2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics最新文献_第9页

Atomic layer deposition of PbTiO3 and its component oxide films PbTiO3及其组分氧化膜的原子层沉积

2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics Pub Date : 2007-05-27 DOI: 10.1109/ISAF.2007.4393198

Hyun Ju Lee, G. Hwang, K. Lee, G. Kim, C. Hwang

{"title":"Atomic layer deposition of PbTiO3 and its component oxide films","authors":"Hyun Ju Lee, G. Hwang, K. Lee, G. Kim, C. Hwang","doi":"10.1109/ISAF.2007.4393198","DOIUrl":"https://doi.org/10.1109/ISAF.2007.4393198","url":null,"abstract":"Atomic layer deposition of ferroelectric PbTiO3 (PTO) thin films and its component oxide films were attempted using the Pb(DMAMP)2 and Ti(Oi-Pr)4 or Ti(Ot-Bu)4, as the Pb-and Ti-precursors, respectively, and H2O as oxidant at a wafer temperature of 200 on Ir/IrO2/SiO2/Si substrate. The stoichiometric PTO thin films were grown by a proper control of the cycle ratio of the PbO and TiO2 cycles. The increase of the PTO film growth rate due to the cayalytic effect was observed compared to its component oxide films for both processes using Ti(Oi-Pr)4 or Ti(Ot-Bu)4. The as-deposited PTO film was amorphous so that two different post-deposition annealing method, i.e. slow and fast furnace annealing at 600 , were used to crystallize PTO film. The higher growth rate of PTO film grown using Ti(Oi-Pr)4 due to the higher growth rate of TiO2 film compared to the case using Ti(Ot-Bu)4 resulted in less dense PTO film with the higher density of micro-pores inside as well as surface of film after the fast furnace annealing. Slow furnace annealing improved the surface morphology of PTO film and reduced the micro-pore density. Post-deposition annealing transformed amorphous film to polycrystalline film of perovskite sturcure with an a-axis preferred crystallographic orientation.","PeriodicalId":321007,"journal":{"name":"2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics","volume":"93 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-05-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121995125","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Two-Phase Driving Type Piezoelectric Gyro-Moment Motor 两相驱动型压电陀螺力矩电机

2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics Pub Date : 2007-05-27 DOI: 10.1109/ISAF.2007.4393405

K. Kanayama, M. Hasegawa, Y. Tomikawa

引用次数: 0

Sputtering (103) Oriented AlN and its SAW Properties Analysis 溅射(103)取向AlN及其SAW性能分析

2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics Pub Date : 2007-05-27 DOI: 10.1109/ISAF.2007.4393398

Zhi-Xun Lin, Sean Wu, R. Ro, Maw-Shung Lee

引用次数: 2

Longitudinal Displacement Measurement of Lead Zirconate Titanate Thick Films Deposited on Silicon substrates 硅衬底上锆钛酸铅厚膜的纵向位移测量

2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics Pub Date : 2007-05-27 DOI: 10.1109/ISAF.2007.4393223

T. Iijima, H. Okino, T. Yamamoto

引用次数: 0

Nonlinear Dielectric Bahaviour of Metal/Ferroelectric/Metal and Metal/Ferroelectric/Semiconductor-Heterostructures 金属/铁电/金属和金属/铁电/半导体异质结构的非线性介电行为

2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics Pub Date : 2007-05-27 DOI: 10.1109/ISAF.2007.4393217

K. Barz, M. Diestelhorst, H. Beige, L. Geske, M. Alexe, D. Hesse

引用次数: 0

Gradient free sol-gel Pb(Zrx, Ti1-x)O3 thin films 梯度自由溶胶-凝胶Pb(Zrx, Ti1-x)O3薄膜

2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics Pub Date : 2007-05-27 DOI: 10.1109/ISAF.2007.4393173

F. Calame, P. Muralt

引用次数: 1

A Novel Technique for the Determination of Thermal Diffusivities and Conductivities and its Application to Porous PZT Samples 一种测定热扩散系数和导热系数的新技术及其在多孔PZT样品中的应用

