梯度自由溶胶-凝胶Pb(Zrx, Ti1-x)O3薄膜

2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics Pub Date : 2007-05-27 DOI:10.1109/ISAF.2007.4393173

F. Calame, P. Muralt

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引用次数: 1

摘要

采用溶胶-凝胶法在Pt(111)/TiOx/SiO2/Si衬底上合成了Pb(Zrx,Ti1-x)O3薄膜。在Zr浓度波动中，通常观察到的b位组成梯度可以在%振幅下从plusmn12降低到plusmn2.5。得到的2个厚、密、无裂纹薄膜的织构指数为98.4%。同时，晶粒直径增加了50%。介质和压电性能显著提高。得到了相对介电常数epsi33f为1620，剩余横向压电系数e31f为-17.7 C/m2。

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Gradient free sol-gel Pb(Zrx, Ti1-x)O3 thin films

Pb(Zr_x,Ti_1-x)O₃ thin films of homogeneous composition were synthesized by means of a modified sol-gel route on Pt(111)/TiO_x/SiO₂/Si substrates. The usually observed gradient in B-site composition could be reduced from plusmn12 to plusmn2.5 at% amplitude in Zr concentration fluctuations. The obtained 2 mum thick, dense and crack free films exhibited a {100}-texture index of 98.4%. Grain diameters increased at the same time by 50%. Dielectric and piezoelectric properties were remarkably improved. The relative dielectric constant epsiv_33f was obtained as 1620, and the remanent transverse piezoelectric coefficient e_31f-was measured as -17.7 C/m².

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2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics

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