality or orientation are discussed.","PeriodicalId":331014,"journal":{"name":"Topical Meeting on Lasers in Materials Diagnostics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122484828","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
The Spatial Resolution and Defect Contrast of Optical Beam Induced Reflectance (OBIR) Scans 光束诱导反射(OBIR)扫描的空间分辨率和缺陷对比度
Topical Meeting on Lasers in Materials Diagnostics Pub Date : 1900-01-01 DOI: 10.1364/lmd.1987.wf2
G. Carver, D. Joy
{"title":"The Spatial Resolution and Defect Contrast of Optical Beam Induced Reflectance (OBIR) Scans","authors":"G. Carver, D. Joy","doi":"10.1364/lmd.1987.wf2","DOIUrl":"https://doi.org/10.1364/lmd.1987.wf2","url":null,"abstract":"There is substantial current interest in developing non-contact, non-destructive probes of semiconductor surfaces.[1] [2] [3] [4] [5] A major reason for this activity is that micro-stuctural flaws near the surface of silicon wafers generally impair the successful manufacture of integrated circuits.[6] Detrimental defects such as stacking faults, dislocations, and metallic precipitates are often 1 to 2 microns in size. Thus, a probing system would need to exhibit both high spatial resolution and contrast at defective sites.","PeriodicalId":331014,"journal":{"name":"Topical Meeting on Lasers in Materials Diagnostics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134018644","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
High Frequency Optical Heterodyne Spectroscopy with Lead-Salt Semiconductor Diode Lasers 铅盐半导体二极管激光器的高频光学外差光谱
Topical Meeting on Lasers in Materials Diagnostics Pub Date : 1900-01-01 DOI: 10.1364/lmd.1987.wd3
D. E. Cooper
{"title":"High Frequency Optical Heterodyne Spectroscopy with Lead-Salt Semiconductor Diode Lasers","authors":"D. E. Cooper","doi":"10.1364/lmd.1987.wd3","DOIUrl":"https://doi.org/10.1364/lmd.1987.wd3","url":null,"abstract":"Absorption spectroscopy with lasers has traditionally been limited in sensitivity by noise intrinsic to the laser source. Numerous methods of surmounting this limitation using various forms of sample and source modulation have been proposed and demonstrated. One technique in particular, familiar to most users of lead-salt diode lasers, incorporates low-frequency wavelength modulation of the laser source and detection at either the first or second harmonics of the modulating waveform. Although this technique has been used successfully to measure weak absorptions, it remains fundamentally limited by diode laser amplitude fluctuations because the signal is detected in a frequency regime where the lasers exhibit considerable excess noise. Although the high frequency noise characteristics of lead-salt diode lasers are complex,1,2 one expects their excess noise power to drop considerably at frequencies larger than the intrinsic laser linewidth. Hence, diode laser frequency modulation at radio-frequencies should offer greater immunity to laser noise and consequently a higher sensitivity to absorption than can be obtained with conventional low frequency techniques.","PeriodicalId":331014,"journal":{"name":"Topical Meeting on Lasers in Materials Diagnostics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132583390","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Characterization of Materials by Visible-Near UV Spectrophotometric and Spectroellipsometric Techniques 用可见-近紫外分光光度和光谱椭偏技术表征材料
Topical Meeting on Lasers in Materials Diagnostics Pub Date : 1900-01-01 DOI: 10.1364/lmd.1987.wf1
D. Aspnes
{"title":"Characterization of Materials by Visible-Near UV Spectrophotometric and Spectroellipsometric Techniques","authors":"D. Aspnes","doi":"10.1364/lmd.1987.wf1","DOIUrl":"https://doi.org/10.1364/lmd.1987.wf1","url":null,"abstract":"The primary advantages of optical measurements are that they are general, convenient, nondestructive, and can yield information about dynamic systems or processes in real time and in any transparent ambient. No special sample requirements are needed other than a reflecting surface, and measurements can be made with the sample in air or in atmospheric-pressure ambients. Nondestructiveness is obviously important for the analysis of unstable materials systems such as interfaces buried under oxide overlayers, while real-time capabilities suggest useful applications in process control. A final advantage is that optical probes offer unsurpassed energy resolution, important for accurately determining compositions of semiconductor alloys.","PeriodicalId":331014,"journal":{"name":"Topical Meeting on Lasers in Materials Diagnostics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114577906","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Analysis of Uranium Solutions Using Laser-Induced Breakdown Spectroscopy 激光诱导击穿光谱法分析铀溶液
Topical Meeting on Lasers in Materials Diagnostics Pub Date : 1900-01-01 DOI: 10.1364/lmd.1987.wc3
D. Cremers, J. Wachter
{"title":"Analysis of Uranium Solutions Using Laser-Induced Breakdown Spectroscopy","authors":"D. Cremers, J. Wachter","doi":"10.1364/lmd.1987.wc3","DOIUrl":"https://doi.org/10.1364/lmd.1987.wc3","url":null,"abstract":"Measurement of the uranium content in liquid streams is important for criticality safety, process and quality control, and nuclear material accountability in nuclear fuel cycle facilities. Conventional analytical techniques such as spectrophotometry, passive gamma-ray spectroscopy, x-ray fluorescence, and densitometry are frequently unsuitable because they may be slow, require sample handling, or be subject to interference by high concentrations of fission products or neutron emitters in the solutions to be analyzed.","PeriodicalId":331014,"journal":{"name":"Topical Meeting on Lasers in Materials Diagnostics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114658332","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Optical Sensing for Automated Inspection 自动检测的光学传感
Topical Meeting on Lasers in Materials Diagnostics Pub Date : 1900-01-01 DOI: 10.1364/lmd.1987.wb1
T. Strand
{"title":"Optical Sensing for Automated Inspection","authors":"T. Strand","doi":"10.1364/lmd.1987.wb1","DOIUrl":"https://doi.org/10.1364/lmd.1987.wb1","url":null,"abstract":"Optics has always played a major role in industrial inspection and measurement applications. However in the past a critical component in such systems has often been the human eye. This aspect is changing rapidly now with the introduction of new technologies and new concepts in optical measurement. We will describe a number of new tools that provide new capabilities in inspection and also can eliminate the human from the measurement process.","PeriodicalId":331014,"journal":{"name":"Topical Meeting on Lasers in Materials Diagnostics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127164863","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Quantum-Resolved Gas-Surface Scattering: NH3 from Au (111) 量子分辨气体表面散射:Au(111)中的NH3
Topical Meeting on Lasers in Materials Diagnostics Pub Date : 1900-01-01 DOI: 10.1364/lmd.1987.we2
B. D. Kay, T. Raymond, M. Coltrin
{"title":"Quantum-Resolved Gas-Surface Scattering: NH3 from Au (111)","authors":"B. D. Kay, T. Raymond, M. Coltrin","doi":"10.1364/lmd.1987.we2","DOIUrl":"https://doi.org/10.1364/lmd.1987.we2","url":null,"abstract":"We have measured angular, velocity, and quantum-state distributions for ammonia molecules scattered from a gold (111) single crystal for a number of surface temperatures and incident beam energies. A molecular beam source produces a well-collimated, rotationally cold (~15 K) beam of NH3 molecules with a narrow dispersion of translational energy (~10%). The molecular beam impinges on an atomically clean, single crystal of gold (111) and the scattered NH3 is detected in a quantum-resolved manner using two-photon resonant, three-photon ionization [1].","PeriodicalId":331014,"journal":{"name":"Topical Meeting on Lasers in Materials Diagnostics","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134242214","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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