2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics Pub Date : 2007-05-27 DOI: 10.1109/ISAF.2007.4393409

Sidney B. Lang, E. Ringgaard

{"title":"A Novel Technique for the Determination of Thermal Diffusivities and Conductivities and its Application to Porous PZT Samples","authors":"Sidney B. Lang, E. Ringgaard","doi":"10.1109/ISAF.2007.4393409","DOIUrl":"https://doi.org/10.1109/ISAF.2007.4393409","url":null,"abstract":"A modification of a technique for the measurement of the thermal diffusivity of thin solid materials is presented. It is based on the measurement of the phase retardation of a thermal wave passing through the test material by means of a PZT pyroelectric detector. It is not necessary to know either the pyroelectric coefficient of the detector or the intensity of the laser beam. The technique was applied to the study of several sets of Ferroperm Pz27 ceramic samples with porosities of 20, 25 and 30%. One sample set was poled and the pores were partially filled with the fluid using during poling. A second set was not poled. Scanning electron micrographs indicated that the 20 and 25% samples had 0-3 connectivity with a small amount of 3-3 connectivity. The connectivity of the 30% porosity sample was almost completely 3-3. The heat capacity of the Pz27 was determined in order that thermal conductivities could be calculated. The poled porous samples had thermal conductivities intermediate between that of a commercial dense Pz27 sample and those of unpoled materials.","PeriodicalId":321007,"journal":{"name":"2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-05-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123542022","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Properties of MOD-derived SrBi2Ta2O9 thin films crystallized in an electric field mod衍生SrBi2Ta2O9薄膜在电场中结晶的性质

2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics Pub Date : 2007-05-27 DOI: 10.1109/ISAF.2007.4393186

C. Leu, Tzong-Dar Wu, F. Hsu

引用次数: 0

Phase Transformation Sequences in As-Grown PZN-4.5%PT Single Crystals 生长PZN-4.5%PT单晶的相变序列

2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics Pub Date : 2007-05-27 DOI: 10.1109/ISAF.2007.4393329

W. Chang, L.C. Li, P. Yang, H. Moser, F.-T. Wang, C.-T. Tseng, C. Tu

引用次数: 0

Design and Simulation of Ultrasonic Linear Motor using Multilayer Ceramic Actuator 多层陶瓷作动器超声直线电机的设计与仿真

2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics Pub Date : 2007-05-27 DOI: 10.1109/ISAF.2007.4393404

J. Yoo, Sang-ho Lee, Jaeil Hong, H. Song, Durkwon Park, Eunsang Hwang

{"title":"Design and Simulation of Ultrasonic Linear Motor using Multilayer Ceramic Actuator","authors":"J. Yoo, Sang-ho Lee, Jaeil Hong, H. Song, Durkwon Park, Eunsang Hwang","doi":"10.1109/ISAF.2007.4393404","DOIUrl":"https://doi.org/10.1109/ISAF.2007.4393404","url":null,"abstract":"In comparison with conventional electromagnetic motors, ultrasonic motors have many advantages such as a large torque at the low velocity, good controllability, rapid response, quiet operation, simple structure and non electromagnetic field induction, etc. These features have led to the development of various ultrasonic motors in many industrial fields. Hence, in this study, ultrasonic linear motor using multilayer structured ceramic actuator was designed and simulated using ANSYS of finite element method(FEM) simulator for investigating the optimum conditions of it. The ultrasonic linear motor studied in this paper was designed using the 1st longitudinal (L1) and 4th bending (B4) vibration. The size of ceramic actuator is 15 mm long and 5 mm wide. And one-layer thickness of actuator is 60 mu m. The dimension of linear motor is 61 times 5 times 3 mm. The sectional size of projection is 1.5 times 5 mm. The driving voltage of the motor was very low as 5 Vrms. With the increase of the number of piezoelectric ceramic layers, displacement of node was increased up to 21 layered ceramic actuator and then decreased. Maximum z displacement of node was about 7.02 mum at the 21 layered ultrasonic motor.","PeriodicalId":321007,"journal":{"name":"2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-05-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134024428","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 2