J. Chiou, Lei-Chun Chou, S. Tsai, K. Hou, Chih-Wei Chang
{"title":"Cooling stimulation on cerebral cortex for epilepsy suppression with integration of micro-invasive electrodes and TE coolers","authors":"J. Chiou, Lei-Chun Chou, S. Tsai, K. Hou, Chih-Wei Chang","doi":"10.1109/NEMS.2013.6559945","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559945","url":null,"abstract":"Epilepsy suppression with cooling stimulation is the primary purpose for this study. In this dissertation, cooling stimulation was implemented and demonstrated on cerebral cortex of rats. Electrodes with needle structure was designed and fabricated by using MEMS technology to minimize the size of device. A TE cooler was used to create cooling source and it can be control via electrical current. A cooler component was integrated with an electrode and a TE cooler, in addition, a thermal sensor was also combined with it to detect temperature variation, which was affected by cooling cerebral cortex. The cooler components were implanted on surface of cerebral with deep brain stimulation and the thermal sensors were penetrated into cortex to measure temperature variation which can verify the functions of cooler components. In our experimental results, electrodes with needle structure can improve efficiency of epilepsy suppression due to the particular structure. Duration, frequency and average single time of epileptic waveforms were used to identify to performance of suppression.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"34 6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114136783","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A. Nakahara, Y. Shirasaki, J. Mizuno, T. Sekiguchi, O. Ohara, S. Shoji
{"title":"PDMS-CYTOP hybrid structure microwell array chip for total internal reflection fluorescence microscopy","authors":"A. Nakahara, Y. Shirasaki, J. Mizuno, T. Sekiguchi, O. Ohara, S. Shoji","doi":"10.1109/NEMS.2013.6559835","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559835","url":null,"abstract":"A microwell arrry device with a hybrid structure of amorphous perfluoroplymer, CYTOPTM, and polydimethylsiloxane (PDMS) which is specialized in total internal reflection fluorescence (TIRE) microscopy was developed. Since the CYTOP layer, whose refractive index is as same as that of water, is sandwiched between PDMS and glass substrate, leakage of incident light is avoided. PDMS layer upon the CYTOP enables high aspect ratio structures and easy integration of microfluidic components. Since direct bonding of CYTOP and PDMS is difficult to achieve, a chemical bonding method using aminosilane coupling reagent and 3-Glycoidoxypropyltriethoxysilane was applied. The bond strength was about 0.74 MPa. 24 × 50 microwell array was fabricated and their optical properties was evaluated. Measured TIRE microscopy results shows no interfere with incident light under the conventionally used conditions.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115280720","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Design, fabrication, and characterization of graphene thermistor","authors":"H. Al-Mumen, F. Rao, Lixin Dong, Wen Li","doi":"10.1109/NEMS.2013.6559922","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559922","url":null,"abstract":"This paper reported a new application of graphene that is graphened thermistor. Mono-layer, bi-layer and few-layer graphene devices with different dimensions were designed and fabricated. Temperature sensing behavior of graphene has been studied in a small temperature range from room temperature (RT) to 80°C because this range is important in electronic instrumentations and integrated circuit design. Thermal inertia of the graphenes was studied at a temperature of 80°C and the sensing behavior was characterized by measuring the time response of the normalized resistances. Our preliminary results demonstrated a higher negative temperature coefficient of the bilayer graphene those of mono-layer and few-layer graphenes. In addition, engineered graphene resistance based on its dimension has been investigated. This technique provides a strong candidate for temperature sensing in the micro and nano industrial applications with high reliability, high sensitivity and low cost.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"211 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116690945","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Coalition transportation of cells with optical tweezers","authors":"Xiangpeng Li, Jianjun Wang, Dong Sun","doi":"10.1109/NEMS.2013.6559925","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559925","url":null,"abstract":"In optical cells manipulation tasks, optical manipulation works only when the cell is located within the optical trap. Currently, due to the lack of control techniques that automatically control cell transfer while locating the cell within optical trap consistently, cells must be manipulated carefully to avoid escape from optical trap, which significantly decreases the efficiency of manipulation task. As a result, the development of a control method for rapid and accurate positioning of cells is becoming a very challenging issue. In this paper, we addressed this challenging problem by developing a unique vision feedback control method that controls both cell positioning and cell trapping simultaneously. We first establish a new geometric model to confine the cell within a local region specified near the optical trap and form a Cell-Tweezers Coalition (C-T Coalition) during manipulation. Then, a potential field function based controller is proposed to drive C-T Coalition to the desired position. Experiments of yeast cell manipulation are performed to demonstrate the effectiveness of the proposed approach.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"58 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121735638","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Chuhang Zhang, H. Tsunoyama, Hiroki Akatsuka, Hiroki Sekiya, T. Nagase, A. Nakajima
{"title":"Development of cluster ion source based on modulated pulse power magnetron sputtering technique","authors":"Chuhang Zhang, H. Tsunoyama, Hiroki Akatsuka, Hiroki Sekiya, T. Nagase, A. Nakajima","doi":"10.1109/NEMS.2013.6559764","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559764","url":null,"abstract":"A new ion source based on modulated pulse power (MPP) magnetron sputtering (MSP) was developed and demonstrated for cluster production. By employing MPP-MSP, both silver and silicon cluster beams were produced and analyzed by a quadrupole mass spectrometer. It is found that the maximum intensity of silver cluster anions reaches 500 pA, which is considerably higher than that with a conventional DC-MSP. For silicon cluster cation, the overall ion intensity of the cluster beam by MPP-MSP is about three times higher than that generated by DC-MSP.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"62 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121358559","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Micro thermal flow sensors/systems on flexible PCB and extensive applications","authors":"R. Zhu, R. Que, Zhe Cao","doi":"10.1109/NEMS.2013.6559709","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559709","url":null,"abstract":"We demonstrate our researches on developing micro thermal flow sensors by depositing nano metallic films on flexible substrates for detecting surface flow. The fabrication of the sensors is incorporating standard printed circuit technique with micromachining deposit/sputter, which takes advantages of low cost, easy fabrication, easy packaging and integrating sensors with processing circuits. The applications using the sensors to detect airflow around air vehicles, underwater wall shear stress, and to measure respiratory flow for monitoring and diagnosing respiratory diseases are also presented.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"293 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116568230","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Wenrong Wang, C. Liang, Tie Li, Heng Yang, N. Lu, Yuelin Wang
{"title":"Graphene films synthesized on electroplated Cu by chemical vapor deposition","authors":"Wenrong Wang, C. Liang, Tie Li, Heng Yang, N. Lu, Yuelin Wang","doi":"10.1109/NEMS.2013.6559693","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559693","url":null,"abstract":"In this paper, electroplated Cu was used as substrate to grow graphene by chemical vapor deposition (CVD) with a mixture gas of methane, hydrogen and argon. The different electroplated Cu grain size after annealing was studied. We present the growth temperature, growth time and methane concentration are key parameters that affect the structural perfection of graphene.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"122 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122647164","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Dunzhu Xia, Cheng Yu, Shourong Wang, Hongsheng Li, Lun Kong
{"title":"Structure design and simulation of micro dynamically tuned gyroscope with three equilibrium rings","authors":"Dunzhu Xia, Cheng Yu, Shourong Wang, Hongsheng Li, Lun Kong","doi":"10.1109/NEMS.2013.6559883","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559883","url":null,"abstract":"The structure of a micro dynamically tuned gyroscope (MDTG) with three equilibrium rings has been designed to eliminate the error caused by the double rotation frequency of the driving shaft like traditional DTG. Some simulations under the optimized structure parameters are given. The mode frequency is separated from 167Hz of the rotation frequency of the motor as simulated. The static deformation is controlled within less than 1μm under gravity and a load in our mechanical simulations. The dynamic deformation is simulated when the rotor rotates at a specified speed. The assembly distance between the electrode plates and the rotor disk is chosen from 40μm to 60μm after the static capacitance simulation.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126998025","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Optimization of the micro channel ladder shape heat sink","authors":"C. Kang, S. Tai, Sheng-Chung Chen, D. T. Lin","doi":"10.1109/NEMS.2013.6559757","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559757","url":null,"abstract":"The channel heat sink is in contact with the working fluid to remove the heat. But much channel will result higher pressure difference issue in the micro multi-channel heat sink. In this paper, a ladder shape channel (link between the parallel channel) is proposed to correct the problem of high pressure difference. The design of the link decreases the pressure difference for reducing the pump work of the micro multichannel heat sink. The purpose of this paper is to maximize the efficiency of the micro multi-channel ladder shape heat sink by using optimization design. An optimization method based on the genetic algorithm and COMSOL 3-D conjugated thermal-fluid model is applied to establish the optimal geometry parameters of the link. The results show that this optimized heat sink design can improve the efficiency more than 43%. And the heat removal of the proposed device is significantly improved.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121770840","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"An electrostatically driven peristaltic micropump with an indium tin oxide electrode","authors":"Bonghwan Kim, K. Lee, M. Shannon","doi":"10.1109/NEMS.2013.6559875","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559875","url":null,"abstract":"An electrostatically driven valveless double-sided peristaltic micropump with an indium tin oxide (ITO) transparent electrode has been developed for gas chromatography. In order to verify the motion of the pump, an ITO-ITO micropump was fabricated, and in order to measure flow rate, an ITO-Si micropump was fabricated. The micropump was fabricated on an ITO on glass substrate and a silicon substrate with a polyimide membrane. A maximum flow rate of 27.19 μl/min was measured at 4 Hz and 100 V DC. The micropump was operated by 4 electrodes with a 4-phase sequencing actuation.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"64 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128009837","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}